3 Port Solenoid Valve Metal Seal Series VZ200 1

5 Pilot valve assembly How to Order Pilot Valve Assembly SCZ2 G 1 1 Rated voltage Series VZ200 1 100 VAC, 50/60 Hz Pilot pressure exhaust Manual override Electrical entry 2 200 VAC, 50/60 Hz 1 Spacer side exhaust (Type 20) 3 110 VAC, 50/60 Hz Nil Push type (Safety style) G H L LN L plug connector With lead wire 600 mm lead wire 300 mm lead wire 4 220 VAC, 50/60 Hz Grommet B Locking type

3 Position Cylinder Series RZQ

Model RZQ32 RZQ40,50 RZQ63 Applicable floating joint JB40-8-125 Graph 1 JB63-10-150 200 JB80-16-200 63 100 Guide Shock absorber 50 Load weight (kg) 50 40 40 32 30 Floating joint 3 position cylinder 20 10 Maintenance Caution 5 150 100 200 300 1.

Digital Flow Switches

500 10 50 100 200 500 1.1 5.4 11 21 54 10.7 53.5 107 214 535 1.1 5.4 11 21 54 10.7 53.5 107 214 535 1 5 10 20 50 1 5 10 20 50 8 For Air Digital Flow Switch/High Flow Rate Type Series PF2A Refer to www.smcworld.com for details of products compatible with overseas standards.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

210.5 8 170 192 212.5 223 9 190 212 237.5 248 10 210 232 262.5 273 3 70 92 112.5 123 4 90 112 137.5 148 5 110 132 162.5 173 L1 L2 L3 L4 1.12-50 VQZ1000/2000/3000 Base Mounted Manifold Option Blank plate assembly VVQZ1000-10A-5 VVQZ2000-10A-5 VVQZ3000-10A-5 This is used when removing the valve for maintenance, or reserving a valve mounting space on the manifold for future use.

1

/220/230/240/24/48 VAC 12/24 VDC Power consumption W *6 DC 4.5 7 10.5 Apparent power VA *6 AC 7 9.5 12 Coil temperature rise C *7 DC 50 55 65 AC 60 70 70 Allowable voltage fluctuation 10% or less of the rated voltage Allowable leakage voltage DC 2% or less of the rated voltage AC 5% or less of the rated voltage Coil insulation type Class B Weight kg *8 Face seal fitting 0.28 0.41 0.42 0.53

Digital Flow Switches, Series PF2A, Series PF2W

500 10 50 100 200 500 1.1 5.4 11 21 54 10.7 53.5 107 214 535 1.1 5.4 11 21 54 10.7 53.5 107 214 535 1 5 10 20 50 1 5 10 20 50 8 For Air Digital Flow Switch/High Flow Rate Type Series PF2A Refer to www.poweraire.com for details of products compatible with overseas standards.

Series PF2W Digital Flow Switch For Water

Sensor 1 L/min 5 L/min 10 L/min 20 L/min 50 L/min 100 L/min 200 L/min 500 L/min Flow rate range 1 L/min 10 L/min PF2A510 0.5 L/min 10.5 L/min 5 L/min 50 L/min PF2A550 52.5 L/min 2.5 L/min 10 L/min 100 L/min PF2A511 105 L/min 5 L/min 20 L/min 200 L/min 210 L/min 10 L/min PF2A521 50 L/min 500 L/min 525 L/min 25 L/min PF2A551 Sensor Flow rate range Static Electricity

lPSMt

Less Than 0.64 SCFM (18 Nl/min) at 70 psi (5 kgf/cm'?) Supp Output Flow Rate 8.8 SCFM (250 Nl/min)at 70 psi (5 kgf/cm'?)

lPSMt

Less Than 0.64 SCFM (18 Nl/min) at 70 psi (5 kgf/cm'?) Supp Output Flow Rate 8.8 SCFM (250 Nl/min)at 70 psi (5 kgf/cm'?)

Air Suction Filter

Gasket INLET OUTLET 277 ZFA Series Dimensions: ZFA 100 200 Single unit Bracket Cover opened-up dimensions 70 Element extracted dimensions 55 2 x 4.5 2 x Port size Note) The above diagram is for ZFA200. The bracket location shows L side.

MXH

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Up to 300 Up to 100 Up to 500 Up to 100 Up to 300 Up to 500 Maximum speed (mm/s) (2) 50 (7) 100 (5) 50 (4) 100 (8) 200 (9) 100 (11) 50 (10) (1) 200 (12) 200 (6) Load eccentricity (l mm) (3) Selection graph L: Overhang (the distance from the cylinder

240

MXH MXH Vertical Horizontal MXS L1: Load eccentricity MXQ m Mounting orientation m MXQ L H MXF L H MXW Maximum speed (mm/s) Up to 100 Up to 300 x Up to 500 Up to 100 100 b 50 v 200 n 50 m Up to 300 100 , 200 .

Series MXP Precision Air Slide Table

16 16 16 L=120mm L=120mm L=120mm MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.08 0.12 0.06 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.10 Table deflection (mm) Table deflection (mm) Table deflection (mm) 0.06 0.04 0.08 0.04 0.06 0.04 0.02 0.02 0.02 0 0 0 50 200 250 Load (N) 150 100 50 200 250 Load (N) 150 100 100 400 500 Load (N) 300 200 1 N = 0.2248 lbf 165 Series

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

148 41 34 M42 x 1.5 34 1/4, 3/8, 1/2 Optional specifications Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) H J H J M N Q R S T U V W Y 27.8 1021 1021 1021 44 40 69 30 34 47 5.4 15.4 55 2.3 28 28.5 14 6 ARP30(K) 27.8 44 41 70 41 40 44 6.5 8 53 2.3 31 38.5 19 7 ARP40(K) 27.8 44 45 74 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 Note

RSH

RSH80 RSH80 RSH80 200 200 RSH63 RSH63 RSH63 RSH50 RSH50 RSH50 0.9 Operating pressure : P (MPa) 100 100 0.8 0.7 0 0 10 20 30 40 10 20 30 40 Load speed : u (m/min) m=0.1 0.6 Load speed : u (m/min) m=0 0.5 0.4 Graphe Graphr Bore size 20, 32/ m =0 Bore size 20, 32/ m =0.1 0.3 0.2 0.1 80 80 1000 2000 3000 4000 5000 0 32 Lateral load: W (N) 70 70 60 60 50 50 Weight : W (kg) Weight : W (kg) 32 40

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

148 41 34 M42 x 1.5 34 1/4, 3/8, 1/2 Optional specifications Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) H J H J M N Q R S T U V W Y 27.8 1021 1021 1021 44 40 69 30 34 47 5.4 15.4 55 2.3 28 28.5 14 6 ARP30(K) 27.8 44 41 70 41 40 44 6.5 8 53 2.3 31 38.5 19 7 ARP40(K) 27.8 44 45 74 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 Note

EXxx-OMU0020CN

EX245-DX1 . 70 12.3.

LV50-OMQ0002

Approx. 70 g LFE-3-D Tapping screw 3 x 10, 4 pcs. Approx. 70 g -12No.LV50***-OMQ0002-G Summary of Product Parts Body With lead wire and M12 connector (4 pins) Display (Option) Connector Piping port Piping port Bracket (Option) Description Function Connector The part to which lead wires are connected.

Heavy Duty Stopper Cylinder Series RSH/RS1H

80 300 300 1.0 RS1H80 RS1H50 200 200 RS1H63 0.9 Operating pressure P [MPa] 0.8 100 100 0.7 10 20 30 40 10 20 30 40 0 0 0.6 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 0.5 0.4 Graphe Graphr Bore size 20, 32/ = 0 Bore size 20, 32/ = 0.1 0.3 0.2 0.1 80 80 0 5000 1000 2000 3000 4000 Lateral load F [N] 32 70 70 60 60 50 50 32 40 40 30 30 20 20 20 20 10 10 0 0 10 20 30 40 10 20

VCB

107 VCB41 30 50 94 1/2 41 13.5 17 36 25 23 M5 8 26 88 48 78.5 103 78.5 70 111.5 35 60 102 3/4 41 17.5 17 36 30 28.2 M5 8 26 96 48 86.5 103 86.5 70 119 17-2-27