Slide Unit Series CX2/CXWM/CXWL

Bore size/Stroke (mm) 10 25, 50, 75, 100 Cushion (Option) 15 25, 50, 75, 100, 125, 150, 175, 200 With adjusting bolt (2 pcs.) Nil 25 25, 50, 75, 100, 125, 150, 175, 200 B With shock absorber (2 pcs.) For 15 and 25, strokes up to 300 are available as made-to-order. (-XB11) BS With shock absorber (1 pc.)

3 Port Solenoid Valve Rubber Seal Series SY100 1

110 VAC [115 VAC] VFN 220 VAC [230 VAC] Electrical entry Manual override 24 V, 12 V, 6 V, 5 V, 3 VDC/100 V, 110 V, 200 V, 220 VAC Grommet L plug connector M plug connector Nil: Non-locking push type D: Push-turn locking slotted type G: 300 mm lead wire L: With lead wire (Length 300 mm) M: With lead wire (Length 300 mm) MN: Without lead wire L P B: Locking slotted type E: Push-turn locking

3 Port Solenoid Valve Rubber Seal Series SY100

110 VAC [115 VAC] VFN 220 VAC [230 VAC] Electrical entry Manual override 24 V, 12 V, 6 V, 5 V, 3 VDC/100 V, 110 V, 200 V, 220 VAC Grommet L plug connector M plug connector Nil: Non-locking push type D: Push-turn locking slotted type G: 300 mm lead wire L: With lead wire (Length 300 mm) M: With lead wire (Length 300 mm) MN: Without lead wire L P B: Locking slotted type E: Push-turn locking

4/5 Port Air Operated Valve Series SYJA3000

59.6 [66.6] Approx. 300 (Lead wire length) 33 48.5 [55.5] Refer to page 1-5-79 for dimensions with connector cable.

Thermo-chiller

V as an option) (Only 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.1 5 to 35 V V V V V (400 V as standard, 200 V as an option) (Only 200 V as an option) Indoor use Electrical box: IPX4 CH1 0.1 15 to 25 V HRLE Basic dual type V (CH1, 2 (CH1, 2 Scheduled to acquire UL Standards (Only 400 V) CH2 0.5 CH1 +0 to 15 total) total) V V V HRL Inverter dual type CH1 0.1 15 to

Digital Flow Switches

Remote Type Water resistant construction conforming to IP65 Series PF2A Series PF2A For Air Flow rate measurement range (l /min) For Air For Water For High Temperature Fluid (Water 90C) 0.5 to 4 2 to 16 5 to 40 0.5 to 4 2 to 16 5 to 40 10 to 100 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 150 to 3000 300 to 6000 600 to 12000 Integrated Type Series PF2W Series PF2W For Water Application

1 Blow Gun Series VMG K
M
H
D
MS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com T
VMG Pressure loss is less than 1%. (nozz

nozzle 900 400 KNL3-06-200 KNS-R02-110-8 KNL6-06-200 800 350 Flow rate [l/min (ANR)] Flow rate [l/min( ANR)] 700 300 600 250 KNS-R02-090-8 KNL3-06-150 500 KNL6-06-150 200 400 KNS-R02-100-4 150 300 100 KNS-R02-075-4 200 50 100 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 Supply pressure [MPa] Supply pressure [MPa] 15-7-5 6 Series VMG Dimensions VMG11/Piping

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Double acting single rod only 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30 12, 16 5, 10, 15, 20, 25, 30 75, 100, 125, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 20 5, 10 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 25 Applicable Auto Switches Mounting Bracket Part No.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

VQZ3000 VFS VS 0.7 0.9 VS7 Bore size (mm) Cylinder speed (mm/s) Base mounted (With sub-plate) Cv Series CJ2 Series CM2 Series CA1 6 10 16 20 25 32 40 40 50 63 80 100 150 300 VQZ1000 Body width 10 450 0.3 V V V 600 750 150 300 VQZ2000 Body width 15 0.6 450 V 600 V V 750 150 300 VQZ3000 Body width 18 0.9 450 V V V V V 600 750 Cylinder speed marked with can be controlled by speed controller

