10

x 2 28.5 34 25 +0.084 0 32 0.10 0.30 Y-03MNote 1) 32 20 30 M10 x 1.25 10 16 10 +0.058 0 14 +0.30 +0.10 28 0.10 0.30 Y-04MNote 1) 40 22 40 M14 x 1.5 11 19 10 +0.058 0 14 +0.30 +0.10 28 0.10 0.30 Y-05MNote 1) 50, 63 28 50 M18 x 1.5 14 24 14 +0.070 0 20 +0.30 +0.10 40 0.10 0.30 Y-08MNote 1) 80 40 65 M22 x 1.5 20 34 22 +0.084 0 30 +0.30 +0.10 60 0.10 0.30 Y-10MNote 1) 100 40 65 M26 x 1.5 20

CXS

36 36 46 D 2 5 2 4.5 6.5 6.5 C 5.5 12.5 20.5 28 28 38 D 5.5 2.5 5.5 3 1 1 6 10 15 20 25 32 15.5 22.5 30.5 38 38 48 4.5 7.5 4.5 7 9 9 Lead wire entry is inward prior to shipment.

Vacuum Module Series ZX

(For replacement) ZH Philips screw (M2.5 x 28) How to order (1) Valve unit (Supply valve: N.C.)

24

52 128 200 300 42 54 92 128 178 100 M12 x 1.75 24 28 100 17.5 32.5 89 64 210 90 236 188 210 166 48 72 148 220 320 35 47 85 121 171 124 M14 x 2.0 28 11 MGPL (Ball bushing) MGPA (High precision ball bushing) A, DB, E Dimensions MGPM (Slide bearing) A, DB, E Dimensions [mm] [mm] Bore size [mm] A DB E 50 st or less Over 50 st 200 st or less Over 200 st 50 st or less Over 50 st 200 st or less

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

INSTALLATION 21 to 28 2.1 Installation direction and clearances . 23 2.2 Keep out foreign materials . 24 2.3 Encoder cable stress . 25 2.4 SSCNET III cable laying . 25 2.5 Inspection items . 27 2.6 Parts having service lives . 28 3.

Hydraulic Filters

28 28 28 28 G 9 9 9 9 9 9 9 9 Weight (kg)* E 47 47 52 58 58 63 Z 2.8 2.8 2.8 5.3 5.3 5.4 Port size Port size Port size 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 2 1/2B (20) 3B (24) 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 2 1/2B (20) 3B (24) 22.2 27.7 34.5 43.9 49.1 61.1 77.1 90.0 2.7 2.7 2.7

Compact

27.3 25A(28) 27 20 Motor cable length 300 102 0.3 LEC 7.5 LEC S Note 1) [ ] for when the direction of return to origin has changed.

CL

CLG-020-24 CLG-025-24 CLG-032-24 CLG-040-24 20 25 32 40 13 15 17 21 3.2 3.2 4.5 4.5 21.2 21.3 25.6 26.3 47.8 54.8 57.4 65.4 42 42 48 56 26 28 28 36 28 28 28 30 50 57 61.4 71.4 CG-020-24A CG-025-24A CG-032-24A CG-040-24A 20 25 32 40 13 15 17 21 3.2 3.2 4.5 4.5 18.1 20.7 23.6 27.3 35.8 39.8 49.4 58.4 42 42 48 56 16 20 22 30 28 28 28 30 38.3 42.1 53.8 64.6 Rod End Nut Clevis Pin Knuckle Pin

ZP

43 65 105 156 4.5 50 ZPX50HJ50-B01-A18 52 135 186 80 82 16.5 28 43 65 138 191 4.5 50 ZPX50HJ75-B01-A18 52 171 222 80 82 16.5 28 43 65 174 227 4.5 ZPX HJ-B01-A22 (With buffer) 100 125 Hexagon width across flats 30 Hexagon width across flats 17 Width across flats 19 Hexagon width across flats 21 (mm) Model A 100 ZPX100HJ25-B01-A22 D 186 ZPX100HJ50-B01-A22 ZPX100HJ75-B01-A22 ZPX100HJ100-B01

Metal Seal/Rubber Seal Series VQ Body Ported

For details, refer to page 2-4-28. Note 2) For details, refer to page 2-4-29.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

holes for manifold) 7 21.8 (Mounting holes for manifold) (Lead wire length) 39.1 [45.6] About 300 Bracket 23.2 equivalent (Mounting holes) 23.2 equivalent (Mounting holes) 18.5 18.5 28 [34.5] 28 [34.5] 20 20 15.6 18.5 18.5 13.5 13.5 9 9 69 69 98.6 79.4 [82] [ ]for AC Other dimensions are the same as the grommet type. [ ] for AC Other dimensions are the same as the grommet type. 24 Valve

