Body Style: Body Ported Stacking Manifold Type, Coil Voltage: 12 VDC, Flow Rate: Power Consumption: 0.5W, Operating Press: 0.5MPa, Cv: 0.011, Electrical Entry: Plug Lead w/Light/Surge Suppressor without connector, Port Size: Body Ported, Barb Fitting ø3.18/ø2, Made to Order: -, Lead Wire Length: -

Body Style: Body Ported Stacking Manifold Type, Coil Voltage: 12 VDC, Flow Rate: Power Consumption: 0.35W, Operating Press: 0.1MPa, Cv: 0.016, Electrical Entry: Grommet, Port Size: Body Ported, Barb Fitting ø3.18/ø2, Made to Order: -, Lead Wire Length: -

Body Style: Body Ported Stacking Manifold Type, Coil Voltage: 24VDC, Flow Rate: Power Consumption: 0.1W, Operating Press: 0.3MPa, Cv: 0.006, Electrical Entry: Plug Lead w/Light/Surge Suppressor, Port Size: Body Ported, Barb Fitting ø3.18/ø2, Made to Order: -, Lead Wire Length: -

Body Style: Body Ported Stacking Manifold Type, Coil Voltage: 24VDC, Flow Rate: Power Consumption: 0.1W, Operating Press: 0.1MPa, Cv: 0.011, Electrical Entry: Plug Lead w/Light/Surge Suppressor, Port Size: Body Ported, Barb Fitting ø3.18/ø2, Made to Order: -, Lead Wire Length: -

Body Style: Body Ported Stacking Manifold Type, Coil Voltage: 24VDC, Flow Rate: Power Consumption: 0.35W, Operating Press: 0.1MPa, Cv: 0.016, Electrical Entry: Plug Lead w/Light/Surge Suppressor, Port Size: Body Ported, Barb Fitting ø3.18/ø2, Made to Order: -, Lead Wire Length: -

Body Style: Body Ported Stacking Manifold Type, Coil Voltage: 24VDC, Flow Rate: Power Consumption: 0.5W, Operating Press: 0.3MPa, Cv: 0.016, Electrical Entry: Plug Lead w/Light/Surge Suppressor, Port Size: Body Ported, Barb Fitting ø3.18/ø2, Made to Order: -, Lead Wire Length: -

Body Style: Body Ported Stacking Manifold Type, Coil Voltage: 12 VDC, Flow Rate: Power Consumption: 0.5W, Operating Press: 0.5MPa, Cv: 0.011, Electrical Entry: Grommet, Port Size: Body Ported, Barb Fitting ø3.18/ø2, Made to Order: -, Lead Wire Length: -

Body Style: Body Ported Stacking Manifold Type, Coil Voltage: 24VDC, Flow Rate: Power Consumption: 0.5W, Operating Press: 0.3MPa, Cv: 0.016, Electrical Entry: Grommet, Port Size: Body Ported, Barb Fitting ø3.18/ø2, Made to Order: -, Lead Wire Length: -

Body Style: Body Ported Stacking Manifold Type, Coil Voltage: 12 VDC, Flow Rate: Power Consumption: 0.35W, Operating Press: 0.3MPa, Cv: 0.011, Electrical Entry: Grommet, Port Size: Body Ported, Barb Fitting ø3.18/ø2, Made to Order: -, Lead Wire Length: -

Body Style: Body Ported Stacking Manifold Type, Coil Voltage: 12 VDC, Flow Rate: Power Consumption: 0.5W, Operating Press: 0.5MPa, Cv: 0.011, Electrical Entry: Plug Lead w/Light/Surge Suppressor, Port Size: Body Ported, Barb Fitting ø3.18/ø2, Made to Order: -, Lead Wire Length: -

