Vacuum System Peripherals:

Series VZ Compact size: 15 mm (VZ100/200/300) 18 mm (VZ400/500) VZ100 ZF M5 x 0.8 Vol. 4 0.11 to 3.0 VZ300/500 ZP M5 x 0.8 , VQZ200/300 Vol. 4 1.7 to 4.5 ZCU 1 8 1 4 3 port solenoid valve Series VX31/32/33 (2) (1) (2) (1) AMJ to 1 8 3 8 0.29 to 1.6 Vol. 17 Misc. 3 port solenoid valve Series VK M5 x 0.8 Vol. 4 1 8 0.47 to 0.85 (1) Compact 2 port solenoid valve Series VX2 (2) (1) to

Precision Cylinder Series MTS

M5 x 0.8 Rc 1/8 Rc 1/8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M3 x 0.5 Except for lock unit: 0.12MPa for 12 and 16; 0.10MPa for 20 to 40 Piston Speed Order Made Order Made Specifications 8 50 to 500 0.02 12 16 20 25 32 40 50 to 800 Bore size (mm) Piston speed (mm/s) Allowable kinetic energy J Refer to page 20 for series MTS order made specifications. 0.19 0.32 0.55 0.78 1.6 2.8 End Lock Specifications

KS/KX

Weight (g) <M5, M6> D1 D2 L1 L2 A M Nylon Urethane M5 X 0.8 M6 X 1.0 22.5 23 24 KXL04-M5 KXL04-M6 KXL04-01S KXL06-M5 KXL06-M6 KXL06-01S KXL06-02S KXL08-01S KXL08-02S KXL08-03S KXL10-02S KXL10-03S KXL10-04S KXL12-03S KXL12-04S 8 11 4 10.4 13 16 2.5 3.5 3.5 22 12 16 1 8 M5 X 0.8 M6 X 1.0 24 23.5 24 25 28 29 32 33 38 39 42 40 43 25 2.5 3 3.5 5.0 3.5 5.0 8 26 15 12.8 15 24 17 6 28 20 26 28 34

CE

For details, refer to page 10-20-40. 10-12-16 16 10-12-17 17 Stroke Reading Cylinder Series CE1 12, 20, 32, 40, 50, 63 How to Order CE1 32 200 L J79W Number of auto switches Mounting style Auto switch B L F G D Both ends tapped style (Standard) Bore size Nil Without auto switch Nil 2 pcs.

CE

Local Area: (800) 258-9200-www.stevenengineering.com 6 Metal connector M14 x 1 4-M5 x 0.8 depth 6 (Bottom 4.3 through-hole) 7.5 counterbore depth 4 (500 or 3000) 25 70 0.5 Width across flats 8 5 7 3 10 18f8 6f7 3.8 44 17 27 18 SR3.5 26.6 3 18 M5 x 0.8 13 40 17 27 5 67.5 14.5 4-M4 x 0.7 Thread depth 7.5 2-M5 x 0.8 (Port size) 71.5 103 + Stroke 24 127 + Stroke 2 10-12-12 12 High Precision

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Thread type 20 25 32 40 50 63 80 M5 x 0.8 Rc NPT Stroke (mm) Refer to Standard Stroke on page 8-25-21.

Modular/F.R.L. Units Series AC

A 10 B 14 D 14 Port size M5 x 0.8 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 3/4 Model Note 1) E100-M5 E200-01 E200-02 E200-03 E300-02 E300-03 E300-04 E400-02 E400-03 E400-04 E400-06 30 23.5 28 B Center of F.R.L. body D A 32 30 30 32 36 36 E500-06 3/4 32 40 44 Piping adapter AC50, AC55, AC60, AC50A AC60A, AC50B, AC55B AC60B, AF50, AF60, AR50 AR60, AL50, AL60, AW60 E600-06 3/4 48 53 35 E600-10 1

