KS/KX

(mm) Applicable tubing KSH04-M5 KSH04-M6 KSH04-01S KSH06-M5 KSH06-M6 KSH06-01S KSH06-02S KSH08-01S KSH08-02S KSH08-03S KSH10-02S KSH10-03S KSH10-04S KSH12-03S KSH12-04S M5 x 0.8 M6 x 1 36.5 9 12 37 33 8 10.4 16 2.5 4.0 4.0 4 38 37.5 38 39.5 42.5 44 47 48 54 55 57.5 57 60 14 34 33.5 34 35.5 36.5 40 41 41.5 48 48.5 49.5 50.5 52 1 8 M5 x 0.8 M6 x 1 12 2.5 3 4.0 4.0 5.6 5.6 12 8 6 12.8 14 17

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

20 22 13 15 M8 x 1.25 8 12 10.5 13 27.5 36 ZPT16F-B5 ZPT20F-B01 16 18 2 Rc(PT)1/8 6.2 14 12.5 15.5 ZPT25F-B5 32 M5 x 0.8 5 9 ZPT 40/50 F-B 8/01 (Without Buffer/Female Thread) ZPT25F-B8 25 28 M8 x 1.25 8 12 36 ZPT25F-B01 Rc(PT)1/8 6.2 14 ZPT32F-B5 32.5 M5 x 0.8 5 9 ZPT32F-B8 32 35 M8 x 1.25 8 12 13 16 36.5 ZPT32F-B01 Rc(PT)1/8 6.2 14 Width across flats P N NL F D C Y 2.5 A B Dimensions A

3 Port Air Operated Valve Series SYJA300 1

M5 x 0.8 Body side VZA222-P-M5 M5 x 0.8 0.13 0.35 0.52 0.15 0.43 0.60 N.O. M5 x 0.8 Body side VZA214-1P-01 M5 x 0.8 0.22 0.35 0.85 0.25 0.30 1.0 N.C. Rc 1/8 Sub-plate side VZA214-2P-01 M5 x 0.8 0.22 0.35 0.85 0.25 0.30 1.0 N.C. Rc 1/8 Body side VZA224-1P-01 M5 x 0.8 0.22 0.35 0.85 0.21 0.25 0.90 N.O. Rc 1/8 Sub-plate side VZA224-2P-01 M5 x 0.8 0.22 0.35 0.85 0.21 0.25 0.90 N.O.

Check Valve Series AK

Inch size Metric size Port size 4 04 03 5/32 M5 M5 x 0.8 Thread type 6 06 07 1/4 U10/32 10-32 UNF 8 08 09 5/16 Metric thread (M5) 01 1/8 Nil 10 10 11 3/8 Unified thread (10-32 UNF) 02 1/4 12 12 13 1/2 R 03 3/8 N NPT 04 1/2 Check valve free flow direction Applicable Tubing O.D./Port Size Combinations From male thread to One-touch fitting A Metric size Inch size Applicable tubing O.D.

VQ5000

Approx. 216 with AMC610-10 installed (approx. 261.5 with AMC810-14 installed) D side entry (LD) Approx. 100 with AMC610-10 installed Approx. 100 with AMC610-10 installed 100 with AMC610-10 installed 100 with AMC610-10 installed 118 (135) 159 (172.5) 159 (172.5) (approx. 105 with AMC810-14 installed) (105 with AMC810-14 installed) 118 (135) (approx. 105 with AMC810-14 installed) (105 with

MTS

16 96.5 + Stroke 14 0.2 4-M4 x 0.7, effective length 7 19 150.2 Rod end male thread Width across flats 6 8h7 0 0.015 M5 x 0.8 M5 x 0.8 7.8 9.2 10 4 8 11.5 4.5 32 Stud bolt part no.: MT-S16 Rod end nut part no.: NTJ-015A 9.5 With end lock Width across flats 12 3.5 97 + Stroke 113 + Stroke 8-10-16 16 Precision Cylinder Series MTS Dimensions: 20 MTS20 Basic style 49.5 47 11 8.5 2-cushion needle

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Note 4) Based on dynamic performance test, JIS B 8375-1981. (0.5 MPa, Coil temperature: 20C, at rated voltage, without surge voltage suppressor) Note 5) For VFR400-FZ, ( ): VFR410DZ, < >: VFR440-GVFR410 VFR411 VFR414 3 8 1 2 3 8 1 2 3 8 1 2 3 8 1 2 3 8 1 2 3.2 14 0.28 3.4 15 0.30 3.8 14 0.30 3.8 14 0.31 3.4 14 0.26 3.4 15 0.30 4.0 14 0.30 3.7 13 0.32 3.2 13 0.25 3.0 14 0.28 3.5 13 0.29 3.4

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

JSX20 and 30 only GS: Grommet with PCB D F K 300 D 300 K F C C J E J E IN IN B B A 2 x Port size 1(IN), 2(OUT) port A 2 x Port size 1(IN), 2(OUT) port H H G 2 x M5 thread depth N 2 x M5 thread depth N G CS: Conduit D F K 500 NPT1/2 C H J E IN 2 x Port size 1(IN), 2(OUT) port A B G 2 x M5 thread depth N [mm] Size Port size A B C D E F G H N 20 1/8 14 30 69.2 36 9 18 15 17.5 6.4 1/4 19

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

type U10/32 type AS3201FG-02 Meter-in type M5 type U10/32 type AS3211FG-02 No.

