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Count Pressure Characteristics Flow Characteristics Set pressure: 10 kPa 0 1 10 kPa 20 kPa Output deviation factor (% F.S.) 20 0.5 40 kPa Set pressure (kPa) 40 Out 60 kPa 60 0 Return 80 kPa 80 0.5 100 kPa 100 120 100 80 60 40 1 0 1 1.5 0.5 2 2.5 3 3.5 4 20 Flow rate (/min (ANR)) Supply pressure (kPa) 14-8-7 8 Series ITV0 Dimensions For Single Unit 4-6 2-6 PWR ERR PWR L-bracket (Option) ERR

mA, 4 to 20 mA Input signal range 16 bit resolution 10 to 10 V, 5 to 5 V 20 to 20 mA EX600-AXA Max. rated input signal 15 V 22 mA Note 2) Input impedance 100 kW 50 W Linearity (25C) 0.05% F.S.

4 x 2.6 Depth 7 or less (7.7) 30 20 Power supply/Output connector Bracket A (Part no.: ZS-46-A1) 30 25 20 20 20 45 30 2 30 34.6 19 5.2 5.2 5.2 14.7 47 9.6 Bracket configuration allows for mounting in four orientations.

AS4000-03 80 VFS440R VFS310 AR425 Nylon 12/9 AN300-03 AS420-03 100 VFS440R VFS310 AR425 Nylon 12/9 AN400-04 AS420-04 Please install the silencer responding to it necessary. 13 3.

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2000 SMC CORPORATION All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in Japan. 1st printing January, 2001 D-SMC.L.A.

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8"1/2" 2.5, 4, 6 AS131F-M3 AS121F-M3 M3 x 0.5 6, 10, 16, 20 AS131F-M5 AS121F-M5 M5 x 0.8 6, 10, 16, 20 AS121F-U10/32 AS131F-U10/32 10-32 UNF Tube swivels 360 Universal type permits 360 piping swivel. (1) 20, 25, 32 AS221F-01 AS231F-01 R 1/8 20, 25, 32,

[kPa] 80 Vacuum pressure 60 Suction flow (Silencer exhaust) 40 Air consumption 20 Port exhaust Silencer exhaust 0 0 10 20 30 40 Suction flow [L/min (ANR)] ZK210 Flow-rate Characteristics Exhaust Characteristics 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 Supply pressure [MPa] 0 10 20 30 40 50 60 70 80 90 100 100 Vacuum pressure [kPa] Vacuum pressure [kPa] 80 Suction flow (

side) 1 15 20 D-P5DWL (n2) 2 (n2) 2 15 + 65 n = 2,4,6,8... 20 + 65 n = 2,4,6,8... n 12

MM L1 E1 E1 L1 NDH10 NX U1 ND H10 NZ MM R1 U1 R1 NX A A1 32 40 50, 63 80 100 32 40 50, 63 80 100 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 20 22 28 40 40 30 40 50 65 65 14 19 24 26 26 20 22 28 40 40 30 40 50 60 60 12 16 19 24 34 34 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 10 11 14 20 20 16 19 24 34 34 40 50 64 80 80 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 10 10 14

25 25 30 35 45 60 12,5 12 15 16 20,5 20,5 20 20 130 145 155 170 190 205 245 280 7 9 9 9 12 14 16 18 10 12 12 16 16 20 25 30 65 75 80 90 110 140 164 204 15 18 18 23 23 28 30 35 142 160 170 190 210 230 275 315 45 52 60 70 90 110 130 170 26 28 32 40 50 60 70 90 26 28 32 40 50 60 69,5 89,5 9 12 12 16 16 20 25 30 32 36 45 50 63 75 90 115 10 11 12 13 15 18 15 20 3,2 3,2 3,2 3,2 4,5 6 9 11 144

resred lIr) flor. l{rn/rytle (lloloq l{0. tt odell OEtl l ,5lllx l 20 25.0 0.3.3.J 260 126,000 t3,000 19 58 2,890 0.9 lR0tl.5lltxl 20 25.0 0.08-t.3 260 t26,000 13,000 49 68 6,660 0.9 Offll.5Xtx2 20 50.0 0.3-3.5 520 167.000 t3,000 JI 68 2,890 1.0 tR0tXll.5ltlx2 20 50.0 0.08-1.3 520 1o,000 r3,000 49 80 6,660 L0 0tlSl.5flr3 20 75.0 0.3-3.5 7S0 201,000 ,000 32 80 2,890 1.2 0IIlt2.0tltx2 30 50.0

20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 , , 1 4 3 8 40 40 50 50 55 55 65 85 , Misc.

AS1200-M3 AS1400-M3 AS120-M5 AS220-01AS220-02 AS320-03 AS420-04 10-32UNF Port size M3 x 0.5 2.5, 4, 6 1.05 MPa 0.7 MPa 0.1 MPa M5 x 0.8 1/8 1/4 20, 25, 32, 40 3/8 1/2 6, 10, 15, 20, 25 80, 100 32, 40, 50, 63 Applicable cylinder bore size (mm) 1.5 MPa 1 MPa 0.1 MPa Proof pressure Max. operating pressure Body swivels 360 Swivel type allows free setting of piping.

Free flow Controlled flow Weight (g) Sonic conductance dm3/(sbar) Sonic conductance dm3/(sbar) Critical pressure ratio Critical pressure ratio Model Port size Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) AS1000-M3 AS1000-M5 AS2000-01 AS2000-02 AS3000-02 AS3000-03 AS4000-02 AS4000-03 AS4000-04 AS5000-02 AS5000-03 AS5000-04 0.06 20 0.06 20 M3 x 0.5 4.7 0.15 0.22 80 0.25 90 M5 x 0.8 33 0.7

Note 5) The analog output operates only for real-time flow rate, and does not operate for accumulated flow. 11 Digital Flow Switch Series PF2A For Air Flow Characteristics (Pressure Loss) PF2A703H PF2A706H PF2A712H 20 20 20 Pressure loss (kPa) Pressure loss (kPa) Pressure loss (kPa) 10 10 10 600 0 2400 4800 7200 9600 12000 150 0 600 1200 1800 2400 3000 300 0 1200 2400 3600 4800 6000 Flow

Change of Parameters for Initial Operation 20 Initial Adjustment 20 1.Selection of calibration mode 20 2.

{Rc3/8} FGH200-03 {Rc3/8} FGH300-03 {Rc3/8} FGH200 Series FGH300 Series 0.05 0.05 0.05 Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) 0.01 0.01 0.01 0.005 0.005 0.005 0.001 10 30 50 70 100 0.001 10 30 50 70 100 0.001 10 30 50 70 100 Flow rate (L/min) Flow rate (L/min) Flow rate (L/min) FGH100-04 {Rc1/2} FGH200-04 {Rc1/2} FGH300-04 {Rc1/2} 0.05 0.05 0.05 Pressure drop (MPa) Pressure

04 VX211 VX22 VX23 VX2 4 VX2 50 VX2 60-02 VX2 602 10 15 5 3 5 10 15 20 25 30 4.5 10 15 20 30 40 50 60 3 2 6 30 60 8 25 35 10 20 40 10 35 Flow rate Q kg/h Figures inside [ ] indicate the saturated steam holding heat (kcal/kg).