MXW

1 56 70 5 278 MXW8-125 144 121 129 138 25 32 32 2 81 95 6 328 MXW8-150 176 141 149 168 45 32 32 2 106 120 7 378 8-7-11 12 Series MXW Dimensions: MXW12 Stroke 50, 75 mm Operating port 2-M5 x 0.8 Width across hexagon socket hole 2.5 J 12 6.5 Width across flats 8 5H9 +0.030 depth 4.5 0 Operating port M5 x 0.8 6-M4 x 0.7 thread depth 6 (Helisert) Operating direction (A) Courtesy of Steven Engineering

MY1

40 J M6 x 1 MM M5 x 0.8 M6 x 1 M6 x 1 A 120 150 180 B C 5.5 6.5 8.5 CH 25.7 31.5 34.8 G 17 19 23 GB 24.5 30.0 36.5 H 66 82 98 K L 142 172 202 LD 5.6 6.8 8.6 LH 38.7 44.2 47.2 LL 49 64 79 LW 100 122 138 M 10 13 13 MW 66 80 96 N 30 37 45 NC 21 26 32 NE 64 80 96 NH 28 37 48 NW 60 74 94 09 11 14 09.5 16.0 15.0 M8 x 1.25 M10 x 1.5 PA PG 7 8 9 Bore size (mm) 25 32 40 P Rc 1/8 Rc 1/8 Rc 1/4 SS 5.1

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

> 4.1 [46] [54.5] 22.5 1 32 P P 5.5 B B A B A B A B A B 4.7 35 23.5 44.4 <45.1> 10.2 26 3 R R A A G: Approx. 300 H: Approx. 600 lead wire ( length ) (Pitch) P = 10.5 13.5 24.3 33.2 (M5 port) 2n2-One-touch fitting (ports A, B) Applicable tube O.D.: 4 6 2n1-M5 x 0.8 (ports A, B) L2 [rail mounting hole pitch 12.5] (5) L1 DIN rail holding screw DIN rail (VZ1000-11-1-) L type plug connector M

CE

+0.05 +0.02 4 45 6 Metal connector Made by TAJIMI R04-J8M7.3 M14 x 1 4-4.5 through 7.5 counter bore depth 4 (500 or 3000) 25 70 0.5 Width across flats 8 5 38 7 3 10 18f8 6f7 3.8 44 17 27 18 SR3.5 26.6 3 18 M5 x 0.8 13 40 17 27 5 67.5 14.5 4-M4 x 0.7 Thread depth 7 2-M5 x 0.8 (port size) 71.5 103 + Stroke 24 127 + Stroke 2 5 High Precision Scale Cylinder Series CEP1 Foot type 4-4.5 CEP1L12

MLU

22 27 32 CH 11 13 13 17 CF 4 7 10 12 CE 3.5 3.5 3.5 5.5 CB 23 27 31 37 CA 53 67 85 103 DJ 7 10 10 14 DI 17 22 27 32 DH 11 13 13 17 DF 4 7 10 12 DE 3.5 3.5 3.5 5.5 DB 23 27 31 37 DA 53 67 85 103 Size 25 32 40 50 Size 25 32 40 50 Part no.

Plate Cylinder with Lock Series MLU

MU-D02 MU-D03 MU-D04 MU-D05 CJ 7 10 10 14 CI 17 22 27 32 CH 11 13 13 17 CF 4 7 10 12 CE 3.5 3.5 3.5 5.5 CB 23 27 31 37 CA 53 67 85 103 DJ 7 10 10 14 DI 17 22 27 32 DH 11 13 13 17 DF 4 7 10 12 DE 3.5 3.5 3.5 5.5 DB 23 27 31 37 DA 53 67 85 103 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 8 10 10 14 Applicable pin no.

