Basic Type/Direct Mount Type

) CY3R10 CY3R40 500 Allowable driving force Fn (N) Allowable driving force Fn (N) 300 50 200 40 30 20 100 20 30 40 50 10 Usable range 5 10 Usable range 5 1 0 1 2 3 4 5 6 1 7 8 9 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3R15 CY3R50 H 1000 Allowable driving force Fn (N) Allowable driving force Fn (N) 50 500

ZP

M6 x 1 A6 Mounting M8 x 1 A8 U C Flat Flat with ribs M4 x 0.7 B4 M5 x 0.8 B5 D Deep M6 x 1 B6 B Bellows UT Thin flat CT Thin flat with ribs M8 x 1.25 B8 Material N S NBR Silicon rubber Table (1) Pad Diameter/Pad Type Dia.

Modular Type Regulators Series AR

Example) AR30-03BG-NR-X425 Symbol Body size Description 25 30 40 50 60 Body size Description Symbol Nil N F Thread type Rc NPT G 20 25 30 40 50 60 Nil N F Thread type Rc NPT G + 02 03 04 06 10 1/4 3/8 1/2 3/4 1 + 01 02 03 04 06 10 Port size 1/8 1/4 3/8 1/2 3/4 1 + Port size Nil B Note 2) Without mounting option With bracket With set nut (for panel fitting) H Mounting a + Note 1) Semi-standard

51

Different surfaces Different surfaces Same surface Same surface (n 2) 2 55 + 35 (n 2) 20 + 35 D-M9 5 15 Note 1) 40 Note 1) (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 55 + 35 (n 2) 20 + 35 D-M9W 15 Note 1) 40 Note 1) 10 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 60 + 35 (n 2) 25 + 35 D-M9A 25 40 Note 1) 10 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 50 + 35 (n 2) 15 + 35

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

1 (A) 4 (B) 2 (A) 4 (B) 2 4(A) SOL.a SOL.b SOL.a SOL.b 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 2(B) o 5(EA)/3(EB) 1(P) SJ3C60 [N.C., N.O. valve x 1 (each)] SJ3C60K with back pressure check valve SJ3C60 [N.C. valve, N.O. valve x 1 (each)] !0 y t r q e u w !2 i !

MXW Series Long Stroke Slide Table

n = 1 + 2 + 3 < 1 Load factors n Note Item Examine W. W max. is maximum movable load at Va. 1 =W/Wmax. (1) Max. movable load Examine Mp,My,and Mr.

Regulator

AR-OMX0055-B PRODUCT NAME Regulator MODEL / Series / Product Number AR20(K)-(F,N)01(F,N)02(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,R,Y,Z,ZA)-D AR30(K)-(F,N)02(F,N)03(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,R,Y,Z,ZA)-D AR40(K)-(F,N)02(F,N)04(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,R,Y,Z,ZA)-D AR40(K)-(F,N)06(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,R,Y,Z,ZA)-D AR50(K)-(F,N)06(F,N)10(B,E,E1,E2,E3,E4,G,M)(-1,N,R,Y,Z,ZA)-D AR60(K)-(

HEC_001W-E

After the error is reset, the indication of [WRN] disappears. 8-1 Alarm 8.2 Alarm indication Blink E R R 1 4 T h e r m o s t a t A l a r m M O D E < S h u t o f f Fig.8-1 Alarm indication in the event ERR14 arises Blink E R R 1 4 P B R a n g e M O D E < 2 . 0 C Fig.8-2 Alarm indication in the event ERR14 arises during PB range setting input Light W R N P V < 2 6 . 6 C # 1 S V 2 5 . 0 C

CLK1

Symbol 32 40 50 63 1 pc. 2 pcs. "n" pcs. Model A B Same side Different sides 4 6.5 8 8 Different sides Same side D-C7, D-C8 31.5 29.5 31 31 n-2 2 15 + 45 ( ) (n = 2, 4, 6...) Approx. Hs D-C7, D-C8 30.5 35 40.5 40.5 50 + 45 (n-2) 15 50 A B 4 6.5 8 8 n-2 2 15 + 50 ( ) (n = 2, 4, 6...) D-C73C 31.5 29.5 31 31 D-C73C 15 65 65 + 50 (n-2) Approx.

NCQ8

1/16"), 150 (1-1/2"), 200 (2"), 250 (2-1/2") N-through hole H-thread C-depth 4 places Z Q Q P-port 2 places J E M2 bolt circle W M1 D-rod dia.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

1 4 3 8 VSA430 Individual EXH 1 2 VSA430 3 4 3 4 Common EXH , 1 2 3 4 How to Order 1 2 standard , 1 2 3 4 , 3 8 1 2 3 8 VSA440 3 4 Individual EXH 1 2 SA VV 4 2 0 N 1 05 Piping specifications/Side ported, bottom ported Manifold Air operated valve Series VSA 4 port valve Thread type Body size Nil Rc EXH port Symbol Size N Piping NPT NPTF PF Individual 1 Symbol Common Type 2 3 1 4 3 8 1 2

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

(same side) n = 2, 4, 6, 8 n = 4, 8,1 2, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 15 100 1 pc. 100 110 120 1 or 2 pcs. 15 120 120 130 140 D-F5W, D-J59W D-F5BA D-F5F D-F5NT (different sides/same side) (n 4) 2 140 + 55 (n 4) 2 (n 2) 2 (n 4) 2 (n 4) 2 15 + 55 120 + 55 120 + 55 130 + 55 "n" pcs.

