Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

specifications Motor type Battery-less absolute (Step motor 24 VDC) Encoder Battery-less absolute (4096 pulse/rotation) Rated voltage [V] 24 VDC 10% Power consumption [W]*4 38 50 100 Standby power consumption when operating [W]*5 16 44 43 Max. instantaneous power consumption [W]*6 57 123 141 Type*7 Non-magnetizing lock Lock unit specifications Holding force [N] 47 78 157 72 108 216 75 113 225

Precision Regulator

rInterface tInterface with bracket 225 173 130 97 129 169 30 eAFM20-A 41 wAF20-A eAFM30-A qIR100--X170 wAF30-A eAFM40-A 50 qIR20--X170 qIR30--X170 wAF40-A 820 Made to Order IR1000/2000/3000 Series With Digital Pressure Switch 7 Manifold Specifications (Except IR2120 and IR3000 series) 8 With digital pressure switch (model no: ISE30A-01--ML).

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

2.4 JSXD31-C Sm03 500 1/2 9.2 2.4 2.0 2.4 JSXD31-C Sm04 500 Brass Stainless steel 0.02 1.0 Table of UL-compliant Products JSXD Series JSXZ Series JSXM Series Option Replacement Parts 40 Brass Stainless steel 3/8 15 18 0.35 5.0 3.9 4.5 JSXD41-C Sm03 720 1/2 20 5.5 4.6 5.5 JSXD41-C Sm04 720 50 Brass/Stainless steel 3/4 20 38 0.30 9.5 8.2 9.5 JSXD51-C Sm06 880 60 Brass/Stainless steel 1 25 225

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

66.2 123[127.4] 125.2 90.4 127 106.4 MAX.10 141.2 121.2 143 72.7[79.7] Approx. 300 (Lead wire length) Approx. 300 (Lead wire length) Pg7 Applicable cable O.D 3.5 to 7 Refer to page 563 for dimensions with connector cable. 3 83 70 81 68 6 134 121 129 116 8 168 155 161 148 10 202 189 193 180 4 100 87 97 84 5 117 104 113 100 7 151 138 145 132 9 185 172 177 164 11 219 206 209 196 12 236 223 225

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Station 20 372 359 353 340 3 83 70 81 68 6 134 121 129 116 8 168 155 161 148 10 202 189 193 180 Station 2 66 53 65 52 4 100 87 97 84 5 117 104 113 100 7 151 138 145 132 9 185 172 177 164 11 219 206 209 196 12 236 223 225 212 13 253 240 241 228 14 270 257 257 244 15 287 274 273 260 16 304 291 289 276 17 321 308 305 292 18 338 325 321 308 19 355 342 337 324 Station L1 L2 L1 L2 A, B port size

Slider Type Ball Screw Drive/11-LEFS Series

Servo/24 VDC) Electric specifications Encoder Incremental A/B phase (800 pulse/rotation) Rated voltage [V] 24 VDC 10% Power consumption [W] Note 6) 22 38 50 100 Standby power consumption when operating [W] Note 7) 18 16 44 43 Max. instantaneous power consumption [W] Note 8) 51 57 123 141 Type Note 9) Non-magnetizing lock Lock unit specifications Holding force [N] 20 39 78 157 108 216 113 225

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Ui = 28 V li = 225 mA (resistively limited) Pi = 1 W Ci = 0 nF Li = 0 mH 52-SY5000 52-SY7000 52-SY9000 Series 10 to 45C (No freezing) Temperature class T6 Ambient and fluid temperature 10 to 50C (No freezing) Temperature class T4, T5 40C less (at rated) Coil temperature rise 24 VDC (system rated voltage) at 1.1 W Barrier input voltage (non hazardous area) 12 VDC at 0.52 W Coil rated voltage

Micro-Mist Separator with Prefilter Series AMH

63 113 76 119 76 145 90 151 90 166 106 173 106 200 122 253 160 8 12 6 40 66 84 28 5 2.0 27 37 1/4,3/8 172 AMH250 178 1/2 8 12 6 40 66 84 28 5 2.0 27 37 3/8, 1/2 204 AMH350 3/4 210 8 14 7 50 80 100 34 5 2.3 32 37 8 14 7 50 80 100 34 5 2.3 32 37 10 14 9 55 88 110 50 9 3.2 37 37 10 14 9 55 88 110 50 9 3.2 37 37 10 16 9 65 102 130 60 10 4.5 39 37 15 20 11 85 136 180 76 12 4.5 55 37 1/2 3/4 225

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

Controlled flow Free flow Model Port size Weight (g) Sonic conductance dm3/(sbar) Sonic conductance dm3/(sbar) Critical pressure ratio Critical pressure ratio Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) AS2000E-01 AS2000E-02 AS3000E-02 AS3000E-03 AS4000E-02 AS4000E-03 AS4000E-04 90 1/8 340 0.94 250 0.7 115 1/4 1/4 810 2.3 0.35 0.2 810 2.3 130 3/8 1/4 1670 4.6 1670 4.6 225 3/8 1/2 Note

Speed Controller with Residual Pressure Release Valve: Standard Type Series AS



E In-line Type (Metal Body) 1

flow Controlled flow Model Applicable cylinder bore size (mm) Effective area (mm2) Weight (g) Port size Flow rate (/min (ANR)) Flow rate (/min (ANR)) Flow rate (/min (ANR)) AS2000E-01 AS2000E-02 AS3000E-02 AS3000E-03 AS4000E-02 AS4000E-03 AS4000E-04 90 1/8 1/4 1/4 3/8 1/4 3/8 1/2 340 5.2 250 3.8 20, 25, 32, 40 115 32, 40, 50, 63 810 12.3 810 12.3 130 40, 50, 63 80, 100 1670 25.5 1670 25.5 225