Body Style: Body Ported Stacking Manifold Type, Coil Voltage: 24VDC, Flow Rate: Power Consumption: 0.35W, Operating Press: 0.3MPa, Cv: 0.011, Electrical Entry: Plug Lead w/Light/Surge Suppressor without connector, Port Size: Body Ported, Barb Fitting ø3.18/ø2, Made to Order: -, Lead Wire Length: -

CLA

-600 20-600 :J2 35 86 11 5 '/, Y. 64 20 40 10 95 17 27 59 13 12 MaX 1 25 7 30 80 20 40 10 102 17 26 67 18 15 Ml0Xl .2S 25 52 14 11 3 21 30 72 23 17 M1 2X 175 30 52 14 124 21 31 76 25 19 M12X1.75 7 40 99 80 1 750 20750 37 40 102 129 'I.

7

S n Thread type Nil Rc1/4 NPT1/4 G1/4 TN TF Bore size Made to Order MK 40 50 63 40 mm 50 mm 63 mm Refer to page 422 for details.

LEC-OM07605CN

PE06] 42.A [AL. 42.8] 8 34 8. 45 45.1 (1) 55 55 LECSS2-T 55 (2) (2) (3) (3) / / (4) (4) (5) (5) 8 35 8. 46 46.1 (1) 40 LECSS2-T 1 40 40 (2) (2) (3) (3) 46.2 (1) 40 LECSS2-T 2 40 40 (2) (2) 46.3 (1) (2) (2) 46.5 [AL. 46.1] LECSS2-T 3 46.6 (1) 4 8 36 8. 47 47.1 (1) LECSS2-T (2) (2) 47.2 (1) (2) (2) 50 1 50.1 (1) LECSS2-T 1 (2) (2) UVW (3) (3) ( ) (4) (4) (5) LECSS2

SX

(R)-LM plug connector (M): SX7 40(R)-M02 03 Manual override (Press and turn for the locking type.)

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

(mm) Model CXS10-10 S SS ZZ Z 10 70 87 30 20 80 97 30 30 90 107 40 40 100 117 40 21-/2210-/11-/12CXS10-20 CXS10-30 CXS10-40 CXS10-50 21-/2210-/11-/1221-/2210-/11-/1221-/2210-/11-/1250 110 127 40 21-/2210-/11-/1283 Dual rod cylinder CXSL 1221CXS / 10-/1122Basic style / CXS15, CXSL15 10-/11221221S ZZ SS 20 10 9 2-4.3 through Z 28 counter bore depth 4.4 18 5 30 1 M6 x 1.0 x 5L (Hexagon socket

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

10 L/min 0.5 to 10.5 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.1 to 6 L/min 0.3 to 6.3 L/min 5 V 20 mA 30% 70% PF2M710 92% 8% 0.3 to 25 L/min 1.3 to 26.3 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.3 to 15 L/min 0.8 to 15.8 L/min 5 V 20 mA 30% 70% PF2M725 92% 8% 0.5 to 50 L/min 2.5 to 52.5 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.5 to 30 L/min

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

45 50 55 60 35 40 45 50 55 60 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 25 30 35 40 45 50 25 30 35 40 45 50 25 30 35 40 45 50 55 60 65 70 30 35 40 45 50 55 60 65 70 75 CQ-M3 x 35L x 40L x 45L x 50L x 55L x 60L CQ-M3 x 35L x 40L x 45L x 50L x 55L x 60L CQ-M5 x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L CQ-M5 x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L

Series SV

Response time 5 (EA) 1 (P) 3 (EB) Response time ms at 0.5MPa (72.5psi) Type of actuation 3 position pressure center SV1000 SV2000 SV3000 SV4000 (A) 4 (B) 2 2 position single 11 or less 25 or less 28 or less 40 or less 2 position double 10 or less 17 or less 26 or less 40 or less 3 position 18 or less 29 or less 32 or less 82 or less 5 (EA) 1 (P) 3 (EB) 4 position dual 3 port valve 15 or less

Heavy Duty Stopper Cylinder

MIW MIS 40 30 20 3.