Compact and Lightweight

100 25 100 100 Vacuum pressure Vacuum pressure Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] 20 80 80 20 80 80 Vacuum pressure [kPa] Vacuum pressure [kPa] Vacuum pressure [kPa] Vacuum pressure [kPa] Air consumption 15 60 60 15 60 60 Suction flow rate Air consumption 10 40 40 10 40 40 Suction flow rate 5 20 20 5

MXS Series Air Slide Table

-50 MXS12-40 MXS12-30 0.010 0.01 MXS12-20 MXS12-10 0.02 0.005 20 40 60 80 100 120 0 0 0 20 40 60 80 100 120 60 20 40 80 100 120 Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf 49 MXS Series Air Slide Table Table Deflection Table deflection by pitch moment Table deflection by yaw moment Table deflection by roll moment Table pitch deflection due to static pitch moment

Vacuum Unit

Exhaust Characteristics Flow Rate Characteristics 150 100 100 Vacuum pressure [kPa] 80 Suction flow (Port exhaust) 135 90 60 Air consumption 120 80 40 Vacuum pressure 70 105 Port exhaust 20 Vacuum pressure [kPa] Silencer exhaust/Complex exhaust 0 0 20 40 60 80 100 60 90 Suction flow [L/min (ANR)] 50 75 Flow Rate Characteristics 60 40 100 Suction flow (High-noise reduction silencer exhaust

energy saving effect

[MPa] Circulating fluid pressure [MPa] Usable flow rate range Usable flow rate range 0.5 0.5 50 HECR 50 0.43 0.45 Outlet Pump head [m] Pump head [m] Outlet 0.4 0.4 40 40 HEC 0.3 30 0.3 30 HEB 0.2 20 0.2 20 HED Return port 0.1 10 0.1 10 Return port 0 0 0 0 HEA 45 40 50 0 10 20 30 60 70 80 90 100 110 120 Circulating fluid flow rate [L/min] 45 0 20 10 40 30 50 60 70 80 90 100 110 120 130 Circulating

CNA

DL DD DA DU DC DX DE DO DR DT DS DH DF B W1 Z +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 CA1-B04 CA1-B05 CA1-B06 CA1-B08 CA1-B10 57 35 11 65 15 85 10 9 17 8 40 52 60 10 234 10 12 57 35 11 65 18 85 10 9 17 8 40 52 70 10 261 12 60 162 16 67 40 13.5 80 25 105 12.5 11 22 10 50 66 85 10 280 80 100 93 60 16.5 100 31.5 130 15 13.5 24 12 65 90 102 12 337 20 93 60 16.5 100 35.5 130 15 13.5 24 12

7

W) Note 1) Power consumption (W) Note 1) VXD23 to 25 VXD26, 27 VXD28, 29 VXD2A to 2C VXD2D, 2E VXD2F, 2G 9 100 9 100 12 100 12 100 15 100 15 100 Note 1) Power consumption: The value at ambient temperature of 20C and when the rated voltage is applied.

10

Temperature rise F [C] Note 2) Size Size Size 1 Size 1 9 212 [100] 9 212 [100] Size 2 Size 2 12 212 [100] 12 212 [100] Size 3 Size 3 15 212 [100] 15 212 [100] Note 1) Power consumption: The value at ambient temperature of 68F (20C) and when the rated voltage is applied.

MY2

Load weight Allowable moment MY2H/m3 MY2H/M3 MY2H/M1 MY2H/M2 60 50 60 50 60 50 60 50 40 40 30 30 30 30 20 20 20 20 Load weight kg Moment Nm Moment Nm Moment Nm MY2H40 MY2H40 MY2H40 MY2H40 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 4 4 3 3 3 3 MY2H16 2 2 2 2 0.2 MY2H16 MY2H16 MY2H16 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300 400500 1000 1500 100

0.

Coil voltage 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC [115 VAC] (50/60 Hz) 220 VAC [230 VAC] (50/60 Hz) 24 VDC 12 VDC 8 Series VQZ100/200/300 Made to Order (For details, refer to page 34.)

Mechanically Jointed Rodless Cylinder Series MY2

MY2H16 1 1 1 100 200 300 400500 1000 1500 100 200 300 400500 1000 1500 100 200 300 400500 1000 1500 Piston speed mm/s Piston speed mm/s Piston speed mm/s Load Mass/MY2H (Single axis) MY2H/m1 MY2H/m2 MY2H/m3 60 50 60 60 50 50 30 30 30 20 20 20 Load mass kg Load mass kg Load mass kg MY2H40 MY2H40 MY2H40 10 10 10 MY2H25 MY2H25 MY2H25 5 5 5 4 4 4 3 3 3 MY2H16 MY2H16 MY2H16 2 2 2 1 100 200 300

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Load Weight Allowable Moment MY2H/m3 MY2H/M3 MY2H/M1 MY2H/M2 60 50 60 50 60 50 60 50 40 40 30 30 30 30 20 20 20 20 Load weight kg Moment Nm Moment Nm Moment Nm MY2H40 MY2H40 MY2H40 MY2H40 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 4 4 3 3 3 3 MY2H16 2 2 2 2 0.2 MY2H16 MY2H16 MY2H16 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300 400500 1000 1500 100

Cylinder with Lock

Bore size (mm) 40 50 63 80 100 TL TA TC TDH10 (hole) TE TF TH TO TR TS TT TU TX TY Z Part no. +0.070 0 80 102 119 60 45 60 17 9 12 17 10 85 62 162 15 CA2-S04 +0.070 0 80 112 129 60 45 60 17 9 12 17 10 95 74 181 15 CA2-S06 +0.070 0 100 130 150 73 55 70 20 11 14 22 15 110 90 191 18 +0.084 0 120 166 192 100 75 90 26 13.5 17 24 15 140 110 231 25 MB-S10 +0.084 0 120 188 214 100 75 90 26 13.5 17

Stability of suction position,

0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-50UM ZP3E-125UM 4 8 Displacement [mm] Displacement [mm] 3 6 2 4 N, S, U, F, CL N, S, U, F, CL 1 2 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-63UM 6 Displacement [mm] 4 N, S, U, F, CL 2 0 0 10 20 30 40 50 60 70 80 Vacuum pressure

CM2

101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 68 81 93 106 131 156 17 36 20 62 9 10 40 40 25 60 112 122 72 85 97 110 135 160 185 17 36 25 64 9 10 40 40 32 60 114 124 72 85 97 110 135 160 185 17 36 32 88 10 11 53 53 40 77 143.5 154 77 90 102 115 140 165 190 19 46 40 With rod boot (mm) ZZ Symbol Z l Stroke 1 to 50 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 1 to 50 51 to 100

60

Rated voltage Note) 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 240 VAC 50/60 Hz 48 VAC 50/60 Hz 230 VAC 50/60 Hz Rated voltage Note) Coil insulation type Note) 1 2 3 4 5 6 7 8 J 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC Nil H Class B Class H DIN terminal and DC spec. are not available.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

Igm: Leakage current of the servo motor (Found from table 11.2.) 120 Leakage current [mA] 100 80 60 40 20 0 2 5.5 14 38100 3.5 8 22 60150 30 80 Cable size [mm ] 2 Fig. 11.7 Example of leakage current per km (lg1, lg2) for CV cable run in metal conduit 11 30 11.

CG1

TU TZ TX TY TV TW 8d9 10d9 12d9 14d9 16d9 18d9 18d9 22d9 CG-020-24A CG-025-24A CG-032-24A CG-040-24A CG-050-24A CG-063-24A CG-080-24A CG-100-24A 20 25 32 40 50 63 80 100 38.3 42.1 53.8 64.6 79.2 97.2 110 130 42 42 48 56 64 74 72 93 16 20 22 30 36 46 85 100 28 28 28 30 36 46 45 60 18.1 20.7 23.6 27.3 29.7 34.3 35.8 39.8 49.4 58.4 72.4 90.4 (mm) Part No.

VZ100/300/500

(V) 24, 6, 12, 48 15 to +10% of rated voltage 1.8 (With indicator light 2.1) [24 VDC: 75 (With indicator light 87.5)] Body ported Allowable voltage fluctuation (%) Power consumption (W) [Current mA] DC Note) 4.5/50 Hz, 4.2/60 Hz 100 VAC: 45/50 Hz, 42/60 Hz 200 VAC: 22.5/50 Hz, 21/60 Hz Note) Inrush Apparent power (VA) [Current mA] AC Holding 3.5/50 Hz, 3/60 Hz 100 VAC: 35/50 Hz, 30/60 Hz

Compact Cylinder

140 160 45 50 55 60 65 70 75 80 85 90 55 60 65 70 75 80 85 90 95 100 110 130 150 C(D)55B20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B80-10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 C(D)55B40-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B50-5 -10 -15 -20 -25 -30 -35 -40

HRL

60 0.5 0.5 50 50 Circulating fluid outlet Circulating fluid outlet 0.4 0.4 40 40 Usable flow rate range Usable flow rate range 0.3 0.3 30 30 0.2 0.2 20 20 Circulating fluid return port 0.1 0.1 10 10 Circulating fluid return port 0 0 0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 0 10 20 30 40 50 60 70 80 90 100 110 120 130 Pump Circulating fluid Pump Circulating fluid head pressure head pressure