Modular Type Filter Regulator Series AW

8 C J N R W Z AW10 AW30 to 40 B C D E G H 1 2 6 8 C J N R W Z Accessories Optional specifications 56 AW10 to 40 Standard specifications AW10 M5 x 0.8 AW20 1/8, 1/4 AW30 1/4, 3/8 Air 1.5MPa 1.0MPa 0.05 to 0.85MPa AW40 1/4, 3/8, 1/2 AW40-06 3/4 Model Port sizes Fluid Proof pressure Maximum operating pressure Set pressure range Pressure gauge port size Note 1) 0.05 to 0.7MPa Rc 1/16 Note 2)

0.55

1 1 1 2 Rc G NPT NPTF T N F Nil Thread type Double solenoid Single solenoid 81 80 Type of actuation Port size (IN, OUT port) VP3145 VP3165 VP3185 Port size Symbol 03 04 3 8 1 2 06 3 4 Passage, Type of actuation 10 12 1 1 4 1 14 1 2 1 NC NO B A 20 2 In the case of -X80, only N.C. is available.

Cylinder with Lock Series CLS

Also when switches are shipped separately, BBA1 is included with them. 35 + 30 (n 2) 110 + 30 (n 2) n = 2, 4, 6, 8 ... Different side "n" pcs. 100 + 10 (n 2) 110 + 100 (n 2) n = 2, 4, 6, 8 ... Same side 15 110 1pc. 35 110 Different side 2pcs. 55 110 Same side D-A44 35 + 30 (n 2) 110 + 30 (n 2) n = 2,4,6,8...

AW

160 201 239 242 409 25 40 53 70 75 95 1/16 1/8 1/8 1/4 1/4 1/4 25 40 55 80 80 20 AR M38 x 1.5 M42 x 1.5 1/4, 3/8, 1/2 3/4 3/4, 1 AL M42 x 1.5 AW Optional specifications Semi-standard specifications Bracket mount Panel mount With auto drain With barb fitting With drain guide Metal bowl Metal bowl with level gauge M 25 30 41 50 50 70 Model AG N 28 34 40 54 54 66 Q 30 44 46 54 56 66 R 4.5

Hygienic Design Cylinder Series HY

8 Rc 1/8 Rc 1/4 Rc 1/4 G 1/8 G 1/8 G 1/4 G 1/4 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 20 20.5 22 24 Individual -X Technical data Note 1) Refer to page 888 for details about the optional parts (plug bolt).

A_HEC-OM-I009

E R R 1 1 W R N P V < 3 1 . 6 C # 1 S V 3 0 . 0 C M O D E N o r m a l 4th line Indicates control operation mode during normal operation and set values during setting mode selection. Fig.5-6Display HEC002-A/HEC006-A 5-3 Names and Functions of Components 5.2.3 Reservoir Cap Reservoir Cap Removed to supply circulating fluid before operation. Replace cap before starting operation.

CM2

Please delete the unnecessary part. 1.4-15 Standard: Double Acting Single Rod Series CM2 Front Trunnion (U) CM2U Bore size Stroke CJ1 CJP CJ2 CM2 C85 CG1 MB C95 CA1 CS1 (mm) E 20 26 26 32 Stroke range 1 to 300 1 to 300 1 to 300 1 to 300 P 1/8 1/8 1/8 1/4 Bore size 20 25 32 40 K 5 5.5 5.5 7 N 15 15 15 21.5 B2 26 32 32 41 D 8 10 12 14 I 28 33.5 37.5 46.5 MM M8 X 1.25 M10 X 1.25 M10 X 1.25 M14

High Purity Chemical Valve

Symbol Body class 2 3, 4, 5, 6 3, 4, 5, 6 Thread type M5 Rc 1/8 NPT 1/8 Nil Variations N LVC20 LVC30 Model LVC40 LVC50 LVC60 Orifice diameter 4 8 10 16 22 Tubing O.D. Inch sizes Metric 3, 4, 6 6, 8, 10 10, 12 12, 19 19, 25 03 05 07 11 13 19 25 1/8 3/16 1/4 3/8 1/2 3/4 1 Inch Valve type Symbol Type 1/8, 3/16, 1/4 1/4, 3/8 3/8, 1/2 1/2, 3/4 3/4, 1 Basic type N.C. PB PA PA N.O.