Compact manifold regulator ARM5 Series

Panel cut dimension 2 x 3.2 16.5 14.5 11 8.2 20 2 x 3.2 2 x 3.2 M3 thread hole 8.2 8.2 P U P S U H S H L O L C O K C K R V R S W V X S W T 19 T X 19 L2=50+T+X L2=50+T+X L1=50+R+V 14 L1=50+R+V 14 Pressure gauge (Accessory) 50 Pressure gauge (Accessory) 50 55 (at knob locked) 55 (at knob locked) IN OUT IN OUT 41.5 43.5 U Y 4 25 6 25 U Y 14 14 SMC SMC 2 x 3.2 2 x 3.2 42 42 IN side OUT side IN

High Vacuum Angle Valve, XL Series

Through the movement of piston S (11), the valve S (18) is removed from the valve S seal assembly [1]-(14), and initial exhaust takes place through the passage S(17).

XL

Through the movement of piston S (11), the valve S (18) is removed from the valve S seal assembly [1]-(14), and initial exhaust takes place through the passage S(17).

ML1

30 6.8 6.6 12 16 M6 X 1 M8 X 1.25 116.5 14 372 354 186 190 124 158 118 73 106 144 140 64 30.5 43 286 40.5 35 8.6 8.5 14 15 M8 X 1.25 M10 X 1.5 Model FF II NN AA BB CC DD EE GG JJ KK LL MM WW XX ML1C25 ML1C32 ML1C40 1/8 5 5 5 5 7 28 26 14 44 20 16 12.5 120 42 1/8 6 5 6 5 8 36 28 18 54 36 18 12.5 140 48 1/4 30.5 6 5 6 5 8 47 17 62 30 22 16.5 170 51 4.7-8 Hy-Rodless Cylinder SeriesML1 Stroke

Compact Hydraulic Cylinder Series CH
KGB

Rod end male threads (mm) Bore size (mm) a b c e f g h 20 11 15 M10 x 1.25 6 10 23 66 25 14 18 M12 x 1.25 6 12 26 71 32 21 25 M16 x 1.5 7 14 35 91 40 26 30 M20 x 1.5 7 19 40 105 50 31 35 M24 x 1.5 8 24 46 116 63 41 45 M30 x 1.5 9 30 58 135 80 56 60 M39 x 1.5 14 41 77 165 100 71 75 M48 x 1.5 21 50 101 207 19 Series CHKGB Auto Switch Specifications Auto Switches: Proper Mounting Positions

Rotary Actuator

5 259 (325) 1.5 5 39.5 33 245 (311) 172 28 25 12.5 8 14 10 8 0 0.036 45 Note 1) In addition to Rc, G, NPT and NPTF are also available.

CRQ2

M3 M3, M4 M3, M4 M3, M4, M5 M4, M5, M6 M3 M3, M4 M3, M4 M3, M4, M5 M4, M5, M6 MSQ MRQ Symbol: A4 Symbol: A5 Symbol: A3 The long shaft can be further shortened by machining it into a stepped round shaft. (If shortening the shaft is not required, indicate for dimension X.) (If not specifying dimension C1, indicate instead.)

Low Differential Pressure Sensor

Mounting with panel mount adapter Secure the panel mount adapter with two M3 x 8L mounting screws. Panel Front protective cover (Part no. ZS-27-01) M3 x 8L Panel mount adapter (Part no. ZS-27-C) Rotate 90 to mount. 14 Series PSE Specific Product Precautions 3 Be sure to read before handling.

2–4

mounting nut Hexagon socket head cap bolt (M3 x 0.5 x 14 spring wasdher 2 pcs.)

Series VQ Metal Seal/Rubber Seal Body Ported

L 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. L 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. L 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

B Counterbore depth C T Y 0 -0.1 L Cylinder tube outer circumference: TC WP Hard chrome plated + special treatment X F GW 4 x LD GP D QW PW 2 x P (Piping port) 4 x 3.2 2 x 4 x MM Thread depth M W K Z + Stroke Q + Stroke WP G G 4 x 6.5 12-CY3R6 (mm) A 7 9 10.5 9 8.5 10.5 10 14 15 F 5.5 6.5 8 9 8.5 10.5 13 17 18 HC 18 25 31 38 43 54 66 84 96 HP 10.5 14 17 24 23.5 29 36 45 51 K 7 9 14 11 15

IDX-OM-W023

V 14-1 . 14-1 14-2 . 14-1 14-3 . 14-2 14-4 . 14-2 15 15-1 . 15-1 3 IDX-OM-W023 i i i-1 () 3 i 1 1 3 IDU Series i-1 i-1 IDX-OM-W023 i i-2 5 i 2 1 IDU Series i-2 i-2 IDX-OM-W023 i i 2 2 i 2 3 50 i 2 4 i 2 5 0 IDU Series i-2 i-3 IDX-OM-W023 i i 2 6 WARNING !

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Refer to p.3.4-14. Auto Switch Mounting Bracket Part No.

Transfer

Yaw moment M3 = W4 x L2 YES L2 Is there any influence of noise? (Refer to Caution on Handling on pages 706 and 707.) Install a noise filter. NO M3 There is no particular problem in using the system.

Brake mechanism added

15 14 9 9 10 10 11 D-B59W 14 14 17 16 18 D-A9 and D-A9V cannot be mounted on 50.

VQ4000

12 5 3 1 A B 30 45 14 3 5 1 12 25.6 Mounting hole Manual override 25.6 Mounting hole 30 45 Manual override 14.5 27 30.5 32 41.5 91.5 129 79 PE X PE X 32 41.5 30.5 27 R1 R2 P R2 R1 14.5 P 19.5 19.5 (21) (21) Rc1/8 External pilot port Rc1/8 PE port 19.5 (21) 19.5 (21) 5-Rc (PT)1/4, 3/8 P, A, B, R1, R2 port 5-Rc (PT)1/4, 3/8 P, A, B, R1, R2 port Rc1/8 PE port 31 31 31 31 : 3 position ( ): Rc3

Process Pump

PAF3000/5000 Series Description PAF3000 series PAF5000 series PAF3413 PAF3410 PAF5410 PAF5413 Diaphragm kit KT-PAF3-31 KT-PAF5-31 Check valve kit KT-PAF3-36 KT-PAF5-36 The maintenance procedure is to be distributed individually. Please contact your SMC sales representative for details. Note) One of Nil, F or N is entered as thread symbol.

Intrinsically Safe Valve

Model Thread size Tightening torque 0.6 lbfft [0.8 Nm] 1.0 lbfft [1.4 Nm] 0.6 lbfft [0.8 Nm] 53-SY5000 53-SY7000 53-SY9000 M3 M4 M3 39 Series 53-SY5000/7000/9000 Specific Product Precautions 3 Be sure to read before handling. Refer to back cover for Safety Precautions and Handling Precautions for SMC Products (M-E03-3) for 3/4/5 Port Solenoid Valves Precautions.

IDX-OM-W014

V 14-1 . 14-1 14-2 . 14-1 14-3 . 14-2 14-4 . 14-2 15 15-1 . 15-1 3 IDX-OM-W014 i i i-1 () 3 i 1 1 3 IDU Series i-1 i-1 IDX-OM-W014 i i-2 5 i 2 1 IDU Series i-2 i-2 IDX-OM-W014 i i 2 2 i 2 3 50 i 2 4 i 2 5 0 IDU Series i-2 i-3 IDX-OM-W014 i i 2 6 WARNING !

CXWM/CXWL

For dimensions of the 25 stroke, refer to page 8-26-14.