Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

3/8, 1/2, 3/4-2 port 3, 5 port 30 (42) 30 (42) 1/8 14 port 3/8, 1/2, 3/4-2 port 3, 5 port 30 (42) 30 (42) 3/8, 1/2, 3/4 1 port 3/8, 1/2, 3/4 1 port Dimension inside is for rubber seal.

MU

1.4 0 Stroke length tolerance 378 121 159 197 235 30 46 83 IN 25 12 15 Cushion Rubber bumper 650 218 283 348 413 42 88 153 IN 32 14 24 Thread tolerance JIS Class 2 1056 366 472 578 683 56 155 261 IN 40 16 30 Equivalent tube I.D.

Short Stroke Electric Actuator Series LX

) 20 20 5.1 2.6 0.6 0.1 5.1 2.6 0.6 0.1 30 30 3.4 1.7 0.4 0.1 3.4 1.7 0.4 0.1 For transfer load of 1kg For transfer load of 3kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 50 10 1 100 50 10 1 10 10 10.1 5.1 1.1 0.2 10.1 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s) 20 20 5.1 2.6 0.6 0.1 5.1 2.6 0.6 0.1 30 30 3.4 1.7 0.4 0.1 3.4 1.7 0.4 0.1

LEC-OM07605CN

LEC-CSS-L 11.2 11.2.1 [W] LECLECMR-RB-032 MR-RB-12 [40] [40] LECSS2-T5 30 LECSS2-T7 10 30 100 LECSS2-T8 10 30 100 LECSS2-T9 20 30 100 11 8 11. 11.2.2 [Pr. PA02] [Pr. PA02] 0 0 00: 100W 200W, 400W, 750W 02:LEC-MR-RB-032 03:LEC-MR-RB-12 11.2.3 11.5 100 5m 11 9 11. (1) LECSS2-T P+DP+CG3G4 G3G4 P+D P+D P P+ C C G3 D (3) (1) G4 5m 5 m (12) 1.

LG1H

Transfer load m (kg) L2 600 400 L2 (mm) Mer Rolling Yawing m 200 L2 Mer 10 20 30 0 Transfer load m (kg) m a = 1000 4000 a = 2000 L3 (mm) L3 a = 3000 2000 m Mey a 10 20 30 0 Transfer load m (kg) Refer to page 183 for deflection data. 164

Floating Joint

42 42 52 52 52 56 56 70 80 80 88 116 8 9 9 13 13 13 15 15 18 24 24 24 42 19 25 25 30 30 30 38 38 47 58 58 69 89 44 52 52 67 67 67 82.5 82.5 98.5 123 123 155 213 12 16 16 19 19 19 22 22 25 32 32 70 90 1 1.5 1 1.25 1.5 1.75 1.5 2 2.5 3 1.5 2 2 18 24 24 30 30 30 34 34 42 48 48 54 74 8 10 10 12 12 12 16 16 20 24 27 27 33 21 24 24 31 31 31 41 41 50 59.5 59.5 66 96 36 48 38 44 44 57.5 57.5 57.5

MK

C 8 8 8.5 8.5 D 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 Mounting bolt M3 X 50l M3 X 60l M3 X 50l M3 X 60l M5 X 75l M5 X 85l M5 X 75l M5 X 85l M5 X 85l M5 X 95l M5 X 75l M5 X 85l M6 X 95l M6 X 130l M8 X 100l M8 X 130l MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20 MKB50-50 MKB63-20 MKB63-50 PTo attach and detach

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

80 40 45 50 55 60 65 70 75 80 85 25 30 35 40 45 50 25 30 35 40 45 50 25 30 35 40 45 50 55 60 65 70 30 35 40 45 50 55 60 65 70 75 CQ-M3 x 35L x 40L x 45L x 50L x 55L x 60L CQ-M3 x 35L x 40L x 45L x 50L x 55L x 60L CQ-M5 x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L CQ-M5 x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L CQ-M3 x 25L x 30L x 35L x 40L x 45L x 50L CQ-M3

NCA1

0.62 1 5 3/4 1.71 3 5/8 2.36 4.75 200 (2) 5/8 7/16-20 3/4 2.6 1 1/8 3/8 3/4 1/2 1/2 9/16 5/16-24 2.5 0.3 3/8 3/8 1.26 1.06 0.62 .75 0.62 1 5 3/4 1.71 3 5/8 2.4 4.75 250 (2.5) 5/8 7/16-20 3/4 3.1 1 1/8 3/8 3/4 1/2 1/2 9/16 5/16-24 3 0 3/8 3/8 1.30 1.06 0.62 .75 0.62 1 5 7/8 1.75 3 3/4 2.48 4.88 325 (3.25) 1 3/4-16 1 1/8 3.9 1 1/2 1/2 1 1/4 3/4 5/8 7/8 3/8-24 3.75 0 1/2 5/8 1.57 1.18 1.05

Series CQ2

There may be large variations depending on the surrounding environment (variations as much as 30%).

