Rotary Actuator

Applicable shaft type: K X = X = X = Y = W2 = L2 = L4 = Y = [mm] [mm] [mm] Size Y W2 L2max L4max 30 8.5 to 25 1 to 2 Y-2 L2-2 50 10 to 36 1 to 5.5 Y L2-2 63 11 to 41 1 to 6.5 Y L2-2 80 13.5 to 50 1 to 8 Y L2-3 100 17 to 60 1.5 to 10.5 Y L2-4 Size X 30 3 to 25 50 3.5 to 36 63 3.5 to 41 80 4 to 50 100 5 to 60 Size Y 30 3 to 25 50 1 to 36 63 1 to 41 80 1 to 50 100 1 to 60 Symbol: A53 Note) Except

MY1

For MY1M50, 63 Work piece EY SMC EC a FH a 5 4.5 6 4 9 9.5 W 58 70 88 104 128 152 TT 5 (max. 11) 5 (max. 16.5) 8 (max. 20) 9 (max. 25) 13 (max. 33) 13 (max. 38) T 7 12 15 15 25 25 S 46.7 67.3 73.2 73.2 99 99 h 3.5 4.5 5.5 5.5 11 11 FW 66 82 95 FH 16 22 22 FC 14 17 22 22 30 35 FB 52 67 78 F 5 6 8 8 8 8 EY 50 57.5 73 87 115 138.5 EC 7.7 9 11.5 12 18.5 19 EB 32 38 50 57 66 77 E 20 24

ISO Cylinder

Weights [g] Bore size [mm] 8 10 12 16 20 25 C85KN 39 41 82 95 189 257 C85KE 41 43 86 98 194 262 Without magnet C85KF 37 39 77 85 174 240 C85KY 37 39 77 85 175 241 Basic weight CD85KN 39 41 83 95 193 261 CD85KE 41 43 86 99 198 266 With magnet CD85KF 37 39 77 85 178 244 CD85KY 37 39 78 85 178 245 Additional weight per 10 mm of stroke 2.3 2.5 4.5 5.5 8.7 12.2 Foot (1 pc.)

MGP

Contents Contents 20 25 32 40 50 63 80 100 MGP63-B-PS MGP80-B-PS MGP100-B-PS MGP20-B-PS MGP25-B-PS MGP32-B-PS MGP40-B-PS MGP50-B-PS Kits include items 21, 22, 23, 24, 32, 33, 41 and 42 from the table above. Kits include items 21, 22, 23, 24, 32, 33, 41 and 42 from the table above. Items 32 and 33 are not included for bores sizes 80 and 100.

A

ANA1-12 11/4 280 544 200 74 60 ANA1-14 11/2 450 612 230 74 60 ANA1-20 2 610 873 271 86 70 ANB1-01 1/8 15 10 51 22 ANB1-02 1/4 35 22 81 25 18 ANB1-03 3/8 60 35 93 30 21 ANB1-04 1/2 90 94 107 46 24 ANB1-06 3/4 160 175 133 50 41 ANB1-10 1 280 462 190 74 41 ANB1-12 11/4 450 612 230 74 60 ANB1-14 11/2 610 871 271 86 70 D I M E N S I O N S ANA1-10~20 ANB1-06~14 ANA1-01~06 ANB1-01~04 D I M E N

VHK

B L2 Q L1 H 1(P) 2(A) L3 L4 L5 L6 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-01S-M5 VHK-M5-M5 11 41 1.2 26 23 11 3.5 11 M5 M5 M5 18 29.1 16.5 VHK-B1A 29 29.1 44.5 14.5 1 27 22 16.5 26 61.6 58.2 2.0 2.0 54 51 1 8 11 41 8.6 1.2 13 3.5 18 32.6 16.5 13 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-01S-01S 1 8 1 8 30 32.6 65.2 57 VHK-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62

VHK

L1 H 1(P) 2(A) C D E F G J K L3 L4 L5 L6 L2 Q 18 61.6 58.2 2.0 2.0 29 29.1 44.5 14.5 1 27 22 16.5 26 41 29.1 16.5 3.5 11 1.2 26 23 11 30 54 51 11 M5 M5 M5 VHK-B1A VHKm-01S-M5 VHKm-M5-M5 1 8 18 41 32.6 16.5 3.5 11 44.5 14.5 1 27 22 16.5 26 8.6 1.2 13 57 13 VHK-B1A VHKm-01S-01S 1 8 1 8 32.6 65.2 VHKm-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62 66 17 VHK-B1A 44.5 14.5

Table of Contents

Specifications. 4 4 6 8 8 9 9 10 11 11 12 12 13 14 15 15 15 15 16 17 17 17 18 19 19 20 20 21 22 25 31 31 31 31 35 35 35 39 39 39 41 41 41 43 45 47 47 48 54 63 63 65 67 67 68 69 69 70 71 72 72 73 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Dimensions .

SQ1000/2000

A 23 6 () 11 Station 8 SOL.

