ATX-OM-F003E

60 120 150 4.5 12 1 1/2 3/4 3/4 359 371 HAW37-14 1354 893 258 80 1056 170 216 315 264 219 234 305 100 140 66 140 139 6.0 18 1 1/2 3/4 1 380 431 HAW55-20 1612 1038 366 150 1203 276 216 315 264 219 234 305 100 140 66 140 139 6.0 18 2 3/4 1 375 426 HAW75-20 2112 1538 366 150 1703 276 216 315 264 219 234 305 100 140 66 140 139 6.0 18 2 3/4 1 375 426 HAW110-30 1724 950 500 72 1210 365 267 303

Hydraulic Filters

15 M12 x 35 130 410 90.0 8.0 102.6 14.0 224 155 280 364.5 84.5 150 15 M16 x 40 166 490 115.4 13.5 501

HAW

139 139 139 195 120 140 140 140 60 60 60 66 66 66 70 60 60 90 100 100 100 200 120 140 140 140 220 193 193 238 289 289 289 357 182 182 215 242 242 242 317 159 159 215 219 219 219 270 480 704 1056 1203 1703 1210 159 159 245 264 264 264 130 130 165 216 216 216 35 35 37 80 150 150 72 190 390 575 893 1038 1538 950 35 35 138 170 276 276 365 203 203 266 324 324 324 473 83 83 212 258 366

Series HAW Water Cooled Aftercooler 1

139 139 139 195 60 60 60 66 66 66 70 120 140 140 140 120 140 140 140 220 60 60 90 100 100 100 200 193 193 238 289 289 289 357 293 293 326 354 354 354 428 159 159 215 219 219 219 159 159 245 264 264 264 203 203 266 324 324 324 473 130 130 165 216 216 216 267.3 35 35 138 170 276 276 365 270 480 704 1056 1203 1703 1210 35 35 37 80 150 150 72 395 83 83 212 258 366 366 500 190 390 575 893

Compact Proportional Solenoid Valve Series PVQ

) 24 VDC 12 VDC SRP PVQ30 (2.3) SRF 120 ARX20 P = 0.35 MPa 100 P = 0.25 MPa VCHR Flow rate (l/min) 80 P = 0.18 MPa ITV 60 P = 0.1 MPa 40 IC 20 PVQ 0 0 0 20 40 40 80 60 120 80 160 100 200 120 240 140 280 160 320 180 360 200 400 Current (mA) 24 VDC 12 VDC VEF VEP VER PVQ30 (4.0) VEA 120 100 P = 0.12 MPa VY2 Flow rate (l/min) P = 0.08 MPa 80 VBA VBAT P = 0.06 MPa 60 AP100 40 P = 0.04 MPa

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Symbol Thread type R Rc N NPT F G DIN terminal with light (With surge voltage suppressor) V V V All voltages DZ DIN terminal without connector (With surge voltage suppressor) V V V All voltages o Option u Rated voltage AC DN DC Symbol Option Nil None Symbol Rated voltage 5 24 VDC 6 12 VDC Symbol Rated voltage Symbol Rated voltage 1 100 VAC 7 240 VAC 2 200 VAC 8 48 VAC 3 120 (110) VAC B 24

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

122.2 <124.2> 100 22.6 100 120 80 25 75 50 n 1 0 8 6 4 2 50 67.5 <69.5> L1 8 67.5 <69.5> 64.9 L2 4 x 9 (for M8 mounting) 3 port valve 2 port valve 64.9 50 8 10.5 Leakage detection port Pilot port C4: 4 One-touch fitting C6: 6 One-touch fitting G1/4 (RETURN port) G1/4 (IN port) 30 31 0.5 to 2 0.5 to 2 10 10 0.5 to 2 0.5 to 2 n-1 5 3 1 1 2 122.2 <124.2> 142.2 <144.2> 22.6 100 120 80 25 75

SFOD-OMT0009CN

120 [mm/s] 5 5 5 5 5 5 () [mm/s] 8 8 8 9 9 9 () 110 No.SFOD-OMT0009CN-B LEHF10 LEHF20 LEHF32 LEHF40 K [mm] 40/15 50/15 70/16 70/16 (2.667) (3.333) (4.375) (4.375) [mm/s] 80 100 100 100 [mm/s] 5 5 5 5 () [mm/s] 7 8 8 8 () LEHS10 LEHS20 LEHS32 LEHS40 K [mm] 255/76 235/56 235/40 235/40 (3.355) (4.196) (5.875) (5.875) [mm/s] 70 80 100 120 [mm/s] 5 5 5 5 () [mm/s] 8 8 9 9 () 111 No.SFOD-OMT0009CN-B

SFOD-OMT0010

) Model LEHS10 LEHS20 LEHS32 LEHS40 Lead symbol K Lead [mm] 255/76 235/56 235/40 235/40 (3.355) (4.196) (5.875) (5.875) Max. speed [mm/s] 70 80 100 120 Min. speed [mm/s] 5 5 5 5 (Independent and interpolation) Min. speed [mm/s] 8 8 9 9 (Speed tuning control) 113 No.SFOD-OMT0010-B Revision history No.

