MGQ 20 25 25 28 36 24 17.5 25 20 18.5 21 16 16 20 20 25 30 Grooves (Except 12, 16, 20, 25) (mm) Use grooves section a and section b in the figure below of the cylinder body for firmly fixing in the following case.
(Because barrel nipples are used for equipment connections.) 100 Standard dew point temperature and air flow rate Outlet air flow rate Purge air flow rate (l/min(ANR)) Flow rate by size Symbol Standard dew point (C) 5 50/12 50/6 3 25/6 25/3 10 100/2 20 200/5 30 300/7 50 60 75 100 Nil H 20 15 500/12 600/12 750/15 1000/19 Drain discharge method 500/6 600/6 750/8 100/1 200/2 300/3 1000/11
X MKF16-Z 393 MK Series Dimensions: 20, 25 The outline dimensions shown are when the rod is retracted.
37 55 182 M14 x 2 depth 25 For long strokes Bracket mounting strokes Bore size (mm) Stroke range (mm) Bore size (mm) Bracket mounting stroke Bore size (mm) O P Y Z Y X W V U T S R Q R 20 25 32 40 50 20 25 32 40 50 20 25 32 40 50 100mm or more Rc 1/8 M6 x 1 depth 9 88 157 80 30 40 48 82 12 26 12 250 to 400 14 21 Rc 1/8 M6 x 1 depth 13 88 125mm or more 175 80 37 46 57 100 13 31 12 350 to 500
Bore size (mm) 16 20 25 32 40 50 63 16 mm 20 mm 25 mm 32 mm 40 mm 50 mm 63 mm Stroke adjusting unit Nil A L AL Without adjusting unit With adjusting bolt With low load shock absorber + Adjusting bolt With one A unit and one L unit Shock Absorbers for L Unit Bore size (mm) Unit no. 16 50 63 20 25 32 40 L unit RB1007 RB1412 RB0806 RB2015 Applicable Auto Switch For 16, 20 /Refer to page 8-30
(mm) R F (h9) E (g6) A B C D G K L M N P Q Y Model 90 180 270 CDRB2BW10-S CDRB2BW15-S CDRB2BW20-S CDRB2BW30-S 9 12 14 16 4 5 6 8 29 34 42 50 15 20 29 40 29 29 30 31 14 18 20 22 3 4 4.5 5 9 10 10 12 0.5 0.5 0.5 1 10 15 20 30 25 25 25 25 24 29 36 43 18.5 18.5 25 25 M5 x 0.8 M5 x 0.8 M3 x 0.5 M3 x 0.5 M3 x 0.5 depth 5 M3 x 0.5 depth 5 M5 x 0.8 M5 x 0.8 M4 x 0.7 depth 7 M5 x 0.8 depth 10 60 Series
temperature 32C Facility water temperature 32C 25 25 Cooling capacity [kW] Cooling capacity [kW] 20.5 20.6 Ambient temperature 43C 20 20 15 15 Ambient temperature 45C Facility water temperature 40C 10 10 5 5 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRSH250-A-20/40HRSH250-W-20/4030 30 Ambient temperature 32C Facility water
7 7 8 8.5 20 25 32 40 For long stroke, refer to page 9-2-32.
ST 15, 20 ST 5, 10 0.05 0.05 0.05 ST 5, 10 ST 5, 10 0.00 0 5 10 15 20 25 0.00 0 5 10 15 20 25 0.00 0 5 10 15 20 25 Load [N] Load [N] Load [N] MXZ20 MXZ20 MXZ20 0.25 0.40 0.25 ST 35, 40 ST 45, 50 ST 45, 50 ST 45, 50 Table displacement [mm] Table displacement [mm] Table displacement [mm] 0.35 0.20 0.20 0.30 ST 25, 30 ST 35, 40 ST 35, 40 0.25 0.15 0.15 ST 25, 30 ST 15, 20 ST 25, 30 0.20 0.1
25 25 400 0.2 Minimum operating pressure (MPa) 20 20 0.16 0.16 300 0.14 0.15 0.12 0.15 15 15 200 0.1 100 0.05 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 0 10 15 20 25 32 40 Supply pressure (MPa) Bore size (mm) Main Material Weights kg 15 20 25 32 40 Description Note Bore size (mm) Material 0.275 0.351 0.672 1.287 2.070 Aluminum alloy Electroless nickel plated Head cover Basic weight 0.015
12 16 20 25 12 mm 16 mm 20 mm 25 mm Nil S 2 pcs. 1 pc.
