Table of Contents

M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard 100 200 205 300 400 Applicable tubing O.D.

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

17.7 17.8 17.9 18.0 19.5 19.7 19.8 19.9 20.0 24.5 24.7 24.8 24.9 25.0 Symbol 175 177 178 179 180 195 197 198 199 200 245 247 248 249 250 For 30 29.5 29.7 29.8 29.9 30.0 295 297 298 299 300 Guide pin diameter 1268 Pin Clamp Cylinder Series CKQ D/CLKQ D G P G P Table 2.

Electric Actuator

Note 3) [mm/s] Actuator specifications Electric 901 to 1000 390 190 600 300 range AC Servo Motor Specific Product 1001 to 1100 320 160 500 250 1101 to 1200 270 130 420 210 1201 to 1300 360 180 1301 to 1400 310 150 1401 to 1500 270 130 Max. acceleration/deceleration [mm/s2] 20 (Refer to page 4 for limit according to work load and duty ratio.) o0.02 Positioning repeatability [mm] Note

MLGC

Cutout window View A-A' Mounting Standard Stroke GK BP A AA AB AG AH AI AJ AK AL AM AN AO AP B BZ GC GD Bore size (mm) 20 25 32 40 Stroke range (mm) 92 3.5 9 9 75, 100, 125, 150, 200 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 94 73.5 11 13 75 32 28 54 134 150 108 140 M 8 135 110 4 9 9 104 86.5 15 16 88 37 29 62 160 176 125 165 M 8 160 75, 100, 125, 150, 200, 250, 300 110 4 9 9 104 86.5 15 16 88 37 30 62

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

, 175, 200, 250, 300, 350, 400, 450, 500 C95 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CA1 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CS1 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 100 25, 50, 75, 100, 125, 150, 175, 200

MLGC

Cutout window View A-A' Mounting Standard Stroke GK BP AG AB A AA AN B GD AH AI AJ AK AL AM AO AP BZ GC Bore size (mm) 20 25 32 40 Stroke range (mm) 92 3.5 9 9 75, 100, 125, 150, 200 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 94 73.5 13 11 54 75 32 28 134 150 108 140 M 8 135 110 4 9 9 104 86.5 16 15 62 88 37 29 160 176 125 165 M 8 160 75, 100, 125, 150, 200, 250, 300 110 4 9 9 104 86.5 16 15 62 88 37 30

Booster Regulator/Air Tank

) (When high-noise reduction silencer installed: 179) VBA40A-04 404 40 Pressure gauge (Option) 43 IN side gauge port Rc 1/8 OUT side gauge port Rc 1/8 IN port Rc 1/2 215 62.8 62 8 Silencer (Option) OUT port Rc 1/2 22 32 130 EXH port Rc 1/2 3.2 96 4 x 12 150 116 (When silencer installed: 224) (When high-noise reduction silencer installed: 230) 10 Series VBA Dimensions VBA22A-03 300 28 39 Pressure

VDW

Series 2 3 200 Nil Option 300 None F Foot bracket C.O. Valve type Note) The foot bracket is packed with a valve.

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01 AS2201F -02-08 AS2200-02 100 200 50 100 0 0 SV100 ANA1 -C08 T0604 SV200 ANA1 -C10 T0806 200 CM2 32 400 MB 50 300 150 Stroke (mm) Stroke (mm) AS2201F -01-06 AS2200-01 AS3201F -02-08 AS3000-02 200 100 100 50 0 0 200 CM2 40 400 MB 63 150 300 Stroke (mm) Stroke (mm) AS2201F -02-06 AS2200-02 100 AS4000-03 200 50 100 0 0 Solenoid valve Silencer Tubing Speed controller Solenoid valve Silencer

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

Output current: 4 to 20 mA (within rated pressure range (Differential pressure)), 2.4 to 4 mA (within extension analog output range) Maximum load impedance: 300 (at 12 VDC), 600 (at 24 VDC), Minimum load impedance: 50 Linearity: 0.2% F .S.

