SI Unit: QW (DeviceNet), Input Block Stations: None, Input Block COM: +COM, Stations: 4 Stations, SUP/EXH Block Mounting: U (U Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: N1 (1/8" One-touch Fitting), Mounting Method: D (DIN Rail Mounting), US Option: X160US (Preferred US Option for DeviceNet Type)

SI Unit: QW (DeviceNet), Input Block Stations: None, Input Block COM: +COM, Stations: 4 Stations, SUP/EXH Block Mounting: U (U Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: D (DIN Rail Mounting), US Option: X160US (Preferred US Option for DeviceNet Type)

SI Unit: QW (DeviceNet), Input Block Stations: 13 (1 Station/M8: 4 Inputs 3 Pins), Input Block COM: +COM, Stations: 4 Stations, SUP/EXH Block Mounting: U (U Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: C6 (ø6 One-touch Fitting), Mounting Method: D (DIN Rail Mounting), US Option: X160US (Preferred US Option for DeviceNet Type)

SI Unit: QW (DeviceNet), Input Block Stations: 23 (2 Stations/M8: 4 Inputs; 3 Pins), Input Block COM: +COM, Stations: 4 Stations, SUP/EXH Block Mounting: U (U Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: D (DIN Rail Mounting), US Option: X160US (Preferred US Option for DeviceNet Type)

SI Unit: QW (DeviceNet), Input Block Stations: 23 (2 Stations/M8: 4 Inputs; 3 Pins), Input Block COM: +COM, Stations: 4 Stations, SUP/EXH Block Mounting: U (U Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: D0 (DIN Rail Mount w/o DIN Rail), US Option: X160US (Preferred US Option for DeviceNet Type)

SI Unit: QW (DeviceNet), Input Block Stations: 32 (3 Stations/M12: 4 Inputs), Input Block COM: +COM, Stations: 4 Stations, SUP/EXH Block Mounting: U (U Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: D0 (DIN Rail Mount w/o DIN Rail), US Option: X160US (Preferred US Option for DeviceNet Type)

SI Unit: QW (DeviceNet), Input Block Stations: 32 (3 Stations/M12: 4 Inputs), Input Block COM: N (-COM), Stations: 4 Stations, SUP/EXH Block Mounting: U (U Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: D0 (DIN Rail Mount w/o DIN Rail), US Option: X160US (Preferred US Option for DeviceNet Type)

SI Unit: QW (DeviceNet), Input Block Stations: 42 (4 Stations/M12: 4 Inputs), Input Block COM: N (-COM), Stations: 4 Stations, SUP/EXH Block Mounting: U (U Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: D0 (DIN Rail Mount w/o DIN Rail), US Option: X160US (Preferred US Option for DeviceNet Type)

SI Unit: QW (DeviceNet), Input Block Stations: 43 (4 Stations/M8: 4 Inputs 3 Pins), Input Block COM: N (-COM), Stations: 4 Stations, SUP/EXH Block Mounting: U (U Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: D (DIN Rail Mounting), US Option: X160US (Preferred US Option for DeviceNet Type)

SI Unit: QW (DeviceNet), Input Block Stations: None, Input Block COM: +COM, Stations: 4 Stations, SUP/EXH Block Mounting: U (U Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: C6 (ø6 One-touch Fitting), Mounting Method: D (DIN Rail Mounting), US Option: X160US (Preferred US Option for DeviceNet Type)

SI Unit: QW (DeviceNet), Input Block Stations: 43 (4 Stations/M8: 4 Inputs 3 Pins), Input Block COM: N (-COM), Stations: 4 Stations, SUP/EXH Block Mounting: U (U Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: N3 (5/32" One-touch Fitting), Mounting Method: D0 (DIN Rail Mount w/o DIN Rail), US Option: X160US (Preferred US Option for DeviceNet Type)

SI Unit: QW (DeviceNet), Input Block Stations: 22 (2 Stations/M12: 4 Inputs), Input Block COM: N (-COM), Stations: 4 Stations, SUP/EXH Block Mounting: U (U Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: D (DIN Rail Mounting), US Option: X160US (Preferred US Option for DeviceNet Type)

SI Unit: QW (DeviceNet), Input Block Stations: 11 (1 Station/M12: 2 Inputs), Input Block COM: +COM, Stations: 4 Stations, SUP/EXH Block Mounting: U (U Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: D (DIN Rail Mounting), US Option: X160US (Preferred US Option for DeviceNet Type)

Series: 10-SV1000, Base Type: 10FD, Connector Entry Direction: Upward, Valve Stations: 4 Stations, P, E Port Location: U Side, 2-10 Stations, Pilot Type: Internal Pilot, A, B Port Size: One-touch Fitting for Ø1/4, Mounting: DIN Rail Mounting w/o DIN Rail

Series: 1 (10-SV1000), Base Type: 10FD, Connector Entry Direction: 1 (Upward), Valve Stations: 04 (4 Stations), P, E Port Location: U (U Side, 2-10 Stations), Pilot Type: Internal Pilot, A, B Port Size: N7 (One-touch Fitting for Ø1/4), Mounting: D0 (DIN Rail Mounting w/o DIN Rail)

5 Port Solenoid Valve, Series VQC

, C6, C8 C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting 45 P = 16 2-C12 1(P) port (mm) Formulas: L1 = 16n + 57, L2 = 16n + 176 (for 1 input block.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Description Material Aluminum die-casted Note Body q Spool/Sleeve Stainless steel Metal seal w Spool valve Aluminum/HNBR Rubber seal Piston Resin e r Pilot valve assembly For How to Order Pilot Valve Assembly, refer to page 4-14-19. 4-14-7 Body Ported 8 Series VQZ100/200/300 Dimensions: VQZ100 Single unit Grommet (G): VQZ115-G-C3/C4/C6/M5-PR C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4

Rubber seal 5 Port Solenoid Valve Series SYJ5000

(One-touch fitting for 4) C4 (One-touch fitting for 4) A, B port C6 (One-touch fitting for 6) M5 x 0.8 Flow Characteristics Flow characteristics Port size 14/2 (PA/B) 4/25/3 (A/BR) Manifold C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) Port 2(B), 4(A) Port M5 x 0.8 C4 C6 M5 x 0.8 M5 x 0.8 1/8 C6 C4 1/8 1/8 1/8 1/8 1/8 1/4 1/4 1/8 0.46 0.62 0.79 0.55 0.59 0.74 0.71 0.55 0.39 0.33 0.36

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

(M): VQZ115-lMl-C3, C4, C6, M5-PR (Lead wire) Cover dia 1.5 Cross section 0.23mm2 300 60.5 65.5 300 55.5 59 (Lead wire) Indicator light Indicator light 40.5 41.5 Cover dia 1.5 Cross section 0.23mm2 : AC : AC 2.10-8 VQZ100/200/300 Body Ported VQZ200 Valve single unit 2-C4, C6, M5 Grommet (G): VQZ2l2(R)-lGl-C4, C6, M5 C4: One-touch fittings for 4 C6: One-touch fittings for 6 2-3.5 Mounting

Vacuum System Peripherals:

(When port sizes for A, B ports are mixed, indicate C4 or C6 in cell .)