HRX-OM-R026

buzzer sound setting and checking. 5-45 5.20 Alarm customizing function . 5-46 5.20.1 Alarm customizing function . 5-46 5.20.2 Alarm customize function setting and checking . 5-50 5.20.3 Setting of temperature alarm monitoring method and alarm generation timing . 5-62 5.21 Communication function . 5-69 5.21.1 Communication function . 5-69 5.21.2 Communication function setting and checking

VZ100/300/500

Light/Surge voltage suppressor VZ None Nil Z S With light/surge voltage suppressor VS Rated voltage With surge voltage suppressor Not available for GZ, HZ and DOZ 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz VFN Electrical entry 4 Grommet L plug connector M plug connector DIN terminal 5 6 24 VDC 12 VDC MN: Without lead wire D: With connector L: With lead

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) AC servo motor (S6) 200 to 230 VAC 50/60 Hz AC servo motor (S7) AC servo motor (S8) Dimensions (mm) LECSAm 40 135 2 x 6 Mounting hole 2 x 6 Mounting hole 50 (Bearing surface thickness 5) CNP1 CNP1 CNP2 CNP2 130 120 130 120 CN1 CN1 CN3 CN3 CN2 CN2 6 6 5 5 6 5.5 LECSAm-S4 40 6 Mounting hole (Bearing surface thickness 4) 6 135 (170: LECSBm-S8) LECSBm 156 6 6 CN6 CN5 CNP1 CN3 CNP2 161 168 CN1

Plug-in/Plug Lead: Single Unit

(A) 4 (B) 2 Electrical entry 6 1 (P) 5 (R1) 3 (R2) G Coil voltage Lead wire length 0.6 m 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Lead wire length 1.5 m Grommet Body 5: Plug lead sub-plate H Function Nil Y R Standard type (1 W) Low wattage type (0.5 W) External pilot Seal (1) 0 1 Metal seal Rubber seal (2) Note 1) Applicable to

1.63

MGPWM Common Dimensions (mm) A E Standard stroke (mm) Bore size (mm) B C DA DB FA FB G GA GB H J K L 50 st or less Over 50 stroke 50 st or less Over 50 stroke 20 25 32 40 50 63 44.5 47 52 56 60.5 67.5 34 35 37 41 42 49 10 10 14 14 18 18 10 12 16 16 20 20 7.5 9 10 10 12.5 12.5 3 3 5 5 6 6 36 42 48 54 64 78 9.9 10.3 11.4 13.5 14 15.5 7.5 8.7 9 10.5 11.1 13.5 137 157 190 206 258 286 18 21 24

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Clevis Dd9 L m l Knuckle CDP-2A 0.040 0.076 40 10 Polishing ball 10 46 3 38 3 X 18l 4 CDP-3A 0.050 0.093 40, 50, 63 50 12 Polishing ball 12 55.5 3 47.5 3 X 18l 4 CDP-4A 0.050 0.093 63 16 Polishing ball 16 71 4 61 4 X 25l 5 CDP-5A 0.050 0.093 80 18 Polishing ball 18 76.5 4 66.5 4 X 25l 5 CDP-6A 0.065 0.117 80 100 20 Polishing ball 20 83 4 73 4 X 30l 5 CDP-7A 0.065 0.117 100 25 Polishing

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

Clevis Dd9 L m l Knuckle CDP-2A 0.040 0.076 40 10 Polishing ball 10 3 3 X 18l 46 38 4 CDP-3A 0.050 0.093 40, 50, 63 50 12 Polishing ball 12 3 3 X 18l 55.5 47.5 4 0.050 0.093 CDP-4A 63 16 Polishing ball 16 4 4 X 25l 71 61 5 0.050 0.093 CDP-5A 80 18 Polishing ball 18 4 4 X 25l 76.5 66.5 5 0.065 0.117 CDP-6A 80 100 20 Polishing ball 20 4 4 X 30l 83 73 5 0.065 0.117 CDP-7A 100 25 Polishing

MQQ

RB A + Stroke FZ J Double clevis style: MQQLD Bore size (mm) Stroke range (mm) A B CL CD CT CU D10 CU 10 to 40 61.5 90.5 5 84.5 4 10 CD hole H10 Shaft d9 Cap bolt 16 10 to 60 70.5 107.5 8 98.5 5 12 -X 20 10 to 60 79 119 10 109 5 14 25 10 to 50, 75, 100 84.5 126.5 10 116.5 5 14 2028 10 to 50, 75, 100 104 148 10 138 6 14 CX +0.4 +0.2 CT Data CZ 0.1 0.3 CW B + Stroke L Bore size (mm) CW CX CZ

MQQ

RB A + Stroke FZ J Double clevis style: MQQLD Bore size (mm) Stroke range (mm) A B CL CD CT CU D10 CU 10 to 40 61.5 90.5 5 84.5 4 10 CD hole H10 Shaft d9 Cap bolt 16 10 to 60 70.5 107.5 8 98.5 5 12 -X 20 10 to 60 79 119 10 109 5 14 25 10 to 50, 75, 100 84.5 126.5 10 116.5 5 14 2028 10 to 50, 75, 100 104 148 10 138 6 14 CX +0.4 +0.2 CT Data CZ 0.1 0.3 CW B + Stroke L Bore size (mm) CW CX CZ

Fluoropolymer Piping Equipment

Class Class No. 1 1 2 2 2 2 2 2 3 3 3 3 3 3 3 3 3 3 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 6 6 6 6 6 6 1 2 1 2 C 3 4 F 1 2 3 4 5 6 7 E 9 10 1 2 3 4 5 6 F 9 1 2 3 4 5 7 8 9 1 2 3 4 5 6 1/8" A A B C D E F A B C D E F A B C D E F G A B C D E F G H A B C D E F 1 2 2 2 2 2 2 3 3 3 3 3 3 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 6 6 6 6 6 6 1/8" 1/8" 1/8" Branch tee female Run tee male Run tee female 1/4" A A 1/4

Compressed Air Preparation Filter

5 10 +7 6 0 < Cp 5 +10 7 5 < Cp 10 Cw 0.5 8 0.5 < Cw 5 9 5 < Cw 10 x Cp > 10 Cw > 10 > 5 [How to Perform a Test to Check the Performance] ISO 12500, which sets out the test method to be used in order to check the filter performance for each of the three kinds of contaminants, is indicated below.

RHC

9, @0, @2, @3, @4, @5 NBR 32 RHC32-PS @4 O-ring NBR 40 RHC40-PS @5 O-ring Stainless steel for 20, 25 Carbon steel for 32, 40 10-6-10 10 High Power Cylinder Series RHC Construction: 50 to 100 u q !2 i e !0 o w !6 !5 !4 !3 y r t !

Digital Flow Switch (Integrated display type) ( compatible)

n] Reverse output Page 46 [ tn_2] Set value (OUT2) 50% of maximum rated flow [ 50] 50 oC (for all ranges) Page 50 [ tH_2] Hysteresis (OUT2) 0% of maximum rated flow [ 5] 5 oC (for all ranges) Page 47 [ dtH2] Delay time setting at ON [ 0.00] 0.00 s Page 47 [ dtL2] Delay time setting at OFF [ 0.00] 0.00 s Page 47 [ CoL] Display colour (OUT2) [1SoG] ON: Green, OFF: Red (OUT2) Page 50 -32No.PF-OMV0006

ChemicalThermo-con

or less HF: 5% or less HNO3: 5% or less c Hydrofluoric acid and Nitric acid mixture c Nitric acid (except fuming nitric acid) HNO3: 5% or less c Hydrochloric acid HC I: 5% or less 50 to 122F (10 to 50C) Note) HED007 50 to 86F (10 to 30C) p Note 2) Copper sulfate solution H2SO4: 96% or less 50 to 122F (10 to 50C) Note) HED007 50 to 86F (10 to 30C) p Note 2) Sulfuric acid (except fuming sulfuric

Modular F.R.L. Unit

Spacer with Bracket (Z) G Center of F.R.L. body C BB (Y100T, Y200T only) E 1 X-X EE (Y100T, Y200T only) RELEASE X B 2 E X G Seal Y200T Y400T J F A H K Spacer width D Applicable model F 6.8 12 14 18 18 20 G 4.5 5.5 7 9 9 11 H 14 19 21 26 27 31 J 2.8 3.2 4 4 4.6 6.4 K 25 30 41 50 50 70 A 6 3 4 5 5 6 B 82 96 96 120 BB 56 67 C 24.5 29 41 48 48 60 D 40.5 53 68 81.5 86 112 E 20 24 35 40 40 50

e-Rodless Actuator

Load weight Allowable moment E-MY2H/m3 E-MY2H/M3 E-MY2H/M1 E-MY2H/M2 60 50 60 50 60 50 60 50 40 40 30 30 30 30 q r w et 20 20 20 20 Moment (Nm) Moment (Nm) Moment (Nm) Moment (Nm) 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 MY2H16 4 4 3 3 3 3 MY2H16 MY2H16 2 2 2 2 MY2H16 0.2 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300400500 1000 1500 100 200 300400500

SMC Pneumatic Clean Series

Operate with a load ratio of 50% or less. If the load ratio exceeds 50%, this may cause problems such as failure of the lock to release, or damage to the lock unit. Bore size (mm) Stroke (mm) Bolt size Pulling force 5. Do not operate multiple cylinders in synchronization.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

6 11 65 74 6 120 150 7 20 30 100 121 6 14 50 63 70.5 5 5 40 45 4.5 4.5 17.5 17.5 75.5 22 22 11 13 5 5 67 67 66 82 218 218 86 106 82.5 75.5 14 264 95 16 264 95 Other dimensions are the same as basic type.

Clamp Cylinder Series CK1

Pedestal KZZ KL2 KY KS Pedestal 15 80 K 35 45 50 30 95 KL1 5 16 50 KC 15 KX 25 34 KZ 57 Material: Rolled steel Unit: mm K 40 50 KZZ 63 Option symbol Applicable clamp cylinder KC KL1 KL2 KS KX KY KZ Part no.

Air Cylinder

Operating Pressure 8 psi (0.06MPa) 8 psi (0.06MPa) 15 psi (0.1MPa) 40 to 140F (5 to 60C) 40 to 140F (5 to 60C) 40 to 140F (5 to 60C) Ambient and Fluid Temp. 2 to 20in/s 2 to 20in/s 2 to 20in/s Piston Speed (50 to 500mm/s) (50 to 500mm/s) (50 to 500mm/s) Basic , Foot Basic, Foot Basic, Foot Flange Front and Rear Flange Front and Rear Flange Mounting Side Tapped Side Tapped, Clevis Side Tapped