CNG

59.4 M10 x 1.25 1/8 154 12 48 3 12 26.5 2.5 10 4.5 30 M6 x 1 58.4 6 14 44 81 49 22 18 6.6 40 30 71.4 M14 x 1.5 1/8 169 (178) 14 56 4 12 28 (mm) Without rod boot With rod boot Bore size (mm) Z l H Z 0.25 ZZ e f h ZZ 20 25 32 40 231 35 190 211 30 16 55 210 Stroke x 250 40 207 228 30 17 62 229 260 40 214 238 35 17 62 236 289 (298) 50 241 (250) 269 (278) 35 17 70 261 (270) Note) Dimensions inside

Cylinder with Lock Series CNG

59.4 M10 x 1.25 1/8 154 12 48 3 12 26.5 2.5 10 4.5 30 M6 x 1 58.4 6 14 44 81 49 22 18 6.6 40 30 71.4 M14 x 1.5 1/8 169 (178) 14 56 4 12 28 (mm) Without rod boot With rod boot Bore size (mm) Z l H Z 0.25 ZZ e f h ZZ 20 25 32 40 231 210 35 190 211 30 16 55 Stroke x 250 229 40 207 228 30 17 62 260 236 40 214 238 35 17 62 289 (298) 261 (270) 50 241 (250) 269 (278) 35 17 70 Note) Dimensions inside

LEC-OM07605CN

446.6 18 47.0 14 38 501.2 19 52.9 15 39 571.5 20 59.6 16 40 642.7 6 12 6 6.4 [Pr.

TABLE OF CONTENTS

300) 200 (200) 150 (200) 100 (125) 100 35 (40) N.O.

CRQ2

DRotation starting point End of rotation 20e R g 10 ot 10 n at ra L io B Rotation starting point End of rotation n n io 70 70 ra at n ot g R e 10 10 L L B B A 10 10 Rotation starting point End of rotation 160 R A e R A o g t n a a ti r o n Lmax 15 18 24 27 31.5 Lmax 15 18 24 27 31.5 Lmax Size 10 15 20 30 40 Size 10 15 20 30 40 Size 10 15 20 30 40 15 18 24 27 31.5 The figure shows the view

Electric Actuator with Integrated Guide

200 a=1000 a=2000 a=3000 L3 100 m Mey a 0 10 50 40 30 20 Transfer load m (kg) m : Transfer load (kg) a : Work piece acceleration (mm/s2) Me: Allowable dynamic moment L : Overhang to work piece center of gravity (mm) Refer to page 71 for deflection data. 14 18 Standard Motor/Horizontal Mount Specification Series LTF8 Dimensions/LTF8FNH Scale: 18% 104.5 80 (2 x n1)-6.6, Drill through 13, counter

CHKD/CHKG

(mm) Rod end male threads Water resistant type (mm) a b c e f g h Bore size (mm) B C N S g h A Bore size (mm) 20 20 12.5 15 M10 x 1.25 6 10 23 66 61 43 18 26.5 6 33 76 25 25 15.5 18 M12 x 1.25 6 12 26 71 63 45 18 30 6 36 81 32 32 22 25 M16 x 1.5 7 14 35 86 71 51 20 38 7 45 96 40 40 27 30 M20 x 1.5 7 19 40 95 75 55 20 45 7 50 105 50 50 32 35 M24 x 1.5 8 24 46 106 81 60 21 55 7 56 116 63 63

MNB

1/8 12 35 10 30 22 8 52 104 38 10 14 28 16 13 14 16.5 to 500 27 63 14 91 52.5 50 1/4 15 40 12.5 35 27 11 65 120.5 46.5 14 20 40 20 14 15.5 19 to 600 32 75 18 104.5 58.5 63 1/4 12 45 17.5 35 27 11 75 134.5 56.5 14 20 40 20 14 16.5 23 to 600 32 90 18 119.5 68 80 1/4 18 45 22 40 32 13 95 169 72 22 30 60 25 20 19 33 to 750 37 102 22 150 81 100 1/4 20 55 25 40 41 16 114 189 89 22 30 60 30 20

RQ

IY-G04 18 M14 x 1.5 M14 x 1.5 22 22 42 14 30 12 14 16 30 12 14 36 41.6 10 18 42 0.3 0.5 +0.5 +0.3 +0.070 0 50, 63 I-G05 Y-G05 50, 63 14 IY-G05 22 M18 x 1.5 M18 x 1.5 28 28 56 18 40 16 20 20 40 16 20 44 50.6 14 22 56 0.3 0.5 +0.5 +0.3 +0.070 0 80 I-G08 Y-G08 80 18 IY-G08 28 M22 x 1.5 M22 x 1.5 38 38 71 21 50 21 27 23 50 21 27 56 64 18 28 71 +0.5 +0.3 0.3 0.5 +0.084 0 +0.084 0 100 I-G10 Y-G10

C95

10 30 10 45 32.5 5.5 10.5 6.6 11 17 40 16 40 4.3 4 5 25 10 35 12 55 38 5.5 11 6.6 13 20 50 21 45 4.3 4 5 27 10 40 16 65 46.5 6.5 15 9 18 22 63 21 51 4.3 4 5 32 12 45 16 75 56.5 6.5 15 9 18 25 80 25 65 4.3 4 5 36 16 45 20 95 72 10 18 11 22 30 100 115 25 75 6.3 89 4 5 10 41 16 55 18 11 20 22 32 Mounting style (ES) Bore size (mm) d3 CN S5 K1 K2 I2 G1 G2 G3 EN EU CH H6 ER 32 11 10 38 51 21 18