Mounting Bolt for CQM/Without Auto Switch Model C D Mounting bolt Model C D Mounting bolt Model C D Mounting bolt CQMB12-5 -10 -15 -20 -25 -30 CQMB16-5 -10 -15 -20 -25 -30 CQMB20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CQMB40-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 CQMB50-10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 CQMB25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CQMB32-5 -10 -15 -20 -25
) Series LEHZ Series LEHS Opening/closing stroke 4 6 10 14 22 30 Opening/closing Opening/closing Opening/closing Size Size Size Size stroke 4 6 10 14 stroke 16 (32) 24 (48) 32 (64) 40 (80) stroke 4 6 8 12 10 16 20 25 32 40 10 20 32 40 10 20 32 40 10 16 20 25 CAT.NAS100-77 Controller Step data input type for step motor Step data input type for servo motor Programless type Series LECP1 Series
Applicable bore size C D d H Applicable bore size C D d H 5 12.5 15 26 30 M8 x 1.25 8 M22 x 1.5 26 13 20 20 SOR-20 NT-02 6 16.5 19.6 32 36.9 M10 x 1.25 8 M24 x 1.5 32 17 25/32 25 SOR-25 NT-03 8 21.0 25.4 38 43.9 M14 x 1.5 9 M30 x 1.5 38 22 40 32 SOR-32 NT-04 11 26 31 41 47.3 M18 x 1.5 11 M33 x 2.0 41 27 50 40 SOR-40 NT-05 11 26 31 M18 x 1.5 27 63 NT-05 13 31 37 M22 x 1.5 32 80 NT-08 16 39
0.70 25 or less 47 or less VQ1000 VQ1400 26 or less Metal seal 0.18 0.25 0.72 0.16 0.15 0.68 20 or less 40 or less Exhaust center 77 VQ1401 33 or less Rubber seal 0.25 0.30 1.0 0.16 0.20 0.70 25 or less 47 or less VQ1500 26 or less Metal seal 0.18 0.25 0.72 0.16 0.15 0.70 20 or less 40 or less Pressure center VQ1501 33 or less Rubber seal 0.18 0.42 0.65 0.21 0.20 0.85 25 or less 47 or less
Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 13 13 16 16 20 20 Table (1) Vacuum Entry/Mounting Thread Diameter 25 25 32 32 Mounting thread diameter (Male thread) 40 40 20 to 50 10 to 16 Pad dia.
n (Same surface) 15 + 55 (n 2) 2 (n = 2, 4, 6, 8)*1 25 + 55 (n 2) 2 (n = 2, 4, 6, 8)*1 1 10 25 2 (Different surfaces, same surface) 1 15 20 D-A5 D-A6 n (Same surface) 15 + 55 (n 2) 2 (n = 2, 4, 6, 8)*1 20 + 55 (n 2) 2 (n = 2, 4, 6, 8)*1 2 (Different surfaces, same surface) 20 25 n (Same surface) 20 + 55 (n 2) 2 (n = 2, 4, 6, 8)*1 25 + 55 (n 2) 2 (n = 2, 4, 6, 8)*1 D-A59W 1 15 25 2
) 20, 25 TN NPT 20, 25 TF G MXS 12 13 50 M9N 12 22 50 MXS M9N Number of auto switches Copper, fluorine and silicon-free + low particle generation Nil 2 pcs.