5 Port Solenoid Valve Series SV

-01-06 AS2200-01 100 50 0 ANA1 -C08 T0604 200 CM2 32 150 Stroke mm AS2201F -01-06 AS2200-01 100 50 0 200 CM2 40 150 Stroke mm AS2201F -02-06 AS2200-02 100 50 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details regarding different conditions, make determinations after using the P/A

5 Port Air Operated Valve Series SYA3000/5000/7000 1

Not required Lubrication Mounting orientation Free Impact/Vibration resistance (m/s2) Note) 300/50 Note) Impact resistance: No malfunction from test using drop impact tester, to axis and right angle directions of main valve, each one time when pilot signal is ON and OFF .

How to Order MB Series ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Air Cylinder: Standard Type Double Acting, Single Rod

400, 450, 500 CA2 Up to 1800 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 -XC4 With heavy duty scraper -XC5 Heat resistant cylinder (10 to 110C) -XC6 Made of stainless steel*3 *4 Up to 2700 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CS1 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 -XC7 Tie-rod

Air Cylinder: Single Rod Series MB ø32, ø40, ø50, ø63, ø80, ø100, ø125

CS1 32 700 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 40 800 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 CS2 50 1000 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 Symbol Specifications -XA 63 1000 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 Change of rod end shape -XB5 Oversized rod cylinder 80

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

150 100 50 200 250 Load (N) 150 100 100 400 500 Load (N) 300 200 8-8-10 10 Precision Air Slide Table Series MXP Table Accuracy Traveling parallelism C C side parallelism to A side D M D side parallelism to B side B W A Port C MX M MTS B Distance from 0 of gauge dial when guide block is moved to full stroke after body is fixed on a base.

Compact manifold regulator ARM5 Series

0 0 50 100 150 200 SRF Flow rate L/min (ANR) Flow rate L/min (ANR) ITV ARM5BA-308-1 (One-touch fittings: IN/OUT 6) Condition: Inlet pressure 0.5 MPa ARM5BA-308 (One-touch fittings: IN/OUT 6) Condition: Inlet pressure 0.7 MPa 0.7 0.35 IC 0.6 0.30 Outlet pressure (MPa) Outlet pressure (MPa) ITVH 0.5 0.25 0.4 0.20 ITVX 0.3 0.15 PVQ 0.2 0.10 0.1 VY1 0.05 0 0 50 100 200 250 150 300 0 0 50 100

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

310.5 17 251 268.5 300 310.5 16 239.5 257 287.5 298 15 228 245.5 275 285.5 14 216.5 234 262.5 273 13 205 222.5 250 260.5 12 193.5 211 237.5 248 11 182 199.5 225 235.5 10 170.5 188 212.5 223 9 159 176.5 200 210.5 8 147.5 165 187.5 198 7 136 153.5 175 185.5 6 124.5 142 162.5 173 5 113 130.5 150 160.5 4 101.5 119 150 160.5 3 90 107.5 137.5 148 2 78.5 96 125 135.5 1 67 84.5 112.5 123 L1 L2 L3

Air Slide Table Series MXP

150 100 50 200 250 Load (N) 150 100 100 400 500 Load (N) 300 200 196 Air Slide Table Series MXP Table Accuracy Non-rotating accuracy C Traveling parallelism Surface C to surface A Radial clearance D M Surface D to surface B B W Radial clearance A Port C Fixed body MXH MXPJ6 MXP10 MXP12 MXP16 MXP6 MXP8 Model M MXU Radial clearance (m) 0 to 2 0 to 2 0 to 3 0 to 3 0 to 5 0 to 7 The amount of

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12

Symbol Specifications X7 PTFE grease Standard Stroke (mm) X9 Grease for food X11 Adjusting bolt, long specification (Adjustment range: 15 mm) X12 Adjusting bolt, long specification (Adjustment range: 25 mm) Standard stroke 50, 100, 150, 200 50, 100, 150, 200, 250, 300 50, 100, 150, 200, 250, 300, 350, 400 Model MXY6 MXY8 MXY12 Model MXY6 MXY8 MXY12 Magnetic holding force 19 34 77 X39 Fluororubber

Series CQ2

8.63 9.20 300 180 200 180 200 3.73 4.20 5.17 5.74 Single rod Mounting (for Double Rod End) Caution Double rod 1.