2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

10 20 25 50 100 150 200 300 500 600 1000 2000 3000 6000 12000 PF2M7(-L) 0.001 L/min 0.01 1 0.02 2 0.01 L/min 0.05 5 Dry air N2 Ar CO2 0.1 10 Thermal type (MEMS) 0.3 25 0.1 L/min 0.5 50 1 100 1 L/min 2 200 PFMB 2 200 Thermal type (MEMS) 5 500 Dry air N2 1 L/min PFG300 10 1000 Bypass flow type 20 2000 PFMC(-L) Thermal type (MEMS) 5 500 Dry air N2 1 L/min PFG300 10 1000 Bypass flow type 20

Microspeed Cylinder

, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16, 20 25, 32, 40 50, 63, 80 100 10, 16 20 25, 32 12, 16 20, 25 32, 40 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 20, 25 32, 40 50, 63 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed Rubber bumper

1

6)*1 55 + 35 (n 2) (n = 2, 3, 4, 5) D-M9mA 25 25 40 25 + 35 (n 2) 2 (n = 2, 4, 6)*1 60 + 35 (n 2) (n = 2, 3, 4, 5) D-M9mV 25 25 35 20 + 35 (n 2) 2 (n = 2, 4, 6)*1 35 + 35 (n 2) (n = 2, 3, 4, 5) D-M9mWV D-M9mAV 25 25 35 20 + 35 (n 2) 2 (n = 2, 4, 6)*1 35 + 35 (n 2) (n = 2, 3, 4, 5) *1 When n is an odd number, an even number that is one larger than the odd number is to be used for the

EX120/121/122

5 !6 !7 !8 !

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

C common view) 2 10 38.5 22 (76) 70 11 25 2 12 0 0.05 5 0 0.03 5 0 0.03 4 Open: 37 Closed: 19 2-M5 x 0.8 thread depth 10 (Thread for mounting attachment) 25 25 7 7 10 10 12-5-16 17 2 Finger Rotary Actuated Air Gripper Series MHR2/MDHR2 With auto switch (Built-in magnet): MDHR2-30R 76 73 B 3-M5 x 0.8 thread depth 10 MDHR2-30E Port Location P .C.D.43 (Mounting thread) MHZ 80 MHF 120 MHL MHR

Air Slide Table Series MXP

5, 10 10, 20 10, 20 15, 25 20, 30 Model MXP6-5 MXP6-10 MXP8-10 MXP8-20 MXP10-10 MXP10-20 MXP12-15 MXP12-25 MXP16-20 MXP16-30 Exclusive body is to be used for the one with shock absorber.

Compact Cylinder

Standard Strokes Bore size [mm] Standard stroke [mm] 12, 16 5, 10, 15, 20, 25, 30 20, 25, 32, 40 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 50, 63, 80, 100 10, 15, 20, 25, 30, 35, 40, 45, 50 Intermediate strokes are available as a special order.

VFS

137 167 4 112 142 2 62 92 3 87 117 Formula L1 = 25 x n + 12 L2 = 25 x n + 42 L L1 L2 3-8-24 25 For details about certified products conforming to international standards, visit us at www.smcworld.com. 5 Port Pilot Operated Solenoid Valve Metal Seal, Body Ported Series VFS3000 Model VK Model 1 4/2 (P A/B) 4/2 5/3 (A/B R1/R2) Flow characteristics (1) (2) (3) Max. operating cycle (cpm) Response

SX

Mfg, Co., Ltd. 1.5 m 3 m 5 m AXT100-DS25-015 AXT100-DS25-030 AXT100-DS25-050 Cable 25 cores x 24AWG 21 Brown White Voltage limit VAC, 1 min. 1000 22 Pink Red 23 Gray Red Insulation resistance Mkm, 20C 5 or less For other commercial connectors, use a 25 pins type with female connector conforming to MIL-C-24308. 24 Black White 25 White None The minimum bending radius of D-sub connector cable

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

* ( 4556 (%; H J K L MM ML NN PW Q R S T V W X YY YL Z TA TB U 25 7 -7 7 7 7 7 % ( +, 32 6 = %( ((%<" 5*!'$*' # %! 5 %* ( ( # #*! # (*! * ( ( <> 5 *!( $ %!(*""%!& * (* 6 ? # " %*" !

ITV

Return 0.5 0.4 0.2 0 0 Out 0.2 0.4 0.5 0.6 0.8 0 25 50 75 1 1 2 3 4 1 5 100 Input signal (%F .S.)

LVQ

Body class Metric sizes Inch sizes 4 1/8 3/16 6 1/4 10 3/8 12 19 25 1/2 3/4 8 1 2 3 4 5 6 Note) Refer to page 17-5-82 for information on changing tubing sizes. Specific Product Precautions Be sure to read before handling. Refer to page 17-6-3 for Safety Instructions and 17-5-88 to 17-5-89 for High Purity Chemical Valve Precautions. Piping Caution 1. Connect tubing with special tools.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

5 !6 !7 !

MK

3 25, 25: 2 Qty.

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

0.5 1 5 10 20 50 0.5 1 5 10 20 50 Load (kN) Load (kN) Bore size 80 B rod C rod 2000 6 4 8 3 7 5 1 5 2 4 8 3 7 6 1 2 1000 Stroke (mm) 500 100 50 1 5 10 20 50 1 5 10 20 50 Load (kN) Load (kN) Bore size 100 B rod C rod 4 8 8 3 3 7 7 5 4 5 2000 6 6 1 2 1 2 1000 Stroke (mm) 500 100 50 1 5 10 20 50 100 1 5 10 20 50 100 Load (kN) Load (kN) 28 Series CH2E/CH2F/CH2G/CH2H Technical Data 3 Relationship

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

size 80 5 x 28l SWRM Polished round 18SPCC 113 5 18 123 5 80 clevis type 100 5 x 30l SWRM Polished round 20SPCC 132 7.5 20 147 5 100 clevis type C1 E B 125 5 x 35l SWRM Polished round 22SPCC 154 7.5 22 169 5 125 clevis type A 160 5 x 35l SWRM Polished round 24SPCC 190 7.5 25 205 5 160 clevis type Knuckle bracket Material: Cast iron 3 U (H8) Bore size (mm) Applicable cylinder type Hexagon

7

11 13 37.5 42.5 25 25 49.5 (55) VXD2 3 A 99.5 68.5 47.5 23 ( ): Denotes the Normally Open (N.O.) dimensions.

Cylinder with Lock Series CNG

Load in direction of rod extension Load in direction of rod retraction m 0.3MPa Graph 5 F 0.4MPa Graph 6 m 0.5MPa Graph 7 F 19 Cylinder with Lock Series CNG Model Selection Selection Graphs Graph 5 Graph 2 0.3MPaP<0.4MPa 0.3MPaP<0.4MPa 200 200 100 100 40 30 40 50 30 40 50 32 40 25 Load weight: m (kg) Load weight: m (kg) 20 20 20 32 10 10 25 20 5 4 3 5 4 3 2 2 1 1 0.5 100 500 400 300 200

CLS

through) Applicable bore size (mm) Applicable cotter pin Dd9 L l 5 5 Model 4 x 40l 4 x 40l 4 x 40l 4 x 55l 5 x 65l 125 140 160 180, 200 250 IY-12 IY-14 IY-16 IY-18 IY-25 69.5 79.5 4 Dd9 76.5 86.5 4 84.5 94.5 4 2-d 105 115 4 132 144 5 I Type Single Knuckle Joint Material: Cast iron Applicable bore size (mm) A2 E1 MM NX RR1 U1 A1 L1 NDH10 Model I-12 I-14 I-16 I-18 I-20 I-25 125 140 160 180

Low Profile Guide Type

5 !7 !8 @8 i o !0 @3 @2 y u #5 y $5 CY1F15 Detailed view of driving cylinder CY1F25 Detailed view of driving cylinder @7 Section A-A Component Parts Note Material No. Description Note 25 26 27 28 Material No.