Parallel Style Air Gripper Series MHZ

0.5 MPa 300 40 0.4 MPa 0.4 MPa 0.3 MPa 30 0.3 MPa 200 0.2 MPa 0.2 MPa 20 100 10 0 10 20 30 40 50 60 0 20 40 60 80 100 120 Gripping point L (mm) Gripping point L (mm) MHZ2-20D/MHZL2-20D 100 Pressure 0.7 MPa Gripping force (N) 0.6 MPa 80 0.5 MPa 60 0.4 MPa 0.3 MPa 40 0.2 MPa 20 0 20 40 60 80 100 Gripping point L (mm) 378 Parallel Style Air Gripper Series MHZ Effective Gripping Force: Series

Shock Absorbers and Rate Controls

isl'r t-t 2 300 0lhy4 1 8?.6 6.4 ,7 f9.9 ( o E SC!

Large Bore Compact Cylinder Series CQ2

10, 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250, 300 Minimum Strokes for Auto Switch Mounting Unit: mm (in) D-Z7, Z8 D-Y5, Y6, Y7 D-Y7W, D-Y7BAL 180, 200 2 pcs.

Slit Valve

1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

MU

, 250, 300 300 Other intermediate strokes can be manufactured upon receipt of order.

MU

, 250, 300 300 Other intermediate strokes can be manufactured upon receipt of order.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

8 164 176 244 256 9 182 194 272 284 10 200 212 300 312 38 50 48 60 ZFA100 L2 L1 L2 ZFA200 1107 Air Suction Filter With One-touch Fittings Series ZFB Model Recommended air flow (l/min (ANR)) (1) Internal capacity (cm3) Port size (Applicable tubing O.D.)

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Single rod CQ2 7-6-108 10 to 300 Double acting 125, 140 160, 180 200 Double rod CQ2W 7-6-115 10 to 300 Long Stroke 32, 40, 50 63, 80, 100 Single rod CQ2 Double acting 7-6-121 125 to 300 Anti-lateral Load Single rod CQ2S 32, 40, 50 63, 80, 100 Double acting 32 to 40/5 to 100 50 to 100/10 to 100 7-6-132 With End Lock 20, 25, 32 50, 63, 80 100 Single rod CBQ2 Double acting 20 to 63/10 to 100

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

70 100 200 300 10 30 50 70 100 200 300 Eccentric distance l (mm) Eccentric distance l (mm) Selection graph to 700mm/s Selection Example: Vertical Upward Mounting Solid line: Operating pressure 0.4MPa or more 100 50 Selection conditions Mounting: Vertical upward (lifter) Maximum speed: 500mm/s Load mass: 40kg Eccentric distance: 80mm Load mass m (kg) Refer to graph based on vertical mounting

MGP

MGP(kg) MGPM12100 (mm) (mm) 10 20 25 30 40 50 75 100 125 150 175 200 250 300 350 400 12 MGPM12 0.24 0.28 0.31 0.35 0.39 0.50 0.59 0.70 0.79 0.89 0.98 1.17 16 MGPM16 0.33 0.38 0.43 0.48 0.53 0.68 0.80 0.97 1.09 1.22 1.35 1.60 20 MGPM20 0.67 0.75 0.83 0.91 1.17 1.37 1.57 1.76 1.96 2.16 2.63 3.03 3.42 3.82 25 MGPM25 0.95 1.05 1.16 1.27 1.65 1.92 2.19 2.47 2.74 3.01 3.67 4.21 4.76 5.30 32 MGPM32

MGF

5 1 10 20 30 40 50 100 200 300 400 1 5 4 10 20 30 40 50 100 200 300 400 5 10 50 100 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) l = 300mm Graph 4 l = 200mm Graph 3 v = 150mm/s or less Graph 7 v = 200mm/s or less Graph 8 20 300 300 200 200 MGF100 MGF100 20 100 100 MGF100 10 50 40 50 40 MGF63 MGF100 MGF63 Load weight m0 (kg) Load weight m0 (kg) Load