SMC Corporation of America
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IDU22E75E-23 IDU22E75E-30 (1 phase AC230V) (3 phase AC200V) L N PE L1 L2 L3 PE Customer Connection Side Terminal connecting screw: M3 Crimping terminal width: 6.5mm and below Applicable electrical wire: 1.25mm2 or more Customer Connection Side Terminal connecting screw: M3 Crimping terminal width: 6.5mm and below Applicable electrical wire: 1.25mm2 or more IDU Series 1-1 Parts Name and

mounting nut Hexagon socket head cap bolt (M3 x 0.5 x 14 spring wasdher 2 pcs.)

steel/NBR POM/Stainless steel NBR NBR ASV Note) M3 type is made of stainless steel.

2.a VALVES VALVES SERIES PAGE NUMBER SX3000 / SX5000 2.1 SOLENOID VALVE SY100 2.5 3/2 DIRECT ACTING / SOLENOID SPRING VALVE M3 PORTED SY3000/5000/7000 2.8 BODY PORTED SOLENOID VALVE SY3000/5000/7000 2.13 BASE MOUNTED SOLENOID VALVE VQ100 2.19 3/2 DIRECT ACTING / SOLENOID SPRING VALVE M3-M5 PORTED VQ0 2.21 5 PORT METAL/RUBBER SEAL ULTRA HIGH SPEED SOLENOID VALVE VQ1000 2.26 5 PORT METAL/RUBBER

x 0.5 3.5 M3 x 0.5 M3 x 0.5 16 50.5 10.8 24.4 9.4 25 9.5 2H9 2 M3 x 0.5 4.8 20 22.5 2H9 2 11 2H9 2 M3 x 0.5 3.5 M4 x 0.7 M3 x 0.5 18 56 13.4 26.2 11.3 28 10 2H9 2 M3 x 0.5 5.3 21 24.5 2H9 2 11.5 2H9 2 M3 x 0.5 3.5 M5 x 0.8 M3 x 0.5 20.5 60 15.2 31 11.8 30.5 12 2H9 2 M3 x 0.5 5.3 25 27 2H9 2 13.5 2H9 2 M4 x 0.7 4.5 M6 x 1 M5 x 0.8 23 73.5 15.4 37.4 14.9 34.5 14 3H9 3 M4 x 0.7 6.5 29 32.5

Use bolts that are between the maximum and minimum screw-in depths in length. 41 Electric Slide Table/High Rigidity Type Series LESH Model Selection Specific Product Precautions Dimensions: Symmetrical Type/L Type LESH8L 3 x M3 x 0.5 thread depth 5.5 depth 3 3 +0.03 +0.01 A-A 5 10 6 x M3 x 0.5 thread depth 5 Note 4) C C 11.5 G x M4 x 0.7 thread depth 8 26.5 32 6.5 A 7 6.5 3.2 2 Servo Motor

Model Bolt Maximum tightening torque (Nm) Maximum screw-in depth L (mm) Model Bolt Maximum tightening torque (Nm) Maximum screw-in depth L (mm) MXF8 MXF8 6 6.5 0.9 0.9 M3 x 0.5 M3 x 0.5 MXF12 MXF12 6 5.5 0.9 0.9 M3 x 0.5 M3 x 0.5 MXF16 MXF16 10 6.5 2.1 2.1 M4 x 0.7 M4 x 0.7 MXF20 MXF20 12 9.5 4.4 4.4 M5 x 0.8 M5 x 0.8 Caution To prevent the workpiece holding bolts from touching the guide

PF2A ZS-36-A1 ZS-36-A2 ZS-36-A3 ZS-36-A4 ZS-36-A5 2 L-type brackets, 2 mounting screws M3 x 15L For 1 station (for single unit) 2 L-type brackets, 2 mounting screws M3 x 25L For 2 stations PF2W 2 L-type brackets, 2 mounting screws M3 x 35L For 3 stations 2 L-type brackets, 2 mounting screws M3 x 45L For 4 stations PF2D 2 L-type brackets, 2 mounting screws M3 x 55L For 5 stations IF 951 Series

( 0.8 ppm) [AFD] Max. 0.1 mg/m3 (Before saturated with oil 0.01 mg/m3 or less 0.008 ppm) Compressed air purity class*5 [AFM] ISO 8573-1:2010 [ 3 : 7 : 3 ]*6 [AFD] ISO 8573-1:2010 [ 1 : 7 : 2 ]*7 Drain capacity 8 cm3 25 cm3 45 cm3 Bowl material Polycarbonate Bowl guard Semi-standard (Steel) Standard (Polycarbonate) Weight 0.10 kg 0.18 kg 0.37 kg 0.40 kg *1 Inlet pressure: 0.7 MPa.