Compact Cylinder with Air Cushion Series RQ

K ( across flats) YB-03 32, 40 11.5 depth 7.5 34 9 25 7 12 H (With locking) YB-05 50, 63 14.5 depth 8.5 42 11 32 9 12 YB-08 80 18 depth 12 52 13 38 11 16 d1 d2 YB-10 100 21 depth 14 62 17 50 14 19 L UT Mass (g) Bore size (mm) RS W T1 V T2 Part no. C UA DMaterial: Chrome molybdenum steel (Nickel plated) YB-03 32, 40 9 50 80 18 6.5 10 Part no.

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

Basic style 9 36.5 2 x cushion needle 33.5 6 Width across flats 6 MXH 5 3 MXU Rod cross section MXS 5.5 3.5 2 x M5 x 0.8 (Port size) MXQ 4.3H7 +0.012 0 4 x M4 x 0.7, effective length 7 4 x 3.5 through 2 x 4 x 6.5, counterbore depth 3.5 (Opposite side also) MXF 14 15 12 13 4 MXW 8h7 0 -0.015 MXJ 32 31 24 24 MXP 40.5 M4 x 0.7 21 22 MXY 80.5 + Stroke 16 96.5 + Stroke MTS 14 0.2 4 x M4 x 0.7,

Electric Actuator with Integrated Guide

Mount LTF6 M5 bolt 2 5.5 or M5 2 X n-Mounting hole Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Pitch = 100 Mounting hole quantity n Quantity Stroke 100 2 4 200 3 6 300 4 8 A = (n-1) X pitch 400 5 10 30 500 6 12 600 7 14 LTF8 M6 bolt 3.5 6.6 or M6 2 X n-Mounting

Floating Joint

-16-200 JAL80-20-250 JAL100-24-300 JAL100-27-150 JAL125-27-200 JAL160-33-200 20 25 32 32, 40 40 32, 40 50 50, 63 80 100 100 125 160 1000 2000 2000 4400 4400 4400 9000 9000 14000 22000 22000 28000 55000 11.5 14 14 17.5 17.5 17.5 23 23 28 35 35 38 55 0.5 0.5 0.5 0.75 0.75 0.75 1 1 1.25 2 2 2 3 30 42 42 52 52 52 56 56 70 80 80 88 116 8 9 9 13 13 13 15 15 18 24 24 24 42 19 25 25 30 30 30 38 38

MXS

Model *1) * A B C D E E1 F G H K L M N J P Q MGF MXS 8 MXS12 MXS16 MXS20 MXS25 MXS-BT 8 38 23 12.5 14 40.8 5 8 12 1.4 16.6 7 15.5 14.6 M8 X 1 M3 X 12 M3 X 16 MXS-BT12 45 31 18 14 40.8 6 8 12 1.4 20.5 10 15 18.5 M8 X 1 M4 X 8 M4 X 15 CY1 MXS-BT16 55 37 23.5 16 46.7 7 10 14 1.4 23 12 18.5 21 M10 X 1 M5 X 10 M5 X 18 MXS-BT20 70 47 29 23 67.3 11 12 19 12 27 13 25.5 25 M14 X 1.5 M5 X 12 M6 X 25

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Approx. 216 with AMC610-10 installed (approx. 261.5 with AMC810-14 installed) D side entry (LD) Approx. 100 with AMC610-10 installed Approx. 100 with AMC610-10 installed 100 with AMC610-10 installed 100 with AMC610-10 installed 118 (135) 159 (172.5) 159 (172.5) (approx. 105 with AMC810-14 installed) (105 with AMC810-14 installed) 118 (135) (approx. 105 with AMC810-14 installed) (105 with

Compact Manifold Regulator Series ARM5

Compact Manifold Regulator Series ARM5 Width 14 mm Width 14 mm The One-touch fitting size can be changed. ARJ AR425 to 935 OUT side AMR ARM ARP Elbow IR IRV VEX1 Straight SRH IN side SRP 14 mm Single Unit / Individual Supply Type SRF Fitting type Applicable tubing O.D. Metric Inch Actual size Port location ARX20 4 6 8 5/32 1/4 5/16 2 mounting types are available.

VEX1

Description VEX312-01 02 VEX322-01 02 VEX33202 03 04 VEX34202 03 04 VEX35004 06 10 VEX370-10 12 VEX390-14 20 Air operated Bracket (With bolt and washer) Foot (With bolt and washer) B VEX1-18-1A VEX5-32A VEX7-32A VEX9-32A F VEX1-18-2A VEX3-32-2A Pilot exhaust port P2 silencer Note) N AN120-M5 AN210-02 Note) Only with solenoid.

CL

50 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 23 25 28.5 33 11 11 10 10 14 14 13 14 11 11 11 12 5.5 7 7 9 38 41 41 41 86 96 97 105.5 20 24 24 24 5 6 6 8 19.5 24 24 24 141 151 154 169 33 38 39 44 M5 x 0.8 M6 x 0.75 M8 x 1 M10 x 1.25 Up to 200 Up to 300 Up to 300 Up to 300 0.25 stroke Long Stroke/Refer to pages 9-2-30 to 9-2-32 for mounting dimensions except the table below.

Compact Vacuum Unit

(Fig. 3) Bracket part number for single unit: ZB1-BK1-A Two mounting screws (M2 x 0.55 inch (14 mm), with washer) and two M2 nuts are included. Recommended fittings: KJH04-M5, KJL04-M5, KJW04-M5 Manifold Caution 1.

mlu

I-MU02 I-MU03 I-MU04 I-MU05 E1 16 18 20 28 A1 10.5 12 14 18 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 A1 10.5 12 14 18 L1 27 31 36 46 E1 14 18 20 28 L1 27 31 36 46 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 NDH10 8 10 10 14 Size 25 32 40 50 Size 25 32 40 50 +0.058 0 +0.058 0 +0.058 0 +0.070 0 Applicable pin no.