Sine Rodless Cylinder Series REBR Direct Mount Type

M1 = F x L A M2 = F x L M3 = F x L Note) Deflection: Displacement of section A when force acts on section F REBH15, 25 REBH15, 25 REBH15, 25 REBH15 REBH15 REBH25 REBH15 REBH25 0.08 0.03 REBH25 0.02 Deflection (mm) Deflection (mm) Deflection (mm) 0.06 0.02 0.04 0.01 0.01 0.02 5 10 15 20 0 25 25 5 10 15 20 0 5 10 15 20 0 25 Moment (Nm) Moment (Nm) Moment (Nm) REBHT25, 32 REBHT25, 32 REBHT25

COQ2BP

Foot , u Flange Clevis Moun~ 50 CQ-L050 CQ-F050 CQ0050 f~ ",,~~.~ 50 25, 30, 35, 40, 45, 50, 75, 100 ..63 CQ-L063 CQ-F063 CQ0063 63 25. 30. 35, 40, 45, 50, 75, 100 . 60 " CO-LOBO CO-FOeD CO-DOSO Notes. If foot bracket is required, order 2 pcsIcylinder.

AIR COMBINATION

G J K Model Note) P1 P2 A B M Q1 Q2 R S U V AC20D-B 1/8 83.2 87.6 72.4 41.6 40 28.5 5 30 24 33 5.5 12 3.5 29 1/81/4 1/43/8 AC30D-B 1/8 110.2 115.1 85.6 30 55.1 50 29.4 3.5 41 35 7 14 4 41 AC40D-B 1/8 145.2 147.1 91.7 38.4 72.6 75 33.8 1.5 50 40 9 18 5 48 1/43/81/2 AC40D-06-B 1/8 155.2 149.1 93.2 38.4 77.6 75 33.8 1.2 50 40 9 18 5 48 3/4 Optional specifications Semi-standard specifications

Refrigerated Air Dryer

P Dimensions (mm) DIN flange 80 A B C D E F G K L M N P Model IDFA150F Port size 950 1290 1332 268 720 1432 475 20 990 217 935 1030 100 IDFAE/F Series Options 1 For How to Order optional models, refer to pages 92, 95 and 98.

PEEK

Diaphragm type direct operated poppet (Rocker type) 2 LVM09R4 9.5 1.1 75 kPa to 0.2 MPa N.O. LVM095R Universal 3 Diaphragm type direct operated poppet LVM11 13 1.5 0 to 0.25 MPa N.C. 2 LVM10R1 N.C. 2 LVM10R2 13 1.4 75 kPa to 0.25 MPa N.O. LVM102R Universal 3 LVM10R3 N.C. LVM10R4 2 N.O. 75 kPa to 0.25 MPa 13 1.4 LVM10R6 N.C.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

MRQ DBasic type 11-MSQBA 11-MSQBR M5 x 0.8 depth 5 (Vacuum port) 20DC DB DA (mm) DA(h9) DB(h9) DC(H9) DD(h9) HB HC HD Size 10 20 30 50 46 45 20 35 20 5 59 HB 61 60 28 40 22 6 65 (HD) 11.5 67 65 32 48 22 6 68 5.5 HC 77 75 35 54 24 7 77 Dimensions other than above are identical to the basic type.

Series CE1

, 24V (power supply) F GND (0V) Black G Shield GND (connected to F.G.)

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

4-FD FY B FT FX (mm) FZ Stroke range Bore size (mm) B FT FD FX FY FZ 40 50 63 12 16 16 80 100 112 58 61 75 100 125 138 9 9 12 74 78 100 to 1000 to 1000 to 1000 Rear flange type (G) 4-FD FY B FX FT ZZ + Stroke FZ (mm) Stroke range Bore size (mm) B FT FD FX FY FZ ZZ 40 50 63 12 16 16 80 100 112 58 61 75 100 125 138 9 9 12 74 78 100 190 211 237 to 1000 to 1000 to 1000 4 Series MGZ Construction

INFORMATION For material handling and clamping of small workpieces 34 mm Power Clamp Cylinder Compact Type New New ø25, ø32 Lightweight Compact 53 mm High clamping force Lock function Lightweight Weight : 580 g (ø25) 192.4 mm Width : 34 mm Compact Heigh

, 90 105, 120, 135 TURCK, P&F Aluminum body with reduced weight (40) Power Clamp Cylinder/CKZ2N Equivalent bore size [mm] Body material Port Arm opening angle Switch 50, 63, 80 Iron NPT, G 30, 45, 60, 75, 90 105, 120, 135 TURCK, P&F NAAMS Standards compliant Safety Instructions Be sure to read the Handling Precautions for SMC Products (M-E03-3) and Operation Manual before use. 2017 SMC Corporation

3M/SMseries

) Ambient and fluid temperatureMax' 120'F(Max. 50'C) Response time 2 pooition single/double 20ms or less at 75 PSI (Skgf/cm'?) 3 position 40ms or less at 75 PSI (Skgf/cm'?)

