NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

.:; ;,i=-, ,,.r:,,. ,:: 1::':::,4':::rr.i,;.::'i.ri:;.: 'i.t.i.il:i:i=*1+at=r=i1t:i:i:t:, =!i i:r-i=,, ti ' ' ' ,*r:,:,.r.,:::aa:.:;l.;:i.i.i.tii-,:,'.ar'''ll.'1:1,:,::,1*tlLr:f:fl:a::.:::a::l:a:..:r.:,,::,i,.i,i..,. -r.rLi'g+;,:,=.:11:i:::':itf::1.:i,;=:.:,1 ;,t .,.', , . i:,:*:,'*':,1=]:t*r:1:f?:t:a:l*!a,-,'a*r1]la::1::':..:::.:::.1 . . =r. r::!1::1+ti i:a"a:r:r ia '.

1.63

pc. 5 Note 1) 5 D-M9 10 2 pcs. 5 Note 2) 1 pc.

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'i,-.1-)^' l z N F Noz l!

Compact Cylinder

wire and case) 10 to 60C Ambient temperature Enclosure IEC60529 standard IP67 Lead Wire Lead wire length indication (Example) D-M9BW L Lead wire length Nil M L Z 0.5 m 1 m 3 m 5 m Note 1) 1 m (M): Available D-M9(V) only The D-M9M and M9VM (lead wire length: 1 m) will be available with products delivered from August 2008 onwards.

51

MB1 CA2 CS1 CS2 a (1) BJ-1 is a set of a and b. BJ4-1 (Switch bracket: White) BJ5-1 (Switch bracket: Transparent) (2) BMA2-A(S) is a set of c and d. Band (c) is mounted so that the projected part is on the internal side (contact side with the tube).

Compact Guide Cylinder

Minimum Stroke for Auto Switch Mounting [mm] Auto switch model Number of auto switches Bore size 12 (10 x 2) 16 (12 x 2) 20 (16 x 2) 25 (20 x 2) 32 (25 x 2) 40 (32 x 2) 50 (40 x 2) 63 (45 x 2) 80 (56 x 2) 100 (71 x 2) D-M9V 1 5 2 5 D-M9 1 5 Note 1) 5 2 10 Note 1) 10 D-M9W 1 5 Note 2) 2 10 Note 2) 10 D-M9WV D-M9AV 1 5 Note 2) 2 10 D-M9A 1 5 Note 2) 2 10 Note 2) Note 1) Confirm that it is possible

Rotary Actuator with Solenoid valve Ｃ ( Ｄ ) ＶＲＡ１＊＊＊３０～１００－＊＊Ｚ

Table (17) Parts where grease is to be applied Application of grease Grease 1 Body (inner sliding surface) Piston(Seal groove) 4 Slider(Sliding surface) 7 GR-S-010 9 Tube gasket Piston seal 10 Cushion sealFor with air cushion 36 O-ring 25 26 33 36 9 10 10 1 9 36 4 4 26 33 25 33 26 25 37 - 2. Mount the tube gasket 9 to the left cover 3 to mount to the body 1 .

3

(Clamp part) Note 1) 1.4 1.2 0.9 0.7 Note 1) Refer to Rotary Angle figure.

Rotary Actuator

Description Number Note 1 Body 1 Anodized 2 Cover 2 Black 3 Piston Assy 1 4 Shaft 1 5 Bearing retainer 1 Black No.

CVRA1-E

Table 15 Parts where grease is to be applied Application of grease Grease Body (inner sliding surface) Piston(Seal groove) Slider(Sliding surface) GR-S-010 Piston seal Tube gasket 23 24 25 O-ring 5 11 1 16 12 7 23 24 12 11 4 25 4 24 25 23 -34- (2) Mount the tube gasket 11 to the left cover 3 to mount to the body 1 . (3) Insert the rack 16 and the piston 4 into the body 1 .

Clean Gas Filter

Regarding the TSJ fittings, after tightening the nut by hand, add another 1 1/4 to 1 1/2 turns with a wrench to seal the fitting. In case the fitting is re-installed after filter replacement, first tighten the nut by hand and add another 1/4 to 1/2 turns for sealing. Use the following parts as piping and fittings.

Magnetically Coupled Rodless Cylinder (Slider Type: Slide Bearing)

1/28 Doc. no. CY*S-OM0078P PRODUCT NAME Magnetically Coupled Rodless Cylinder (Slider Type: Slide Bearing) MODEL / Series / Product Number Series CY1S-Z 2/28 Contents Safety Instructions P3P4 1. Mounting P5P7 1-1) Surface for mounting 1-2) Mounting the cylinder 1-3) Minimum necessary space for the installation of the cylinder 2. Operation P7P8 3.

Platform Cylinder Series CXT

The maximum operating pressure for the cylinder alone is 1 MPa.

IN20267

Figure 7-1 MPC Product Elements Drawing N o .

Toggle Type Air Gripper

MH*-OMZ0001 PRODUCT NAME Toggle Type Air Gripper MODEL / Series / Product Number MHT2-32DZ MHT2-40DZ MHT2-50DZ MHT2-63DZ Contents Safety Instructions 1. Product Specifications 1-1. Specifications 2. Operating method or operation 2-1. Design Precautions 2-2. Selection 2-3. Mounting 2-4. Air supply 2-5. Piping 2-6. Operating environment 2-7. Lubrication 3. Maintenance 3-1.

Toggle Type Air Gripper

1 Component Parts No.

CYP_EN

Applicable grease pack Grease pack Weight GR-X-005 5 g 10/11 10-1. Model Selection 1 11/11 10-2.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Operation Maintenance Warning Caution 1. Do not rotate the cover. Rotating the cover when mounting the cylinder or screwing pipe fittings into the ports may cause damage from the cover joint section. 1. Grease packs Order grease for maintenance using the order number below. Grease pack GR-X-005 (5g) Caution 1. Be careful of the snap ring springing out.

Compact Guide Cylinder Series MGQ

D-A9V D-M9V 5 2 pcs. 10 1 pc. 15 10 5 D-M9 2 pcs. 15 10 1 pc. 15 10 D-M9W 2 pcs. 15 10 1 pc. 10 D-M9WV 2 pcs. 10 1 pc. D-Z7 D-Z80 10 5 2 pcs. 15 10 1 pc. D-Y59 D-Y7P 10 5 2 pcs. 15 10 1 pc. D-Y69 D-Y7PV 5 2 pcs. 5 1 pc.

Compact Cylinder with Air Cushion Series RQ

8 9 28 7 57 14 1/8 31.5 8 71 19 11 1/4 Refer to page 784 for details on rod end nut and accessories.