MLGP

300 300 300 20 25 32 M5 x 0.8 M5 x 0.8 9.5 12.5 38 91 13.5 28.5 M6 x 1.0 M6 x 1.0 11 7 44 110 15 34 M8 x 1.25 M8 x 1.25 WB Bore size (mm) X XA XB YY YL Z st30 3017 17 21 45 167 167 171 3.5 4.5 4.5 77 77 83 117 117 121 20 25 32 M6 x 1.0 M8 x 1.25 MLGPL (ball bushing)/Dimensions A, DB, E

MLGP

300 300 300 20 25 32 M5 x 0.8 M5 x 0.8 9.5 12.5 38 91 13.5 28.5 M6 x 1.0 M6 x 1.0 11 7 44 110 15 34 M8 x 1.25 M8 x 1.25 WB Bore size (mm) X XA XB YY YL Z st30 3017 17 21 45 167 167 171 3.5 4.5 4.5 77 77 83 117 117 121 20 25 32 M6 x 1.0 M8 x 1.25 MLGPL (ball bushing)/Dimensions A, DB, E

Manifold Specifications

How to Order Type 40 1(P) port Stations VV5Z3 05 40 2 M5 Rc 1/8 4(A), 2(B) port size 1(P), 3/5(R) port thread type 02 2 stations 3, 5(R) port M5 M5 x 0.8 Nil Rc 4(A), 2(B) port Rc 1/8 F G 20 20 stations M5 x 0.8 N NPT Z NPTE How to Order Type 41 VV5Z3 05 41 1 M5 Applicable solenoid valve Stations 4(A), 2(B) port size 1(P), 3/5(R) port thread type 3/5(R) port 02 2 stations G L M D G L M

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

Z 66 76 94 107 117 130 148 176 188 M 3.5 4 5 5 6 7 8 10 10 MM M3 x 0.5 M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 N PW 19 26 32 38 43 54 64 82 94 Q 60 68 84 95 105 116 134 159 171 QW 10 14 18 17 20 26 34 48 60 T 14.5 17.5 19 20.5 21.5 24 26 30 32 TC 10.5 14 17 20 22.5 28 33 42 48 Model 12-CY3R6 12-CY3R10 12-CY3R15 12-CY3R20 12-CY3R25 12-CY3R32 12-CY3R40 12-CY3R50

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

) 5 9 5 1 15 (With stroke adjuster at extension end) 2.5 (With stroke adjuster at retraction end) 20 47 50 28 38 16 F 4H9 ( ) depth 3.5 +0.030 0 2 x M5 x 0.8 thread depth 8 N 35 1 x F 2 4 x M4 x 0.7 thread depth 6 4H9 ( ) depth 3.5 +0.030 0 27 M 0.5 30 32 Z ZZ (NN 1) x H G 8.5 18.5 8.5 18.5 H B A 4.2 8.5 9 9 20 1 4H9 ( ) depth 3.5 +0.030 0 5 B A NN x M5 x 0.8 thread depth 10 4H9 ( ) depth

VFR

Description Pilot valve assembly AXT627-42-1(M5 x 50) AXT627-10-1 VFR51 AXT627-10-1 VFR52 AXT627-42-1(M5 x 50) AXT627-10-1 VFR53/54/55 NBR Hexagon socket head screw Gasket i AXT627-42-1(M5 x 50) Refer to How to Order Pilot Valve Assembly on page 3-5-78. Steel o !

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

24 35 16 16 54 G 1/4 32.6 54 M12 x 1.25 17 105 4 6.5 14 38 M6 x 1 8 13 4 4 5 8.9 30 163 50 Up to 1900 Up to 1000 32 40 16 20 66 G 1/4 32 69 M16 x 1.5 24 106 5 8 14 46.5 M8 x 1.25 17 4 4 6 5.1 37 179 63 Up to 1900 Up to 1000 32 45 16 20 77 G 3/8 38.6 69 M16 x 1.5 24 121 5 8 16 56.5 M8 x 1.25 17 4 4 9 6.3 37 194 80 Up to 1900 Up to 1000 40 45 17 25 99 G 3/8 38.4 86 M20 x 1.5 30 128 10 16