Compact Cylinder with Air Cushion

x 1.5 M14 x 1.5 22 22 42 14 30 12 14 16 30 12 14 36 41.6 Y-G04 10 18 32, 40 42 0.3 0.5 +0.5 +0.3 +0.070 0 14 IY-G05 22 50, 63 I-G05 M18 x 1.5 M18 x 1.5 28 28 56 18 40 16 20 20 40 16 20 44 50.6 Y-G05 14 22 50, 63 56 0.3 0.5 +0.5 +0.3 18 IY-G08 28 80 I-G08 M22 x 1.5 M22 x 1.5 38 38 71 21 50 21 27 23 50 21 27 56 64 +0.070 0 Y-G08 18 28 80 71 +0.5 +0.3 0.3 0.5 +0.084 0 +0.084 0 22 IY-G10 32

V

U40 40 43 7 18 13.7 18.5 6.5 ZP16B B16 16 18 4 13 15.7 20 9.9 21 8.5 ZP50U U50 50 53 7 18 14.7 19.5 7.5 ZP20B B20 20 22 4 15 19 23.5 121.4 25 10.5 ZP25B B25 25 27 4 15 19.5 24 15.6 28 10.5 ZP32B B32 32 34 4 15 24.5 29 18.9 37 14 ZP40B B40 40 43 7 18 29.2 34 24.4 48 16 D I M E N S I O N S ZP VA C U U M PA D S ZP50B B50 50 53 7 18 33.2 38 32.4 57 19 H O W T O O R D E R ZP V A C U U M P A D

MY1

MX 6.0 3.0 2.0 18 7 2.1 16 200 10 5.0 3.0 25 10 3 20 40 50 40 50 MTS 15 8.5 5.0 35 14 4.2 25 MY1C 30 14 10 49 21 6 32 100 30 MY 30 60 23 20 68 30 8.2 40 115 35 35 93 42 11.5 50 20 20 CY 150 50 50 130 60 16 63 50 The above values are the maximum allowable values for moment and load.

SYJ3000/5000/7000

Station 2 58 40 Station 20 346 328 Station n L1 L2 3 74 56 4 90 72 5 106 88 6 122 104 7 138 120 8 154 136 9 170 152 10 186 168 11 202 184 12 218 200 13 234 216 14 250 232 15 266 248 16 282 264 17 298 280 18 314 296 19 330 312 1-5-42 43 5 Port Solenoid Valve Rubber Seal Series SYJ5000 [ ]: AC Type 40: Bottom Ported/SS5YJ5-40Stations -M5 Grommet (G) Approx. 300 (Lead wire length) 9 L2 L1 4-

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

46 44 44 N 4 4 4 4 6 6 8 10 G 18 18 19 19 21 36 17 H 39 39 48 58 52 44 44 NN 2 2 2 2 3 3 4 5 GA 18 18 19 19 48 73 80 105 HA 39 39 48 58 45 52 88 88 I 12 12 12 12 20 15 18 23 J 40 40 50 60 68 105 145 165 K 28 38 48 58 68 93 118 143 KA 91 123 166 191 NA 4 4 4 4 8 8 8 8 M 78 78 88 98 114 146 189 214 Z 77 77 87 97 113 145 188 213 ZZ 109 109 119 129 145 177 220 245 13-/22-MXQ1610 13-/22-MXQ1620

MXS

HA 40 40 40 25 36 72 76 MXS12L-10 MXS12L-20 MXS12L-30 MXS12L-40 MXS12L-50 MXS12L-75 MXS12L-100 125.5 179.5 3.11-31 Series MXS Dimensions MXS 16L/Symmetric style ZZ Z 0.5 36.5 Basic style 40 10 M 3.5(With stroke adjuster at extension end) 5H9 4 deep +0.030 0 5H9 4 deep +0.030 0 N -1 X F 2 21 2-M6 X 1 thread 10 deep 18 (With stroke adjuster at extension end) 20 F 4-M5 X 0.8 thread 7 deep 35

7ND9071en

Table 17 Ambient temperatures, ND9_Z Inmetro Variant type Ex ia IIC T4/T5/T6 Ga Ex ia IIC T4/T5/T6 Gb Ambient temperature ranges T6 T5 T4 ND91_Z -40 to +50 C -40 to +65 C -40 to +80 C ND91_Z/I02 -40 to +50 C -40 to +64 C -40 to +80 C ND91_Z/I09 -25 to +50 C -25 to +65 C -25 to +80 C ND91_Z/I45 -25 to +50 C -25 to +64 C -25 to +80 C Table 18 Ambient temperatures, ND9_Z Inmetro Variant type

KR

3 8 KGE16-03 14 40 127 25 96 113 (96) 16 M28 x 1.5 32 29 30 1 2 KGE16-04 18 44 132 Note) Dimensions in ( ) are the case of soft nylon tube.

LX

40 2.6 2.6 1.3 1.3 0.3 0.3 0.1 0.1 80 80 1.3 1.3 0.7 0.7 0.2 0.2 0.1 0.1 For transfer load of 3kg For transfer load of 1kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 100 50 50 10 10 1 1 10 10 10 10.1 5.1 5.1 1.1 1.1 0.2 0.2 Speed (mm/s) Speed (mm/s) 2.6 40 40 2.6 1.3 1.3 0.3 0.3 0.1 0.1 1.3 80 80 1.3 0.7 0.7 0.2 0.2 0.1 0.1 Refer

CLQ

A A1 E1 L1 MM RR1 U1 ND NX NZ L 34 41 42 56 71 79 8.5 16 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 34 41 42 56 71 79 8.5 10.5 14 18 21 21 16 20 22 28 38 44 25 30 30 40 50 55 M8 x 1.25 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 10 14 18 22 8 10 18 22 28 32 8 10 10 14 18 22 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10