3 Port Solenoid Valve Metal Seal Series VZ200 1

/surge voltage suppressor 2-3.4 mounting hole VFN Applicable cable O.D. 3.5 to 7 Pg7 With light/surge voltage suppressor 2-3.4 mounting hole 60 52.1 M plug connector: VZ4 2-M(Z)-01 1 2 30 26.7 23 4 With light/surge voltage suppressor 12 19.5 84 2-3.4 mounting hole Max.10 91 300 (Lead wire length) 4-15-13 14 Series VZ400 Dimensions: Sub-plate Mounted Grommet: VZ4 5-G H (S)1 2 01 02 2-4.5 mounting

Stainless Steel 316 Fittings

16.6 18.5 M L Q A D D O N M M Note 1) D is maximum diameter.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

L dimension L dimension 1.5 m AXT100-DS25-015 AXT100-MC26-015 1.5 m 3 m AXT100-DS25-030 AXT100-MC26-030 3 m 5 m AXT100-DS25-050 AXT100-MC26-050 5 m When a commercially available connector is required, use a 25 pin female connector conforming to MIL-C24308. L L (60) 44 8 16 14 25 1 13 47.04 50 Approx. 10 Multi-core vinyl cable 0.3 mm2 x 25C Terminal no. Socket side Plug terminal no.

VEX1

Load proportion is ((load weight x 9.8)/theoretical force) x 100% Conditions of Speed Chart System Solenoid valve Speed controller Tubing diameter x Length Silencer A B C D E F G H I J K 10 x 1 m 12 x 1 m 12 x 1 m SGP15A x 1 m SGP15A x 1 m SGP20A x 1 m SGP25A x 1 m SGP25A x 1 m SGP32A x 1 m SGP40A x 1 m SGP50A x 1 m VEX VEX3 2-02 1 2 AS4000-02 AN200-02 AS420-03 AS420-04 AS420-04 AS500-06

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

on option V, M (non-leak, medium vacuum) Note) Dew point temperature: 10C or less 15 16 Direct Operated 2 Port Solenoid Valve Series VX21/22/23 For Air/Single Unit How to Order (Single Unit) VX 2 0 21 01 VX 2 2 21 01 1 G 1 G 1 1 Normally Closed (N.C.)

VZ5000

Closed Center/Exhaust Center/Pressure Center VZ5320 Grommet (G), (H) VZ5 20-01 G H (Mounting hole for manifold) 3 4 5 Manual override (Non-locking) VZ5420 VK VZ VF (Lead wire length) VFR VZ5520 G: 300 mm H: 600 mm (Mounting hole) VP4 VZS VFS VS4 VQ7 (PE port) EVS VFN (Piping port) L plug connector (L) VZ5 20-L-01 M plug connector (M) VZ5 20-M-01 (Lead wire length) 3 4 5 3 4 5 300 (Lead wire

Modular Design with Uniform Body Style

MPa V V V V V 6*1 0.1 to 0.6 MPa v v v v v + Port size IN OUT OUT q e Semi-standard Nil 0.5 m V V V V V b Lead wire length r L 3 m V V V V V Z 5 m V V V V V + c Pressure unit of the scale plate Nil MPa V V V V V V: Without restrictions v: With restrictions (Refer to *1 and *2.)

reduces flow setting time

Inch Size [mm] Model d T (R, NPT) H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS221FS-01-01 (S) 1/8" 7.2 12 19.1 26.2 19.1 43.9 42.4 40.8 39.3 13.3 20 21.5 6.5 15 13 (13) AS221FS-01-03 (S) 5/32" 8.2 AS221FS-01-07 (S) 1/4" 11.2 20.8 27.9 14 (13) AS221FS-01-09 (S) 5/16" 13.2 22.4 29.5 14.2 15 (14) AS221FS-02-01 (S) 1/8" 1/8 13 (12.7) 7.2 20.9

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

Inch Size [mm] Model d T (R, NPT) H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS221FSG-01-01 (S) 1/8" 7.2 12 19.1 26.2 19.1 43.9 42.4 40.8 39.3 13.3 20 21.5 6.5 15 13 (13) AS221FSG-01-03 (S) 5/32" 8.2 AS221FSG-01-07 (S) 1/4" 11.2 20.8 27.9 14 (13) AS221FSG-01-09 (S) 5/16" 13.2 22.4 29.5 14.2 15 (14) AS221FSG-02-01 (S) 1/8" 1/8 13 (12.7) 7.2

SQ1000/2000

SSQ2000 1A 3 F0 01 !3 Includes gaskets.

Valve Single Unit

Mixed M Mixed In the case of mixed specifications (M), indicate separately on the manifold specification sheet.

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

Inch Size [mm] Model d T H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M Weight [g] Unlocked Locked Unlocked Locked AS22l1FG-01-01(S)A 1/8" 7.2 12 19.1 26.2 19.1 30.6 29.2 27.5 26.1 13.3 9 (9) AS22l1FG-01-03(S)A 5/32" 8.2 AS22l1FG-01-07(S)A 1/4" 11.2 20.8 27.9 10 (9) AS22l1FG-01-09(S)A 5/16" 13.2 22.4 29.5 14.2 11 (10) AS22l1FG-02-01(S)A 1/8" 1/8 13 (12.7) 7.2 22.6 36.6 35 31.1 29.5 13.3 17 (18)

0.

M-type plug connector (M) P.2 (A) 2 M-type plug connector (M) Rubber Metal VQZ100 + 1 (P) 3 (R) N.O.

SMC Electronic Switch Series Variations

ZSE1-01-15CN1 pc. ZS-20-5A-501 pc.

HRX-OM-X071

AL.01 to AL.32 D.OUT1 ALARM CODE No.15 screen Contact output signal 1 maintenance MT.01 MT.01 to MT.05 D.OUT1 MANT CODE No.16 screen Contact output signal 2 function RMT 1 D.OUT2 SEL No.17 screen Contact output signal 2 operation A A/B D.OUT2 TYPE No.18 screen Contact output signal 2 alarm AL.01 AL.01 to AL.32 D.OUT2 ALARM CODE No.19 screen Contact output signal 2 maintenance MT.01

Table of Contents

T0425 (0.5 m) H04-01 (1 pc.) DL04-01 (1 pc.)

60

m b b o o n n v v a a i i c c n n g g t t n n p p e e i i m m p p in in e e l l g. g.

VZ3000

G H (Mounting hole) Manual override (Non-locking) (Mounting hole pitch) (Mounting hole pitch) (Lead wire length) G: 300 mm H: 600 mm (Piping port) (PE port) (Lead wire length) L plug connector (L) VZ3140-L-01 M plug connector (M) VZ3140-M-01 300 (Lead wire length) 300 : With light/surge voltage suppressor DIN terminal (D) VZ3140-D-01 Built-in speed controllers VZ3150Applicable cable O.D.

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

JXCx-OMT0005CN

DRV C RESET <> 66 - <>12 1 [] A [a ] (01-103) [] C RESET 2 [SW] A [a ] <> <> (01-144) D RESET SVON <> <> <>(M24V) (01-145) D RESET SVON <> <> <> (01-146) D RESET SVON <> 67 - <> <>(DC24V) D RESET SVON (01-147) <> <> <> (01-148) D RESET SVON <> <> (01-149) D RESET SVON <> <> Communicati on error. (01-150) D RESET SVON <> (01-192) E <> <> <> ON(SVON ON)