IR1000/2000/3000

250 150 Flow rate l/min (ANR) Relief flow rate l/min (ANR) Supply pressure P1 MPa IR1010-01 IR1010-01 IR1010-01 Conditions: Supply pressure 0.7MPa Conditions: Back pressure 0.7MPa 0.4 0.204 0.7 Set pressure P2 MPa 0.6 Set pressure MPa Set pressure MPa 0.202 0.3 0.5 Setting point 0.4 0.200 0.2 0.3 0.198 0.2 0.1 0.1 0.196 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 0 50 100 150 200 250 300 350 1.0

Compact Cylinder/Guide Rod Type Series CQM

Operating pressure: 0.5 MPa Lateral load 100 100.0 Eccentric distance Stroke 80 63 50 Load mass (kg) 10.0 40 100 32 25 20 100 Plate allowable lateral load (N) 80 1.0 63 16 12 50 0.1 40 50 100 200 300 500 32 Maximum piston speed (mm/s) 10 20, 25 12, 16 0 10 20 30 40 50 60 70 80 90 100 110 120 Stroke + Eccentric distance (mm) 794 Compact Cylinder: Guide Rod Type Series CQM Construction 12 to

New

Z Dimensions (mm) Model A B C E H I X Y Z J K L S 250 250 250 30 30 30 VXF25B< VXF26B< VXF27B< VXF28B< 182 206 206 206 18.3 34 34 34 90 100 110 120 78.4 78.4 78.4 78.4 118 121 121 121 59.8 59.8 59.8 59.8 47 50 50 50 24 24 24 24 18.6 18.6 18.6 18.6 30 30 30 30 17 17 17 17 Grommet Grommet (with surge voltage suppressor) DIN terminal Model Q R U Q R U 27 27 27 27 R U T 64.5 64.5 64.5 64.5

VNC

20 24 24 134 146 162.5 135 140 155 210.5 226 250 130 150 180 Flange Type Port size: 65F, 80F Electrical entry hole: G1/2 Manual override (Non-locking) 4 x 2-18 mouting hole (80F: 8 x 2-18) Model Applicable flange 65 80 H F E D C B A 1 4 1 4 405.5 441.5 VNC81 -65F VNC91 -80F 65 80 140 150 204 235 175 185 305.5 341.5 210 240 17-4-26 7 Series VNC Coolant Valve: Air Operated/External Pilot Solenoid

Low Profile Slide Table Series MXF

(N) Load (N) Load (N) MXF20 MTS Lr = 50 mm 0.10 0.06 0.28 Table displacement amount (mm) Table displacement amount (mm) MXF20-100 MXF20-100 Table displacement amount (mm) 0.24 0.08 MXF20-100 MXF20-75 MXF20-50 MXF20-30 MXF2075 0.20 0.06 0.04 0.16 MXF2050 MXF2075 0.12 MXF2030 0.04 0.02 MXF2050 0.08 MXF2030 0.02 0.04 50 100 150 40 80 120 240 200 160 200 50 100 150 200 0 0 0 Load (N) Load (N

5 Port Solenoid Valve SY Series

fluid temperature (C) 2 Position single, Double 3 position Max. operating frequency (Hz) 10 3 5 3 5 3 5 3 Non-locking push type, Push-turn locking slotted type, Push-turn locking lever type Manual override (Manual operation) Pilot exhaust method Lubrication Mounting orientation Impact/Vibration resistance (m/s2) Note) Common exhaust type for main and pilot valve Not required Unrestricted 150

MXF

60 0 40 80 100 20 20Load (N) Load (N) Load (N) Data MXF20 Lr = 50 mm 0.10 0.10 0.28 MXF20-100 MXF20-100 Table displacement amount (mm) Table displacement amount (mm) 0.24 Table displacement amount (mm) 0.08 0.08 MXF20-75 0.20 0.06 0.06 0.16 MXF20-50 MXF20-75 MXF20-100 MXF20-75 MXF20-50 MXF20-30 0.12 MXF20-30 0.04 0.04 MXF20-50 0.08 MXF20-30 0.02 0.02 0.04 0 0 0 50 100 150 40 80 120 240 200

Vacuum

Pad size slo-650: Std. 1omm: ODtional see Daoe 120 Spring lorce (ksr) 0.08 o.12 0.1 0.3 0.2 0.5 How to Ordel ZPY Pad dia.

Vacuum

Pad size slo-650: Std. 1omm: ODtional see Daoe 120 Spring lorce (ksr) 0.08 o.12 0.1 0.3 0.2 0.5 How to Ordel ZPY Pad dia.

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

Description Decimal Common Format "Data-INT" "Data-SINT" Input 100 100 Output 150 150 Configuration 105 105 (5) Size: Perform setting as shown below. Description Decimal Common Format "Data-INT" "Data-SINT" Input MIN. 1 word MIN. 2 byte MAX.110 words MAX.220 byte Output MIN. 1 word MIN. 2 byte MAX.110 words MAX.220 byte When configuration assembly fundtion is not used: Set to "0".

EXxx-OMY0004

Value range: 1 10, in 1 ms increments Unit: ms F_WD_Time 150 Safety integrity (SIL according to IEC61508) of the module. Safety functions up to SIL 3 can be achieved with the module. The safety integrity level that can actually be achieved depends on the parameterization, the structure of the sensor, and the cable installation: See Section 8.2 Parameterisation.