The intersection H is the amount of moisture included in the compressed air 1 m3 at 102 psi (0.7 MPa), and a pressure dew point 77F (25C). The amount of moisture is 3.0 g/m3. 10.

bracket Switch mounting nut Hexagon socket head cap bolt (M3 x 0.5 x 14 spring wasdher 2 pcs.)

Model Bolt Maximum tightening torque (Nm) Maximum tightening torque (Nm) Maximum screw-in depth L (mm) Maximum screw-in depth L (mm) Model Bolt Selection Caution MXF8 MXF8 6 6.5 M3 x 0.5 0.9 M3 x 0.5 0.9 MXF12 MXF12 6 5.5 M3 x 0.5 0.9 M3 x 0.5 0.9 1. If intermediate stop by external stopper is done, avoid ejection. If ejection occurs, it may cause damage.

Unscrew the M4 screws (47, 3 pcs.), M3 screws (48, 2 pcs.) and M3 screw (49). Remove the spool valve assembly. The spool valve may be cleaned if special attention is paid to a clean environment and proper procedure. After unscrewing the M4 screws (47, 3 pcs.) the spool valve may be lifted from the fixture.

/h 23 m3/h 29 m3/h 32 m3/h 39 m3/h 72 m3/h Outlet air temp. 10C The data for ANR is referring to the conditions of 20C, 1atm. pressure & relative humidity of 65%.

X83 M3 Note 1) M-3G2 M5 Note 2) M-5G2 X226 Gasket material: Stainless steel 304, FKM Applicable thread Gasket part No. M3 M3G-DPH00489 X112 Gasket material: Stainless steel 316, special FKM Applicable thread Gasket part No. M5 M-5G3 Note 1) Compatible with models using M3 excluding M-3-2.

mounting attachment) M3 x 0.5 (Finger closing port) Auto switch mounting groove (2 positions) Adjustment needle for finger speed 11.6 3 9.4 S 4 6 0 0.05 4 7 7 Note) For single acting, one port is used as a breather port. 2.3 17.5 M3 x 0.5 (Finger opening port) MHKL2-12: Long stroke type 9 2-M3 x 0.5 thread depth 5 (Mounting thread) 20 3H9 depth 3 +0.025 0 13H9 depth 1.5 +0.043 0 2-M3 x 0.5

17.5 M3 x 0.5 (Finger opening port) MHKL2-12: Long stroke type 9 2-M3 x 0.5 thread depth 5 (Mounting thread) 20 3H9 depth 3 +0.025 0 13H9 depth 1.5 +0.043 0 2-M3 x 0.5 thread depth 6 (Mounting thread) 4-M4 x 0.7 thread depth 8 (Mounting thread) Bottom hole 3.4 through (Mounting hole) 0 0.1 5 Open 20 +1.2 0 4 8 10 0.02 41.6 30 20 3 22 43 0 0.2 Closed 9 26 3H9 depth 3 +0.025 0 15 36 13 57

for mounting attachment) M3 X 0.5 (Finger closing port) Groove position for auto switch mounting (2 positions) Adjustment needle for finger speed 11.6 3 9.4 S 4 6 0 -0.05 4 7 7 Note) For single acting, one port is used as bleed port. 2.3 17.5 M3 X 0.5 (Finger opening port) MHKL2-12l/Long stroke model 9 20 2-M3 X 0.5 thread depth 5 (Mounting thread) 3H9 depth 3 +0.025 0 2-M3 X 0.5 thread

M3 x 0.5 18 0.9 M3 x 0.5 39 (Without subplate 18) Base mounted (with sub-plate) 0.089 M5 x 0.8 0.36 0.31 0.089 0.36 0.31 N.O.

Dimensions Grommet VQ10-G-M5 (M3) 29.2 6.1 Manual override 4.9 12.4 14.8 E 2-2.7 mounting hole 12 3.7 18.1 (Lead wire length) 300 Locking type manual override 30.7 28 11 A P (5.9) (5.9) 7 ( 4 . 1 ) 5 5 5 4.9 9.7 4.9 3-M5, (M3) (18.1) ( ): M3 Broken line: Locking type manual override 4-12-10 11 3 Port Solenoid Valve Series VQ100 Dimensions L plug connector VQ10-L-M5 (M3) 35.1 Manual override