Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: Yes, Port Size: ø6 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: F [1 PNP Outputs + Analog (4 to 20 mA)], Unit Specification: Unit Switching Function, Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option

Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: Yes, Port Size: ø6 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 2 PNP Outputs, Unit Specification: Unit Switching Function, Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket for w/Flow Adjustment

5 Port Solenoid Valve Series SY3000/5000/7000/9000

With External Pilot Specifications One-touch fitting [1(P), 3/5(R) port] Applicable tubing O.D.: 12, 3/8" (Pitch) P = 24 22.2 24.3 R R 4 A 4 A 4 A 4 A 3/5 3/5 4 A 4 A R R 18.8 18.8 4 A 4 A 4 A 4 A 3/5 3/5 18 4 A 4 A 63.3 39.3 39.3 40.1 79.8 1 P 1 P 2 B 2 B 2 B 2 B 2 B 2 B 1 P 1 P 2 B 2 B 2 B 2 B 2 B 2 B Plug [1(P), 3/5(R) port] One-touch fitting [4(A), 2(B) port] Applicable tubing O.D. :

SY

Scale: 25% For external pilot specification (Pitch) P = 24 24.3 22.2 11 18.3 18.8 39.3 18.8 3/5 R 3/5 R A 4 A 4 A 4 A 4 18 A 4 A 4 3/5 R 3/5 R A 4 A 4 A 4 A 4 39.3 40.1 A 4 A 4 63.3 79.8 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 2-Plug [1 (P), 3/5 (R) port] 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 2-One-touch fitting [1 (P), 3/5 (R) port] Applicable tube O.D.: 12 2n1-One-touch fitting [4 (A), 2 (B) port] Applicable

1

13.6 10.6 BUS IN 56.6 E 3/5 2 B 2 E 3/5 E 3/5 2 B B 2 B 2 B 2 B 2 40.2 PWR PWR 4 A 4 21.6 4 A 4 A 4 A 4 A 4 A 18 46.5 (17.8) 46.5 (7.5) (11.8) P = 10.5 (Pitch) 15.5 Note 1) These figures show the SS5Y3-10SQA-05D-C6.

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

(Station 1) For external pilot specification (Pitch) P = 24 24.3 22.2 11 18.3 18.8 39.3 18.8 3/5 R 3/5 R 3/5 R 3/5 R 18 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 39.3 40.1 63.3 79.8 1 P 1 P 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 2-Plug 2-One-touch fitting [1 (P), 3/5 (R) port] [1 (P), 3/5 (R) port] Applicable tube O.D.: 12 + + + + 2n1-One-touch fitting One-touch fitting One-touch fitting

Metal Seal/Rubber Seal Series VQ Body Ported

8 7 6 5 4 3 2 1 U side VQD P P A A A A A A A A 2-C6 P (SUP port) 24.5 (11) 13.5 B B B B B B B B R R 7 P = 11 19.2 2-C6 R (EXH port) (7.5) 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread The broken lines indicate the DIN rail mounting style [-D] and the top entry connection [-PU].

SX

141.1 99.2 99.2 19 42.9 (Lead wire length) 19 42.9 Polarity indication 13.6 13.6 A B A B B A A COM B + A B A B A B A Manual override (Push and turn for locking type) 42 31.4 Manual override (Press and turn for the locking type) 42 31.4 84.9 B: Green A: Orange 2-4.2 84.9 B: Green A: Orange 2-4.2 2-One-touch fittings (Mounting holes for manifold) (A, B port) (A, B port) 2-One-touch fittings

Base Mounted Metal Seal/Rubber Seal Series VQ

3 n (41.5) (33) (59.5) 58 Residual pressure release manual override 2-Rc1/8, 1/4, C6, C8 C6: One-touch fitting assembly for 6 C8: One-touch fitting assembly for 8 C8: One-touch fitting assembly for 8 C6: One-touch fitting assembly for 6 2-Rc 1/8, 1/4, C6, C8 B B B 2 2 2 A A A 45 65.5 4 4 4 B 25 2 (1.5) 37.5 17.5 A 1 2 3 4 5 6 7 8 10 11 12 L n 13 14 15 16 Dimensions Formula L1 = 22n + 24

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

(Pitch) P = 24 22.2 24.3 With External Pilot Specifications 1118.3 18.8 39.3 18 18.8 39.3 40.1 R R 3/5 3/5 4 A 4 A 4 A 3/5 4 A 4 A 4 A R R 3/5 4 A 4 A 4 A 4 A 4 A 4 A 63.3 79.8 2 B P 1 1 P 2 B 2 B 2 B 2 B 2 B Plug [1(P), 3/5(R) port] 2 B P 1 1 P 2 B 2 B 2 B 2 B 2 B One-touch fitting [1(P), 3/5(R) port] Applicable tubing O.D.: 12, 3/8" One-touch fitting [4(A), 2(B) port] Applicable tubing

5 Port Solenoid Valve Series SV1000/2000/3000/4000

With External Pilot Specifications 46.5 (Pitch) Ground terminal 15.8 9.5 16.5 17.5 P=16 20.5 2 x M12 11.9 9.2 SJ 17.7 25.2 3 3 30.6 4 A 4 A 4 A 4 A 4 A 3 3 3/5 E PWR 4 A 4 A 4 A 4 A 4 A T 49.9 E 3/5 3/5 E PWR 42.7 T 2 2 E 3/5 63.5 2 2 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 1 1 1 1 P 1 1 P SY BUS 0 P 1 1 P BUS 0 0 0 PE PE X X One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4,

