155

Voltage symbol 24 VDC V100-61-3-05 DC 24 VZ 12 VDC V100-61-3-06 DC 12 VZ 100 VAC V100-61-2-01 100/110 VZ 200 VAC V100-61-2-02 200/220 VZ 110 VAC V100-61-2-01 100/110 VZ 220 VAC V100-61-2-02 200/220 VZ 240 VAC V100-61-2-07 240 VZ If an AC specification without DIN Terminal (DO) is selected, always use a DIN connector with surge voltage suppressor as the connector.

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

52 128 200 300 38 50 88 124 174 110 80 5 6 4 8 20 24 63 M10 x 1.5 MLGPM (slide bearing)/A, DB, E dimensions MLGPL (ball bushing)/A, DB, E dimensions A E A E Bore size (mm) Bore size (mm) DB st50 50100200200200100200

0.5

mA Residual voltage: 1 V or less (Load current: 100 mA) Maximum applied voltage: 26.4 VDC Maximum load current: 100 mA Residual voltage: 1 V or less (Load current: 100 mA) Maximum applied voltage: 26.4 VDC Maximum load current: 100 mA Residual voltage: 1 V or less (Load current: 100 mA) Error signal Maximum load current: 100 mA Residual voltage: 1 V or less (Load current: 100 mA) Output

51

Caution Standard stroke (mm) Note) Bore size (mm) 20 25 32 40 50 63 80 100 25, 50, 75, 100, 125, 150, 200 25, 50, 75, 100, 125, 150, 200, 250, 300 Note) Manufacture of intermediate strokes in 1 mm increments is possible. (Spacers are not used.)

Transfer

Thrust energy E2 100 10 20 30 40 50 100 200 300 Fs Fs + mgs Fsmgs 400 500 Absorbed energy E W2 max.

Booster Regulator/Air Tank

100 200 1 0.5 30 0.5 0.8 Provide requisite conditions for selection.

CJ2

, 125, 150 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Minimum Strokes for Auto Switch Mounting Refer to p.1.3-57.

Compact Guide Cylinder Series MGQ

MGQ 12, 16 M L 10, 20, 30, 40, 50, 75, 100 20, 30, 40, 50, 75, 100 125, 150, 175, 200 M L MGQ 20, 25 MGJ MGQ 32, 40 50, 63 80, 100 25, 50, 75, 100, 125 150, 175, 200 M L MGP MGQ OUT(N) IN(N) Theoretical Output (N) Bore size (mm) MGG Operating pressure (MPa) Rod size (mm) Operating direction Piston area (mm2) 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 MGC Made to Order Specifications (For details

Hydraulic

100 75 28 65 32 13 22 20 M12 x 1.75 26 26 29 M22 x 1.5 35 1/2 26 12 130 75 155 90 100 38 6.5 118 118 90 35.5 80 35 13 27 19 M12 x 1.75 27 26 34 M27 x 2 35 1/2 34 16 145 90 172 100 125 38 6.5 140 140 112 35.5 80 35 15 27 19 M14 x 2 27 30 34 M27 x 2 35 1/2 34 18 170 112 200 100 160 42 9 174 174 140 45 100 38 17 36 22 M16 x 2 28 34 38 M33 x 2 40 3/4 43 20 205 140 240 108 (mm) Bore size (mm)

New

VAC Grommet Flange type with surge voltage suppressor 110 VAC A B C D Direct piping type 200 VAC Flange type 230 VAC 80A 6 Flange body I type 24 VDC Flange body II type 24 VDC DIN terminal with surge voltage suppressor 100 VAC 7 8 90A B Flange type 110 VAC 100A 200 VAC 230 VAC 24 VDC Conduit terminal 100 VAC with surge voltage suppressor 110 VAC 200 VAC 230 VAC 24 VDC Conduit with surge

ITV

kPa 200 100 kPa 100 50 kPa IC 0.4 0.6 0.8 1.0 1 0 1 2 3 4 5 6 0 7 1.2 Flow rate (/min (ANR)) Supply pressure (MPa) VBA VE Series ITV009 VY1 With 50% of signal input Linearity, Hyteresis Repeatability 1 1 G Output deviation factor (% F.S.)

VZ1000

Coil rated voltage (V) 24, 6, 12, 48 Allowable voltage fluctuation (%) Power consumption (W) [Current mA] 15 to +10% of rated voltage 1.8 (With indicator light 2.1) [24 VDC: 75 (With indicator light 87.5)] Note) DC 4.5/50 Hz, 4.2/60 Hz 100 VAC: 45/50 Hz, 42/60 Hz 200 VAC: 22.5/50 Hz, 21/60 Hz Inrush Note) Apparent power (VA) [Current mA] AC 3.5/50 Hz, 3/60 Hz 100 VAC: 35/50 Hz, 30/60 Hz 200

1.1

A sensor with the specification Pt 100 has a resistance of 100 at 0C.

LEH_C

200 mm/s mm/s 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN1 DC24V 2) USB (A-miniB type ( <> AWG20 (0.5mm 2) (, USB ) LEC-W2 1 2UL ,UL1310 Class2 (3m LEC-T1-3JG* (LEC ) 6.

High Vacuum Angle Valve

Model XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 1 1 1 1 H4 100C 100 V 200/40 200/50 400/100 600/150 Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 800/40 800/50 1600/100 2400/150 Heater assembly quantity 1 1 1 1 2 H5 120C 100 V 200/40 400/70 400/

125

Bore size System Average speed [mm/s] MB, CA2 series Pressure 0.5 MPa, Load ratio 50%, Stroke 500 mm 40 50 63 80 100 1000 900 800 700 600 500 400 300 200 100 0 Vertically upward Horizontal A 1000 900 800 700 600 500 400 300 200 100 0 B 1000 900 800 700 600 500 400 300 200 100 0 C Bore size System Average speed [mm/s] CS1/CS2 series Pressure 0.5 MPa, Load ratio 50%, Stroke 300 mm 125 140 160

Rotary Table

On size 70, 100 and 200 the bearing cannot be removed as the bearing is press-fitted.

Magnetic Separator FHM Series

dimensions 055 55 x t20 100 200 100 x t30 200 x 140 x t40 Magnetic separator Magnetic separator Fluid Iron Content Elimination Performance by Iron Particle Concentration FHMN-055 FHM-100 FHM-200 Fluid: Hydraulic fluid Fluid: Hydraulic fluid Fluid: Hydraulic fluid 100 90 80 70 60 50 40 30 20 10 0 1 5 10 50 100 100 90 80 100 90 80 70 60 50 40 30 20 10 0 100 200 300 400 500 100 200 300 400 500

Modular Design with Uniform Body Style

50 200 Flow rate [L/min (ANR)] 0 50 100 Flow rate [L/min (ANR)] AFM30-D AFD30-D 0.02 0.02 Pressure drop [MPa] Pressure drop [MPa] P1 = 0.5 MPa P1 = 0.3 MPa P1 = 0.5 MPa P1 = 0.3 MPa 0.01 0.01 P1 = 0.7 MPa P1 = 0.7 MPa 0 0 0 100 200 500 400 300 600 0 150 100 50 200 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] AFM40-D AFD40-D 0.02 0.02 Pressure drop [MPa] Pressure drop [MPa] P1 = 0.5 MPa

CV/MVGQ

Standard Stroke Standard stroke (mm) Note) Bore size (mm) Symbol Specifications 25, 50, 75, 100, 125, 150 20 -XA Change of rod end shape 25, 50, 75, 100, 125, 150 25 25, 50, 75, 100, 125, 150, 200 32 25, 50, 75, 100, 125, 150, 200, 250 40 Note 1) Intermediate stroke except mentioned above is produced upon receipt of order.