SYJ300/500/700

circuit (24, 12 VDC only) SY100-30-2AFor 200 VAC: T VQZ For other voltages of AC: SY100-30-3APower saving circuit is not available in the case of W type.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

IN side, OUT side 4 10 20 30 50 75 75 Prevents vacuum equipment trouble due to airborne contaminants. Mass (g) 22 22 30 30 39 39 Model Tubing size ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 7 7 12 12 16 16 6 6 8 8 10 Metric size Unrestricted 360 piping tube mounting.

1.63

34 40 46 58 92 113.5 116.5 116.5 135 135 47.5 66.5 64.5 60.5 74.5 67.5 62 63.5 76.5 76.5 85 85 17.5 16.5 24.5 20.5 24.5 17.5 25, 50, 75, 100, 125, 150, 175, 200 Nil TN TF P Bore size (mm) PW Q R S T U V X YY YL Z MM ML NN OA OB OL 20 25 32 40 50 63 M5 x 0.8 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 Rc1/8 Rc1/8 Rc1/8 Rc1/8 Rc1/4 Rc1/4 17 18 26 27 28.5 30 14 16 20 20 26 30 64 68 78 92

Vacuum Module Series ZX

Nil 0.6 m ZF (For 110 VAC) 30 50 3 m 5 m 6 3A 36 VJ10 ZP The asterisk () denotes the symbol for assembly. Lead wire length Note) If ordering switch with 5 m lead wire, specify both switch and lead wire connector part numbers. Nil 0.3 m (Standard) SP 6 10 15 20 25 30 0.6 m 1 m 1.5 m ZCUK Ordering example) ZX100-K150ZECN(-Q) 1 pc. VJ10-20-4A-6 2 pcs.

Series LX Acceleration Time Guide

F A A Lr Lr = 150mm L X F 60 Table displacement (m) Table displacement (m) Table displacement (m) 10 40 LXFH-100 50 LXFH-100 8 LXFH-100 40 30 LXFH-75 LXFH-75 6 30 20 LXFH-50 LXFH-50 LXFH-75 4 20 LXFH-25 LXFH-25 10 LXFH-50 2 10 LXFH-25 0 Weight (kg) 0 Weight (kg) 0 Weight (kg) 0.5 1 1.5 2 2.5 3 0.5 1 1.5 2 2.5 3 0.5 1 1.5 2 2.5 3 Displacement at the section indicated by the arrow when a load

ZX

Ordering example) Lead wire length 5A 10 ZS ZCU Lead wire length (For DC) Nil 6 10 15 20 25 30 0.3 m (Standard) 4A 20 VJ10 6 AMJ 0.6 m 1 m 1.5 m 2 m 2.5 m 3 m Note) If ordering a vacuum switch with 3 m lead wire, specify both the vacuum unit switch and the 3 m lead wire connector part numbers. Nil 30 50 0.6 m 3 m 5 m (For 100 VAC) 1A 36 VJ10 6 Misc. ZX1051-K15LOZ-EC 1 pc.

C92

45 60 12,5 12 15 16 20,5 20,5 20 20 130 145 155 170 190 205 245 280 7 9 9 9 12 14 16 18 10 12 12 16 16 20 25 30 65 75 80 90 110 140 164 204 15 18 18 23 23 28 30 35 142 160 170 190 210 230 275 315 45 52 60 70 90 110 130 170 26 28 32 40 50 60 70 90 26 28 32 40 50 60 69,5 89,5 9 12 12 16 16 20 25 30 32 36 45 50 63 75 90 115 10 11 12 13 15 18 15 20 3,2 3,2 3,2 3,2 4,5 6 9 11 144 163 175 190

Electric Actuator Miniature Rod Type Miniature Slide table Type

25 50 75 Weight [kg] Basic 0.24 0.29 0.34 0.47 0.55 0.65 Compact 0.41 0.49 0.59 Note 1) Pushing force accuracy is LEPY6: 30% (F.S.), LEPY10: 25% (F.S.).

LEC-OM02904

USB 8E USB 888 1. 30 2. 8 2 8 8.2 (25) 30 (30) (45) (46) 1(50) 2(51) OFFONCPU 8.1 (ALM) No.

FQ1

EJ202S-075X11 30 1, 3, 5, 10 25, 50, 75 1 EJ302S-001X11 3 EJ302S-003X11 Pressure loss: 0.01 to 0.02MPa Operating temperature: 0 to 60C Differential pressure resistance: 0.2MPa 5 EJ302S-005X11 10 EJ302S-010X11 65 x 250 25 EJ302S-025X11 50 EJ302S-050X11 75 EJ302S-075X11 1 EJ402S-001X11 3 EJ402S-003X11 5 EJ402S-005X11 10 EJ402S-010X11 65 x 500 25 EJ402S-025X11 50 EJ402S-050X11 75 EJ402S-