Related Products

No gauge Nil 24VDC 5 AC20* 41.5 43 67.5 Pressure gauge (Unit: MPa) G 12VDC 6 AC25* 55 57 78 Pressure gauge (Unit: MPa, psi) P Others 9 AC30* 55 57 78 Specifications AC40* 72.5 75 100.5 Piston B Switching Pressure (Close to Open) AC50* 93 96 131 Model AV5000 AV2000 AV3000 AV4000 AC55* 98 96 131 Outlet pressure psi (MPa) 3/4 Port size 1/4 1 3/8 1/2 75 (0.5) AC60* 98 101 131 Proof pressure 225

Battery-less

humidity range [%RH] 90 or less (No condensation) Motor size m28 m42 m56.4 Motor type Battery-less absolute (Step motor 24 VDC) Electric specifications Encoder Battery-less absolute Power supply voltage [V] 24 VDC 10% Power [W]*5 *7 Max. power 51 Max. power 57 Max. power 123 Max. power 141 Type*6 Non-magnetizing lock Lock unit specifications Holding force [N] 20 39 47 78 157 72 108 216 75 113 225

Tie-rod Type Hydraulic Cylinder

90 35.5 16 13 35 35 80 32 27 14 231 90 125 34 80 M14 x 2 M27 x 2 170 38 6.5 140 19 27 34 16 140 112 35.5 16 15 35 35 100 32 27 16 247 112 160 43 100 M16 x 2 M33 x 2 197 42 9 174 22 28 38 18 174 140 45 18 17 40 38 110 36 36 18 275 140 (mm) Without rod boot With rod boot Bore size (mm) P R X Y S T V W H ZZ e f h ZZ l 40 7.5 8 1/4 37 27 8 66 207 55 25 92 233 106 11 50 10 9 3/8 43 30 10 73 225

ISO Standard Hydraulic Cylinder

CHSG Series Nominal pressure: 16 MPa Bore size (mm): 32, 40, 50, 63, 80, 100 331 ISO Standard Hydraulic Cylinder CHS Series Nominal pressure 10 MPa/16 MPa 76 Reduced projection area: 76% or less Reduced overall length CHSD/Basic A + Stroke CHSD/CHSG CH2 CH2 A + Stroke Tube size (mm) Overall length (A size) Maximum weight: no more than 50% or 52% of CH2 series CHSD CHSG CH2 163 177 199 225

Smooth Cylinder/Low Speed Cylinder

Dimensions S + Stroke ZZ + Stroke S ZZ Bore size (mm) 40 94 156 50 100 169 63 108 180 80 126 214 100 136 225 Add 10 mm to S and ZZ dimensions of the double acting, single rod type on pages 1217 to 1221 for the dimensions for each mounting bracket other than the basic style. 1216 Smooth Cylinder Series CA2Y Dimensions: 40 to 100 Basic style: CA2YB 4 x J 2 x P (Rc, NPT, G) MM Width across

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

100 mm stroke cylinder MY CY1H Available bore sizes 10, 15, 25 CY CY1H CY1F MG Standard stroke (mm) Maximum stroke Cushion Piping directions Bore size (mm) Model Height Overall length mm mm 150 200 250 300 350 400 450 500 550 600 50 100 CX 10 15 25 15 10 25 240 350 310 For 100mm stroke cylinder Series Series 10 500 CY1F CY1H CY1F CY1H MY2H Concentrated piping on right 28 34 46 46 63 198 225

Low Profile Guide Type

Data 1541 Low profile, Compact body and Lightweight Low profile, Compact body and Lightweight Compact body Compact body Low profile Low profile Height reduced by 29% Height reduced by 29% Overall length reduced by 31% Overall length reduced by 31% CY1F MY2H CY1H CY1H CY1F Height mm Series mm Overall length 15 25 10 15 10 25 240 350 310 Series CY1F CY1H CY1F CY1H MY2H 28 34 46 46 63 198 225

VK300

port) (Lead wire length) 2 x 4.5 4 x Rc1/8 8 (P, R port) (Mounting hole) 2A 2A 2A 34 2.3 20 7 (Pitch) 7 44.5 (Station 1) (Station n) 4 x M3 x 0.5 depth 6 (Bracket mounting screw) L Dimension n L n: Stations 1 35 27 20 396 388 13 32 51 70 89 108 127 146 165 184 203 222 241 260 279 298 317 336 355 374 2 54 46 3 73 65 4 92 84 5 111 103 6 130 122 7 149 141 8 168 160 9 187 179 10 206 198 11 225

Manifold Specifications

M5 x 0.8 (PE port) MAX. 5.5 (One-touch fitting) VK VZ VF (Pitch) VFR (Mounting hole) (1(P), 3/5(R) port) 4-Rc 1/4 VP4 VZS G: 300 mm H: 600 mm VFS (Lead wire length) VS4 VQ7 EVS VFN 2n-One-touch fitting (4(A), 2(B) port) Applicable tubing model: T0604 (Pitch) (mm) Stations 2 3 65 52 81 68 20 353 340 L1 L2 4 97 84 5 113 100 6 129 116 7 145 132 8 161 148 9 177 164 10 193 180 11 209 196 12 225

Compact and Lightweight

Description Material Note 1 Body PBT 2 Diffuser PPS Type S: Brown, Type L: Black 3 Adapter PBT 4 Standard bracket PBT Detachable (Accessory) 5 O-ring NBR Grease applied 6 Cassette 7 Seal NBR Grease applied 8 Screw-in stud Brass Electroless nickel plating 225 B ZH Series Exhaust Characteristics / Flow Rate Characteristics (Representative value) (Flow rate characteristics: Supply pressure: