Basic Type/Direct Mount Type

5 !0 i o q u y t r !2 w !1 The above drawing is 15. (3 magnets are used in 10.) CY3B20 to 40 !3 !4 !1 !8 !6 !5 !7 !0 i q o u t y r e w !2 CY3B50, 63 !4 !8 !6 !5 !0 !7 i o q u y t !3 r !2 w !1 Component Parts Replacement Parts/Seal Kit Bore size (mm) 6 10 15 20 25 32 40 50 63 Kit no.

Electric Actuator

/8 words) Up to 42 (when 1 station is occupied by 1 driver), Up to 32 (when 2 stations are occupied by 1 driver), when there are only remote device stations.

modular-press-e

Straight type X 7 7 11 Fitting size 4, 5/32 6 1/4 X 2 2 6 Fitting size 4, 5/32 6 1/4 X X Elbow type Elbow type Y 21.5 22 24.5 X 15.5 15.5 15.5 Fitting size 4, 5/32 6 1/4 Y 21.5 22 24.5 X 10.5 10.5 10.5 Fitting size 4, 5/32 6 1/4 10.5 5.5 X X Y Y 236 Compact Manifold Regulator/Common Supply Type Series ARM11A Replacement Procedure is P.453 Construction Actuators Modular F.R.L.

Modular F.R.L. Pressure Control Equipment

Straight type X 7 7 11 Fitting size 4, 5/32 6 1/4 X 2 2 6 Fitting size 4, 5/32 6 1/4 X X Elbow type Elbow type Y 21.5 22 24.5 X 15.5 15.5 15.5 Fitting size 4, 5/32 6 1/4 Y 21.5 22 24.5 X 10.5 10.5 10.5 Fitting size 4, 5/32 6 1/4 10.5 5.5 X X Y Y 236 Compact Manifold Regulator/Common Supply Type Series ARM11A Replacement Procedure is P.453 Construction Actuators Modular F.R.L.

EX510

SW2 SW1 DIA When the extended diagnostic information is available. When the extended diagnostic informatiion is not available. Light is turned on. Light is turned off. OFF OFF 6 5 4 3 2 1 ON 10 9 8 7 6 5 4 3 2 1 ON ON ON BF When PROFIBUS DP communication is working improperly. When PROFIBUS DP communication is working properly. Light is turned on. Light is turned off.

Servo Motor Controller (24 VDC)

the value for the Pushing force is from 1 to 100).

Air Slide Table Series MXS

5 !7 q !1 !0 !6 !2 !3 !

Rotary Actuator/Vane Style Series CRB1

Applicable shaft type: W CRB2 d1 = CRBU2 (mm) (mm) Q1 = M d1 Size Size 50 63 80 100 CRB1 4 to 5 50 Thread M5 x 0.8 L1 = L1 4 to 6 63 4.2 4.2 4.2 MSU M6 x 1 4 to 6.5 80 5 5 5 M8 x 1.25 5 to 8 100 6.8 Q1 CRJ Symbol: A19 Symbol: A20 CRA1 The rotation axis is reversed. Shorten both long and short shafts. (If shortening the shaft is not required, indicate for dimension X, Y.)

LVQ

Size Symbol 2 2 2 3 3 4 4 5 5 6 6 A B C A B A B A B A B 2 2 3 3 3 4 4 5 5 6 6 1 2 1 2 3 1 2 1 2 1 2 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" LVC LVA LVH LVD With reducer Basic size LVQ Note 1) Select a fitting the same

Digital Flow Switch (Integrated display type) ( compatible)

For example, when analogue output is 1 to 5 V, F.S. = 5[V] 1[V] = 4[V], (ref. 1%F.S. = 4[V] x 1% = 0.04[V]) F.S. (Full span, Full scale) H A function to store the accumulated flow value in the products internal memory. The flow value will be stored at a set time interval of either 2 or 5 minutes.

Flow Control Equipment

Style Inch Millimeter Elbow Universal 2 3 3.2 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 01 23 04 06 08 10 12 03 05 07 09 11 13 4 6 8 10 12 Control Meter out Meter in 0 1 1/8" tube should be used.

Digital Flow Switch ( compatible)

to 5 V) 1 1 V 1.04 V 5 V Voltage output (0 to 10 V) 1, 2 0 V 0.1 V 10 V Current output 1 4 mA 4.16 mA 20 mA Models Minimum value of rated flow range Maximum value of rated flow range PFMC7501 5 L/min 500 L/min PFMC7102 10 L/min 1000 L/min PFMC7202 20 L/min 2000 L/min 1: Analogue output accuracy is within 3%F.S. 2: Set the current to the analogue output from the connected equipment to 20 A

C85

Electroless nickle plating 1 1 1 1 1 1 1 1 1 2 1 1 2 2 1 1 1 2 2 1 1 2 2 q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

HRX-OM-W069

returned when the following request message is received. 1) When unspecified function code is used. 2) An address out of range is specified. 3) The data field is not normal.

C85

Electroless nickle plating 1 1 1 1 1 1 1 1 1 2 1 1 2 2 1 1 1 2 2 1 1 2 2 q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

CG5-S

0.5 0.75 1 JS10-4-070 JS16-5-080 JS20-8-125 JS32-10-125 JS40-14-150 JS63-18-150 1MPa or less 3.5MPa or less -5 to 60C Note 2) Note 1) Use the applicable bore sizes as a guide.

Magnetically Coupled Rodless Cylinder

5 6 7 8 9 1 0 1 11 2 1 31 41 5 7 8 9 10 11 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3R20 CY3R40 500 200 300 100 200 50 100 20 30 40 50 30 10 Useable range 10 5 5 Useable range 1 0 1 2 3 4 5 6 1 7 8 9 10111213 0 1 2 3 4 5 6 7 8 9 1 0 1 11 2 1 31 41 5 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3R25

13

16 12 28 5 47 67.5 29.5 16 12 28 5 47 70.5 30.5 18 12 29 5 50 70.5 30.5 18 12 29 5 50 86.5 39 23 14 35 7 61 86.5 39 23 14 35 7 61 B C D E F G H Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 ZH05BS-01-01 ZH05BL-01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS-01-01 ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 I J K L M N O P Model 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05BS-01-01

30

" L2 M1 1/4" 5/32" O 1/4" 5/16" L1 N 3/8" 5/16" M2 3/8" 1/2" Note 1) D is maximum diameter.

CE

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.