15

-Z RJ0806LN M8 x 1 M4 x 0.7 M5 0.8 30 50 76 75 30 1 5.5 11 62 12.5 17.5 73 14 9 23 92 23 DCY1SG20-Z RJ1007LN 40 1.5 73 M6 x 1 Rc1/8 NPT1/8 G1/8 70 90 90 38 4.5 9 16.5 21.5 M10 x 1 87 18.5 13.5 32 111 23 CY1SG25-Z RJ1412LN 40 1.5 73 M6 x 1 Rc1/8 NPT1/8 G1/8 70 99 90 42 4.5 9 16.5 21.5 M14 x 1.5 96 18.5 13.5 32 111 44 -X CY1SG32-Z RJ2015HN M8 x 1.25 Rc1/8 NPT1/8 G1/8 40 75 119 110 50 3 5.5

Vacuum System Peripherals:

x 0.8 , ZY 1 8 1 4 SYJ300/500/700 Vol. 4 0.41 to 2.8 ZQ 3 port solenoid valve Series VZ Compact size: 15 mm (VZ100/200/300) 18 mm (VZ400/500) VZ100 ZF M5 x 0.8 Vol. 4 0.11 to 3.0 VZ300/500 ZP M5 x 0.8 , VQZ200/300 Vol. 4 1.7 to 4.5 ZCU 1 8 1 4 3 port solenoid valve Series VX31/32/33 (2) (1) (2) (1) AMJ to 1 8 3 8 0.29 to 1.6 Vol. 17 Misc. 3 port solenoid valve Series VK M5 x 0.8 Vol

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

01 02 Symbol Mixed M5 threads 1/8 thread 1/4 thread 1/8" 5/32" 1/4" 5/16" 3/8" Applicable tubing O.D.

MHY2/MHW2

1.5 +0.052 0 Postioning pin hole 51 MHZJ2 16 69 26 MHQ 86 MHL2 Auto switch mounting groove position M5 X 0.8 (Finger operating port) MHR MHK O 20 MHS S 12 3 4 M5 X 0.8 (Finger closing port) 32 8 3 MHC2 MHT2 MHY2-20D2 MHY2 Opening/closing direction through hole type 4-4.5 (Hole for mounting attachment) MHW2 10 0.005 0.025 MRHQ 5 9 Auto switch 18 (Limted area for mounting attachment) Do not

Wedge Cam Operation Gripper Series MHK2

4 deep +0.030 0 2-M5 X 0.8 thread 8 deep 24 21H9 1.5 deep +0.052 0 2-M5 X 0.8 thread 10 deep 4-M5 X 0.8 thread 10 deep Bottom hole dia. 4.3 through-hole 0 -0.1 5 13.5 16 0.02 8 Open 34 +1.2 0 70 68 32 46 30 0 -0.2 Closed 16 4H9 4 deep +0.030 0 18 32 27.6 0.05 44.5 20 73.5 Groove position for auto switch mounting 100 Groove position for auto switch mounting (2 positions) 4-M4 X 0.7 (Attachment

Compact Cylinder

5 10 15 20 25 30 35 40 45 50 12 5 6 7 8 9 10 25 16 5 6 7 9 10 11 20 9 11 13 15 17 19 21 23 25 27 20 16 1.0 25 15 18 21 24 27 30 33 37 40 43 32 27 32 36 41 45 50 54 59 63 67 12 0.4 40 42 48 54 60 66 73 79 85 91 97 0 10 20 30 40 50 50 91 101 111 121 131 141 151 161 171 Cylinder stroke [mm] 63 130 140 150 159 169 179 189 199 209 80 240 255 270 285 300 315 329 344 359 With Magnet for Auto

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

M4 mounting hole A B 1 0 A B 1 0 A B 1 0 A B 1 0 9 61.5 A A A A R4.5 26 62.5 97 = 4.5 (5.5) (35) (L3) (5.2) 52 (L4) Stations D side U side 1 2 3 4 5 6 7 8 n 2-C6 P(SUP) port P A P A A A A A A A 24.5 (11) 13.5 R B R B B B B B B B (7.5) 7 2-C6 R(EXH) port 19.2 P = 11 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads Broken

Integrated Controller

For details, refer to pages 29 to 32.

Series IDG

Drain discharge With differential pressure type auto drain IN OUT 9 24 140 97.5 120.5 8.5 118 Purge air for dehumidification 5 M5 x 0.8 Drain Drain 5.5 (Maintenance space 100mm or more) With fittings for purge air discharge (Option: P) Purge air discharge tubing port for dew point indicator Applicable tube O.D.: 8 (196) Dew point indicator (Option: PS) (73) 45 11 IN OUT (177) 120.5 (64)

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators 2 x 2 x 6.5 counterbore 2 x 2 x M4 x 0.7 effective depth 7 5.5 2 x M5 x 0.8 M5 x 0.8 (Relief port) (Piping port) 2 x 3.5 through M5 x 0.8 32 0.5 15.5 6 25 Rod end nut 9 Flat washer 9.2 10.5 10 4 4 5 32 + Stroke 14 15.5 8 4 46 + Stroke 25 16 Lead wire minimum bending radius 10 Auto switch 17.5 5 2 x 2 x 6.5 counterbore 2 x 2 x M4 x 0.7 effective

Lubrication Equipment

Lubrication Equipment Applicable oil viscosity (cSt (3)(40C)) Application Port Size Bowl capacity (cm3) Option Page Series (1) M5 to 1 Lubricator AL1000-6000 Individual lubrication Bracket 1,000cm3 Tank Float switch 130 1,000 32 1.17-2 32 1 1/4 to 2 Large flow lubricator AL800, 900 Individual lubrication 500 1,000 1.17-8 1,000cm3 Tank Float switch (2) 5,000 9,000 1.17-11 32 Auto Feed Lube

MGQ

For details, refer to page 8-30-32. 8-20-11

VM

-01-07 VM130-01-07S VM122-M5-07 VM122-M5-07S VM132-M5-07 VM132-M5-07S Toggle lever VM120-01-08 VM130-01-08 VM122-M5-08 VM132-M5-08 VM-30AR Red Push button (Mushroom) VM130-01-30R VM130-01-30B VM130-01-30G VM130-01-30Y VM120-01-30R VM122-M5-30R VM122-M5-30B VM122-M5-30G VM122-M5-30Y VM132-M5-30R VM132-M5-30B VM132-M5-30G VM132-M5-30Y VM-30AB Black VM120-01-30B VM-30AG Green VM120-01-30G VM

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

M5 x 0.8 Prepared hole diameter 4.2 20 W 0.50.05 D B Vacuum port M5 x 0.8 Piping port 2 x M5 x 0.8 33 32 10 J depth 1.5 3 5.5 5 12 9.5 +0.030 0 4 Section AA B D Mounting base side +0.030 0 depth 1.5 3 Q QL 11-/22-MXP12-25 Without magnet and switch rail 2 x M2 x 0.4 depth 3 8 5.7 3.5 L 20 20 6 x M4 x 0.7 depth 4.5 2 x M3 x 0.5 depth 3.5 (mm) G H J K L M Q QL S V W Z Model 11-/22-MXP12-15

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

across flats 7 4-M4 x 0.7 depth 4.5 17.8 M4 x 0.7 8.5 2-M5 x 0.8 8 4 (Plug: M-5P) 4.2 25 24 8.5 3 0 +0.030 depth 3 A 3 0 +0.030depth 3 1.5 19 220.05 4-M5 x 0.8 Prepared hole diameter 4.2 20 W 0.50.05 D B Vacuum suction port M5 x 0.8 Piping port 2-M5 x 0.8 33 32 10 J depth 1.5 3 5.5 5 12 9.5 +0.030 0 4 Section AA Mounting base side B D +0.030 0 depth 1.5 3 Q QL 11-/22-MXP12-25 Without magnet

Vacuum Pad

x 0.8 M5 x 0.8 M5 x 0.8 5 5 5 M5 x 0.8 M5 x 0.8 M5 x 0.8 22 22 22 4 4 4 11 11 11 6 6 6 0.5 1.8 1.2 1.8 0.8 0.8 1.8 8 6 4 6.5 8.5 4.5 8 8 8 8 8 8 Vacuum Inlet Dimensions ZP3-Y04UM;-B5-U4 ZP3-Y06UM;-B5-U4 ZP3-Y08UM;-B5-U4 ZP3-Y04UM;-B5-U2 ZP3-Y06UM;-B5-U2 ZP3-Y08UM;-B5-U2 Width across flat 7 Barb fitting One-touch fitting 0.9 1.8 Width across flat 7 (10.5) (12.5) M-5AU-2 [Weight: 1.5 g] 2

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

CC 32 38 D 7.6 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 E 4 1.5 2 2 2 2 3 8 8 F 8 9 10 13 13 16 16 2 2 G 5 5 5.5 7.5 7.5 8 11 14 14 H 13.5 12.5 13 20 20.5 22 29 33 33 I 28 34 40 50 58 72 J 4.5 4.5 6 6 8 8 10 12 12 N 9.5 11 11 18 18.5 20 26 25 25 Q NN S 62 63 83 106 111 124 150 176 188 K 5 4 11 8 10 15 16 25 26 V A 4 4 4 8 8 8 10 T C 8 14 14 26 32 32 41 L 35 38 57 66 70 80 92 110 122 MM

3 Port Solenoid Valve Series VQ100 1

Dimensions Grommet VQ10-G-M5 (M3) 29.2 6.1 Manual override 4.9 12.4 14.8 E 2-2.7 mounting hole 12 3.7 18.1 (Lead wire length) 300 Locking type manual override 30.7 28 11 A P (5.9) (5.9) 7 ( 4 . 1 ) 5 5 5 4.9 9.7 4.9 3-M5, (M3) (18.1) ( ): M3 Broken line: Locking type manual override 4-12-10 11 3 Port Solenoid Valve Series VQ100 Dimensions L plug connector VQ10-L-M5 (M3) 35.1 Manual override

MY2

C D A B (mm) D-A9, D-A9V (mm) D-F9, D-F9V (mm) D-F9W, D-F9WV A B A B A B Bore size 16 25 32 Operating range Bore size 16 25 40 Operating range Bore size 16 25 40 Operating range 54 106 58 102 57 103 54 156 58 152 57 153 11 8.5 8.5 85 245 89 241 88 242 (mm) (mm) (mm) C D C D C D Bore size 16 25 32 Operating range Bore size 16 25 32 Operating range Bore size 16 25 32 Operating range 27 133

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Bore size (mm) 32 40 50 63 80 100 125 l1 d2 CK S5 K1 G1 G2 EM CA H6 R1 0.2 0.6 0.2 0.6 0.2 0.6 0.2 0.6 0.2 0.6 0.2 0.6 0.5 1.5 51 11 10 6.6 38 10 21 7 18 26 31 32 8 10 11 12 6.6 41 54 10 24 9 22 28 35 36 10 11 15 12 9 50 65 12 33 11 30 32 45 45 12 12 67 15 16 9 52 14 37 11 35 40 50 50 12 15 86 18 16 11 66 18 47 12.5 40 50 60 63 14 15 18 20 11 76 96 20 55 13.5 50 60 70 71 15 19 20 25 14 94