I

NVF353O f l Operating prs6sur range 2 pGiEon singb 20 -129 PSI S(1.5 -gkgF) 2 pssition double-15-128 P$l (1 -gkgflcm'?) Arntient and tluid temperatureMax .120'F(Max. 50'C) Respon time 2 poitl'| slngle/doubb 20ms or less at 75 PSI (skg/cm'?) 3 pcition 40ms or less at 75 PSI (skgf/cm'?)

Refrigerated Air Dryer

Applicable dryer Capacity Model Inlet voltage Outlet voltage A B C D E F Weight (kg) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 100 VAC (50 Hz) 100 to 110 VAC (60 Hz) 110 VAC (50 Hz) 110 to 120 VAC (60 Hz) Single phase Single turn 78 94 100 64 75 4.2 x 7 (Long

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

IN side, OUT side 4 10 20 30 50 75 75 Prevents vacuum equipment trouble due to airborne contaminants. Mass (g) 22 22 30 30 39 39 Model Tubing size ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 7 7 12 12 16 16 6 6 8 8 10 Metric size Unrestricted 360 piping tube mounting.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

bolt MY1H LZ Stroke Bore size (Shock absorber stroke) T S E EA EB W h TT Stroke adjustment unit Shock absorber FC FA EY EC (mm) E EA EB EC EY h S T TT FA FC Shock absorber model Applicable cylinder W F MY1H25 18 9 40 7.5 53.5 16 21 3.5 46.7 7 53 RB1007 5 (Max.16.5) MY1H32 25 14 45.6 9.5 67.5 23 20 4.5 67.3 12 64 RB1412 8 (Max.20) MY1H40 31 19 55 11 82 24.5 26 4.5 67.3 12 9 (Max.25) 75

Mini Free Mount Cylinder

Dimensions Lateral mounting/CUJB (mm) GA GC GB Without magnet Bore size (mm) P1 F 12 16 20 GA 27 29 34 Z S (Relief port: 10See above) (Vacuum port: 11See above) 2 x P 11.5 13.5 15.5 23.5 25.5 29.5 15.5 17.5 18.5 (Port size) (mm) Built-in magnet Bore size (mm) F 12 16 20 GA 31 33.5 38 Z S 15.5 18 19.5 27.5 30 33.5 15.5 18 18.5 S + Stroke F + Stroke Z + Stroke (mm) Bore size (mm) GA P P1 GC

76

Features 5 Air Dryer Variations Series IDF E/F/D Standard inlet air temperature type Rated inlet air temperature: 95, 104F (35, 40C) [Max. inlet air temperature: 122F (50C), 140F (60C) (F and FS type only)] Refer to SMC website for details.

Compact Cylinder with Solenoid Valve/

D (mm) (mm) Cylinder model C D Mounting bolt size Cylinder model C D Mounting bolt size CVQM5010 CVQM325 45 M5 x 45L M6 x 60L 60 15 10 45 x 45L x 60L 60 20 15 50 x 50L x 65L 65 25 20 55 x 55L x 70L 70 30 25 60 x 60L x 75L 75 35 30 65 x 65L 12.5 x 80L 80 9 40 35 70 x 70L x 85L 85 45 40 75 x 75L x 90L 90 50 45 80 x 80L x 95L 95 75 50 85 x 85L x 120L 120 -100 75 110 x 110L x 145L 145 CVQM6310

100

A 108 75 22.2 40 9.8 7.9 26.6 188 124 55 Vacuum (2/V) port thread type symbol Nil: Rc thread F: G thread N: NPT thread 2 x 4.1 Mounting hole3 (Recommended tightening torque: 0.56 to 0.76 Nm) Silencer assembly (Included) 66 Exhaust direction 3 x 4.4 Mounting hole3 (Recommended tightening torque: 0.56 to 0.76 Nm) Exhaust port thread type symbol Nil: Rc thread F: G thread N: NPT thread Pressure

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Table displacement due to yaw moment load Displacement at A when load is applied at F . Table displacement due to roll moment load Displacement at A when load is applied at F .

ITV

1.0 0 2 6 4 8 1.0 100 0 25 50 75 10 Input signal (%F.S.)