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

H W2 W1 K E E H J K L1 L1 L2 L2 M W2 Model t W1 M 4 3 6 10 8 12 19 25 LQ3P11 LQ3P12 LQ3P21 LQ3P31 LQ3P32 LQ3P41 LQ3P51 LQ3P61 M 11 6 14 10 9 14.5 23.5 22.5 56 58 8 16 17 16 7 20 17 16 20.5 28 27 67 69 8 21 24 H (E,E) (E,E) 21 7 25 22.5 19.5 24.5 39 36 83 89 8 26 28 L1,L1 KK L2,L2 24 32 41 9 9 10 29 37 49 24 22 30.5 44.5 42.5 96 100 117 136 8 13 13 32 41 50 36 43 55 Panel hole diameter K 26.5

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

LEF Auto switch model D-M9NV D-M9N D-M9B D-M9BV D-M9PV D-M9P Electrical entry direction In-line Perpendicular In-line Perpendicular In-line Perpendicular LEJ Wiring type 2-wire 3-wire NPN PNP Output type LEL Applicable load IC circuit, Relay, PLC 24 VDC relay, PLC Power supply voltage 5, 12, 24 VDC (4.5 to 28 V) LEM Current consumption 10 mA or less Load voltage 24 VDC (10 to 28 VDC) 28

Battery-less

1100 48 to 1400 48 to 1500 Actuator specifications Max. acceleration/deceleration [mm/s2] 3000 Positioning repeatability [mm] 0.08 Lost motion [mm]*3 0.1 or less Equivalent lead [mm] 48 48 48 Impact/Vibration resistance [m/s2]*4 50/20 Actuation type Belt Guide type Linear guide Operating temperature range [C] 5 to 40 Operating humidity range [%RH] 90 or less (No condensation) Motor size 28

CG5-S

GA GB 2-P Bore size A AL B1 H H1 MM ZZ W 10 M BM H1 20 14 12.7 11.0 25.4 4.0 1/4-28 108.4 25 14 12.7 12.6 28.4 4.8 5/16-24 111.4 Max.

CG1

TU TV TW TX TY TZ 8d9 10d9 12d9 14d9 16d9 18d9 18d9 22d9 18.1 20.7 23.6 27.3 29.7 34.3 35.8 39.8 49.4 58.4 72.4 90.4 42 42 48 56 64 74 72 93 16 20 22 30 36 46 85 100 28 28 28 30 36 46 45 60 38.3 42.1 53.8 64.6 79.2 97.2 110 130 CG-020-24A CG-025-24A CG-032-24A CG-040-24A CG-050-24A CG-063-24A CG-080-24A CG-100-24A 20 25 32 40 50 63 80 100 (mm) Part No.

MGG

depth 14.5 M16 x 2 depth 28 27 30 55 200 13.5 115 76 170 214 30 160 M12 x 1.75 depth 24 262 138 70 75 230 234 17.5 23 depth 17 M18 x 2.5 depth 32 30 32 70 245 15 125 80 210 245 35 190 304 153 M14 x 2 depth 28 80 85 280 274 For long strokes Bracket mounting strokes Bore size (mm) Stroke range (mm) Bore size (mm) Bore size (mm) Bracket mounting stroke Z Y X W V U T S R Q P Y R O 63 80 100 63

Stopper Cylinder

44 28 15 50 82 54 25 64 8 10 28 7 50 50 6.6 11 depth 8 1/8 1/8 1/8 24.5 56 28 19 B + Stroke R R KA KB D-X * Refer to pages 572 and 573 for the auto switch proper mounting position and mounting height. * For the single acting type, a One-touch fitting is on the rod end only. * The position of the width across flats (K) is arbitrary and is not specified. 567 B RSQ Series These 3 figures show

CATALOG VC10

COIL NO. 7C-101-A24 7C-102-A24 7C-103-A24 7C-104-A24 7C-105-A24 7C-1-K24 7C-2-K24 7C-3-K24 7C-4-K24 7C-5-K24 12 16 24 28 11 14 21 25 2.5 3.3 5 6 41 48 55 97 110 37 43 49 87 98 8 10 12 20 24 7C-106-A24 7C-107-A24 7C-108-A24 7C-109-A24 7C-110-A24 7C-6-K24 7C-7-K24 7C-8-K24 7C-9-K24 7C-10-K24 120 140 150 240 204 110 124 135 220 182 26 28 32 50 46 7C-111-A24 7C-112-A24 7C-113-A24 7C-114-A24 7C

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

17 17 M10 x 1.5 20 16 22 M16 x 1.5 30 3/8 43 116 11 10 9 73 262 19 63 28 8 80 60 22.4 55 30 17 17 M10 x 1.5 22 16 25 M18 x 1.5 30 3/8 47 120 11 12 10 80 280 21 80 32 8 100 75 28 65 32 22 20 M12 x 1.75 26 19 29 M22 x 1.5 35 1/2 57 132 11 16 13 90 312 26 100 38 6.5 118 90 35.5 80 35 27 19 M12 x 1.75 27 21 34 M27 x 2 35 1/2 66 140 12 20 16 100 340 34 125 38 6.5 140 112 35.5 80 35 27 19 M14