CY1

36 7.5 28 M6 x 1x 8 11 9 CY1RG25 3 1 9.5 5.2 27.8 6 44 42.5 44 41 23.5 43 14.5 41 6.5 33.5 M6 x 1 x 8 15 8.5 CY1RG32 3 1.5 11 6.5 35 7 55 53.5 55 52 29 54 20 51 7 41 M8 x 1.25 x 10 13 10.5 CY1RG40 5 2 11 6.5 43 7 65 63.5 67 62 36 66 25 62 8 50 M8 x 1.25 x 10 15 13 CY1RG50 5 2 14 8.2 53 8.5 83 81.5 85 80 45 84 32 80 9 56 M10 x 1.5 x 15 25 17 CY1RG63 5 3 14 8.2 66 8.5 95 93.5 97 92 51 96 35

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

11 HP 11 14.5 20 25 HR 30 36 41 51 62 HS 8.5 7.5 6.5 7 8 HT 28 33.5 41 50 L 53 62 70 76 90 C 4.2 5.2 5.2 6.5 6.5 K 14 11 15 13 15 CB 2 3 3 3 5 J x E M5 x 0.8 x 7 M6 x 1 x 8 M6 x 1 x 8 M8 x 1.25 x 10 M8 x 1.25 x 10 CR 0.5 1 1 1.5 2 HC 31 38 43 54 66 D 16.6 21.6 26.4 33.6 41.6 F 8 9 8.5 10.5 13 G 5 6 6 7 7 GP 33 39 44 55 65 GW 31.5 37.5 42.5 53.5 63.5 H 32 39 44 55 67 HA 30 36 41 52 62 HB

Battery-less

Brown 12 Black 13 Red 7 Black 6 Orange 9 Black 8 Yellow 11 Black 10 Black 3 Robotic cable A B-2 A A-2 B B-3 B A-3 SD+ (RX) B-4 SD (TX) A-4 Signal Connector C terminal no.

10

4.5 5 5 5.5 6.5 D-P4DW 4 4 4 4.5 4 4.5 4.5 D-A9l/A9lV 7 7.5 8.5 9.5 9.5 10.5 12 D-Z7l/Z80 7.5 8.5 7.5 9.5 9.5 10.5 13 D-A5l/A6l 9 9 10 11 11 11 10 D-A59W 13 13 13 14 14 15 17 D-A3l/A44 9 9 10 11 11 11 10 * The switch mounting bolt is supplied with the switch.

VZ100/300/500

Manifold base VV3Z5-20 VV3Z5-21(R) VV3Z5-40 VV3Z5-41(R) Applicable base Sub-plate VV3Z5-40-2 VV3Z5-41-2 VV3Z5-41-1 VV3Z5-41R-2 VV3Z5-41R-1 DXT201-15-6A Applicable base VV3Z5-20-1 VV3Z5-21-1 VV3Z5-21R-1 Manifold base Manifold base DXT201-15-4A Note) Only in the case of assembled with manifold base at the time of shipment.

3 Port Air Operated Valve Series SYJA300 1

Refer to page 5-11-4.)

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

19 20.6 6 30 1/4 19 40 76.7 42 9 21 22.2 22.2 7.6 3/8 22 48 79.7 11 19 20.6 6 Size Port size Grommet Grommet with PCB Conduit J K J K J K 20 1/8 39.4 28.5 45.2 38 46.8 48.9 1/4 37.9 43.7 45.3 3/8 40.9 46.7 48.3 30 1/4 39 31.1 44.7 41 46.3 51.9 3/8 42 47.7 49.3 19 Direct Operated 2-Port Solenoid Valve JSX Series JSX20, 30 Dimensions: JSX20U, 30U Port Size 1/8, 1/4, 3/8 Body Material Brass

Sine Cylinder Series REC

4 60 75 20 20, 25, 32 25 22 19.5 40 32 13 10 17 10.5 10 45 4 60 75 26 32 22 19.5 40 32 13 12 17 10.5 11 45 4 60 75 26 40 24 21 52 41 16 14 22 13.5 12.5 50 5 66 36 82 32 MM N NA NN P S Z ZZ H1 H2 I K KA Bore (mm) 20 30 M20 x 1.5 1/8 37 200 146 M8 x 1.25 20 5 8 33.5 5 6 25 34.5 M26 x 1.5 1/8 41 204 146 M10 x 1.25 20 6 8 37.5 5.5 8 32 42.5 M26 x 1.5 1/8 41 217 159 M10 x 1.25 22 6 8 46.5

Sine Cylinder Series REC

4 60 75 20 20, 25, 32 25 22 19.5 40 32 13 10 17 10.5 10 45 4 60 75 26 32 22 19.5 40 32 13 12 17 10.5 11 45 4 60 75 26 40 24 21 52 41 16 14 22 13.5 12.5 50 5 66 36 82 32 MM N NA NN P S Z ZZ H1 H2 I K KA Bore (mm) 20 30 M20 x 1.5 1/8 37 200 146 M8 x 1.25 20 5 8 33.5 5 6 25 34.5 M26 x 1.5 1/8 41 204 146 M10 x 1.25 20 6 8 37.5 5.5 8 32 42.5 M26 x 1.5 1/8 41 217 159 M10 x 1.25 22 6 8 46.5

ZP

A B D A B D Model Model ZP3-T13B;3-B5 ZP3-T13B;6-B5 ZP3-T13B;10-B5 ZP3-T10B;3-B5 ZP3-T10B;6-B5 ZP3-T10B;10-B5 8.5 9.7 11.7 8.6 9.8 11.8 8.6 9.7 11.7 8.7 9.8 11.8 15 18 22 34.5 41 51 11 14.5 20.5 15 18 22 34.5 41 51 11 14.5 20.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

Aluminum High Vacuum Angle Valve

65 170 66 2 11 55 41 20 15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.