SQ1000/2000

B A B A B A B A B A B A 4 SMC 47.5 56 37.6 53.6 B 2 18.5 Approx. 12 Approx. 12 EXH outlet Applicable connector: D-sub connector (25P) D side U side Stations 1 2 3 4 5 6 7 8 n (conforming to MIL-C-24308) C10: EXH port C10: SUP port For top ported Approx. 10 R 3 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 62 41.5 25.5 39.5 (58) 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 21 P 1 P = 17.5 63.3 44.5 7.5 2n-C4, C6, C8

0.4

A B A B A B A B A B A 2 93.5 126 80 75 66 (35) (59) 4 x M4 mounting hole (40) n 1 2 3 4 5 6 7 8 2 x M5 mounting hole Stations D side U side 2 x G3/4 Conduit port C8: 8 one-touch fitting C8 [3(R) EXH port] DIN rail clamp screw R R 77.7 62.5 12 X 3 12 X 3 45.5 40.5 B B B B B B B B 25 P P 1 1 A A A A A A A A 18.7 7.7 9.5 35 (7.5) (12) C3, C4, C6, M5 [4(A), 2(B) port] C3: 3.2 one-touch fitting

Valve Single Unit

Flow Characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Flow characteristics Note) Port size Model C [dm3/ (sbar)] b 1, 5, 3 (P, EA, EB) 4, 2 (A, B) Cv C [dm3/ (sbar)] b Cv 1 8 SS5X3-41 SS5X3-42 SS5X5-41 SS5X5-42 SS5X7-42 Rc C6 C6 0.75 0.75 1.8 1.9 3.0 0.19 0.20 0.23 0.20 0.25 0.18 0.18 0.44 0.46 0.75 0.81 0.82 1.9 1.9 3.0 0.23 0.20 0.16 0.12 0.12 0.20 0.20 0.45 0.43 0.66 1 8 Rc 1 4 Rc

Valve Single Unit

Flow Characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Flow characteristics Note) Port size Model C [dm3/ (sbar)] b 1, 5, 3 (P, EA, EB) 4, 2 (A, B) Cv C [dm3/ (sbar)] b Cv 1 8 SS5X3-41 SS5X3-42 SS5X5-41 SS5X5-42 SS5X7-42 Rc C6 C6 0.75 0.75 1.8 1.9 3.0 0.19 0.20 0.23 0.20 0.25 0.18 0.18 0.44 0.46 0.75 0.81 0.82 1.9 1.9 3.0 0.23 0.20 0.16 0.12 0.12 0.20 0.20 0.45 0.43 0.66 1 8 Rc 1 4 Rc

4/5 Port Solenoid Valve

to 20 stations 2 to 15 stations Valve stations Location Base Side Base Bottom Valve Top A, B port Porting specifications Direction 1/8 1/4 P, R port C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) 1/8 C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) Port size A, B port 1/8 Flow Characteristics Flow characteristics Port size 1 4/2 (P A/B) 4/2 5/3 (A/B R) Manifold C [

VQZ1000/2000/3000

2 2 A A A 2-Rc 1/8, 1/4, C6, C8 C6: One-touch fitting assembly for 6 B B B 4 2-Rc 1/8, 1/4, C6, C8 C6: One-touch fitting assembly for 6 C8: One-touch fitting assembly for 8 VQD 2 A C8: One-touch fitting assembly for 8 B 23 P = 22 L1 L2 L3 (For C6, C8) ( 9.5) DIN rail clamp screw 80 ( 9.5) 2-M4 mounting hole (For C6, C8) (For C6, C8) 4.5 2-M6 mounting hole IN IN IN IN 5.5 80 6.5 (40) 69.5

0.4

9.5) 45 65.5 Residual pressure release manual override 2 x Rc 1/8, 1/4, C6, C8 C6: 6 one-touch fitting assembly (41.5) C8: 8 one-touch fitting assembly C8: 8 one-touch fitting assembly C6: 6 one-touch fitting assembly 2 x Rc 1/8, 1/4, C6, C8 B B B Sub-plate Single Unit Safety Instructions Specific Product Precautions 2 2 2 A A A 4 4 4 B 25 2 (1.5) 37.5 A 7.5 L n Dimensions Formula L1 = 22n

V100

actuation Port size {2(A) port} (A) 2 N.C.

0.4

) 22 20.5 7 Stations 1 2 3 n VFR D side U side ( 9.5) 45 65.5 (33) (59.5) 58 Residual pressure release manual override 2 x Rc 1/8, 1/4, C6, C8 C6: 6 One-touch fitting assembly (41.5) VQ7 C8: 8 One-touch fitting assembly C8: 8 One-touch fitting assembly C6: 6 One-touch fitting assembly 2 x Rc 1/8, 1/4, C6, C8 B B B 2 2 2 A A A 4 4 4 B 2 (1.5) 37.5 A L n Dimensions Formula L1 = 22n + 24 n: