3 Port Solenoid Valve

for side ported 17.1 1 2b 2b 2b 2b 2b 1.2 40 3 2a 2a 2a 2a 2a 12 14 11.8 18.7 1 2b 2b 2b 2b 2b 40 L2 3 2a 2a 2a 2a 2a L3 One-touch fitting [1(P), 3(E) port] Bracket for bottom ported 11.4 5.7 Applicable tubing O.D: 4 6 5/32" 1/4" L1 (8.9) If the fittings are mounted on side.

Prevents Micro-Bubbles

129 84 26 154 68 27.5 8 56 71 6.5 62 58 75 138 84 32 165 77 27.5 8 56 71 6.5 71 17-5-11 9 Series LVC Dimensions With flow rate adjustment With by-pass (Max.

Filter Regulator

-47- Revision history 40-06,60 size added,Corrected.

Air Cylinder

Operating Pressure 8 psi (0.06MPa) 8 psi (0.06MPa) 15 psi (0.1MPa) 40 to 140F (5 to 60C) 40 to 140F (5 to 60C) 40 to 140F (5 to 60C) Ambient and Fluid Temp. 2 to 20in/s 2 to 20in/s 2 to 20in/s Piston Speed (50 to 500mm/s) (50 to 500mm/s) (50 to 500mm/s) Basic , Foot Basic, Foot Basic, Foot Flange Front and Rear Flange Front and Rear Flange Mounting Side Tapped Side Tapped, Clevis Side Tapped

XLAQ/XLDQ

55 75 F 17 26 41 52 G 40 39 63 68 H 87 91 129 142 J XLAQ-16 XLAQ-25 XLAQ-40 XLAQ-50 40 50 65 70 Note) The heater (Option) is not available with XLAQ-16. 471 Aluminum One-touch Connection and Release High Vacuum Angle Valve 2-step Control, Single Acting/Bellows Seal, O-ring Seal XLDQ Series How to Order XLDQ M9N A 40 q w e r t y w Actuator port direction q Flange size Rear flange surface

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

85.5 16 177.5 190.5 212.5 223 17 188 201 225 235.5 18 198.5 211.5 237.5 248 19 209 222 250 260.5 20 219.5 232.5 262.5 273 7 83 96 125 135.5 8 93.5 106.5 137.5 148 9 104 117 137.5 148 10 114.5 127.5 150 160.5 11 125 138 162.5 173 12 135.5 148.5 175 185.5 13 146 159 187.5 198 14 156.5 169.5 200 210.5 15 167 180 200 210.5 3 41 54 75 85.5 5 62 75 100 110.5 6 72.5 85.5 112.5 123 4 51.5 64.5 87.5

Series CQ2

50 75 100 125 150 175 200 250 300 Reed switches: D-Z7, Z8 Solid state switches: D-Y5, Y6, Y7 Female threads Male threads 180 Single rod Double acting CQ2 200 Double rod New 180 and 200 Compact cylinder variations A wide range of 15 sizes from 12 to 200 Bore size (mm) Compact cylinder series 12 16 20 25 32 40 50 63 80 100 125 140 160 180 200 CQ2 Large bore CQ2 CQS Refer to N320 "CQ2" and

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

(Default settings) Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Response Time Response time (ms) (at the pressure of 0.5 MPa) Actuation type 10-SV2000 25 or less 17 or less 29 or less 33 or less 10-SV3000 28 or less 26 or less 32 or less 10-SV4000 40 or less 40 or less 82 or less 10-SV1000 11 or less 10 or less 18 or less

/

N.O. 2-port 7 MPa 59 14 19 63 19 61 3 MPa 7 MPa 3 MPa 7 MPa 52 59 52 59 71 56 59 56 59 71 79 55 17 14 17 14 7 7 14 7 14 7 9 9 22 19 22 19 12 12 19 12 19 12 15 15 56 63 56 63 75 60 63 60 63 75 83 59 22 19 22 19 12 12 19 12 19 12 15 15 54 61 54 61 73 58 61 58 61 73 81 57 SGH200 3-port 3-port dual pressure type N.C.

Stability of suction position,

0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-50UM ZP3E-125UM 4 8 Displacement [mm] Displacement [mm] 3 6 2 4 N, S, U, F, CL N, S, U, F, CL 1 2 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-63UM 6 Displacement [mm] 4 N, S, U, F, CL 2 0 0 10 20 30 40 50 60 70 80 Vacuum pressure

0.4

Bore size Series MB, CA2 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQ1101 Port size: 6 one-touch fitting 800 700 600 500

Modular Type Air Filters Series AF

40 20 30 27 22 5.4 8.4 40 2.3 28 115 1/4, 3/8 53 129 14 26.5 30 50 26.5 41 40 23 6.5 8 53 2.3 30 170 AF 70 165 18 35 38 75 35 50 54 26 8.5 10.5 70 2.3 35 204 1/4, 3/8, 1/2 75 169 20 35 38 75 35 50 54 25 8.5 10.5 70 2.3 34 208 3/4 AR 90 245 24 45 20 45 70 66 35 11 13 90 3.2 47 284 3/4, 1 95 258 24 47.5 20 47.5 70 66 35 11 13 90 3.2 47 297 1 AL Semi-standard specifications AW With barb

Vacuum Ejector Series ZM

Exhaust Characteristics Flow Characteristics 90 90 135 80 120 80 Vacuum pressure ZA Suction flow rate l/min (ANR) Air consumption l/min (ANR) Vacuum pressure (kPa) Vacuum pressure (kPa) 70 105 70 Air consumption ZX 60 90 60 50 75 50 ZR Suction flow rate 40 60 40 ZM 30 30 45 ZMA 20 20 30 10 10 15 ZQ 0 0 0 0.0 0.6 0.5 0.4 0.3 0.2 0.1 0 70 50 60 30 40 20 10 ZH Flow rate l/min (ANR) Supply pressure

Modular Type Regulators Series AR

Information SMC Corporation of America 10100 SMC Boulevard Noblesville, IN 46060 Epoxy Coated F.R.L.Units www.smcusa.com AC21/31/41-***-*-X2217 AF20/30/40-***-*-X480 AR20/30/40-***-*-X48 AL20/30/40-***-*-X480 AW20/30/40-***-*-X48 VHS20/30/40-***-*-X513 Y20/30/40*-T4 Application: Air preparation in an environment that requires enhanced corrosion protection.

V

ZPX Buffer Stroke Pad 40 50 63 80 100 125 25 50 75 100 Courtesy of Steven Engineering, Inc. !

C92

45 60 12,5 12 15 16 20,5 20,5 20 20 130 145 155 170 190 205 245 280 7 9 9 9 12 14 16 18 10 12 12 16 16 20 25 30 65 75 80 90 110 140 164 204 15 18 18 23 23 28 30 35 142 160 170 190 210 230 275 315 45 52 60 70 90 110 130 170 26 28 32 40 50 60 70 90 26 28 32 40 50 60 69,5 89,5 9 12 12 16 16 20 25 30 32 36 45 50 63 75 90 115 10 11 12 13 15 18 15 20 3,2 3,2 3,2 3,2 4,5 6 9 11 144 163 175 190

CH

Standard Strokes Bore size (mm) 20 32 40 50 63 80 100 Standard strokes (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic Fluid Compatibility 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic fluid Compatibility

Floating Joint

160 13 17 17 22 22 22 27 27 32 41 41 41 55 7 8 8 11 11 11 13.5 13.5 16 20 20 20 24 6.6 6.6 6.6 9 9 9 9 9 11 11 11 18 22 6 6 6 9 9 9 12 12 16 19 19 21 29 21 24 24 31 31 31 41 41 50 59.5 59.5 66 96 36 40 40 52 52 52 45 45 55 65 65 72 100 48 52 52 70 70 70 19 25 25 32 32 32 65 65 75 90 90 100 150 0.08 0.12 0.12 0.28 0.28 0.28 0.63 0.63 1.15 2.07 2.07 2.8 9 1100 2500 2500 4400 4400 4400 11000

Air Fittings & Tubing

Burst pressure Min. bending radius (mm) 100 15 20 30 60 75 75 60 48 36 24 25 13 20 to +60C (Water: 0 to 40 C) (No freezing) Operating temp. Nylon 12 Material Precautions How to Order Be sure to read before handling.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

Bore size 25 32 40 25 mm 32 mm 40 mm Number of auto switches Nil S n 2 pcs. 1 pc. n pcs. Port thread type Bore size Symbol Nil TN TF Type Rc NPT G 25, 32, 40 Auto switch Nil Without auto switch (Built-in magnet) Refer to the table below for the applicable auto switch model.