Fieldbus System

Connector for unit (Plug) 5 t r t r EX600-AXA EX600-AYA EX600-AMB End Plate q t No.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CBA2 Standard type CA2 Standard type CA2W Standard/Non-rotating rod CA2K Standard/Non-rotating rod CA2KW Low friction CA2
Q End Lock Cylinder

Auto switch Mounting B L F G C D T Basic Axial foot Front flange Rear flange Single clevis Double clevis Center trunnion Tube material Nil F Aluminum tube Steel tube Nil Without auto switch Select an applicable auto switch part number from the table below. D-Z7, Z80, Y59, Y69, and Y7 are not mounted and are supplied loose.

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Reduced outgassing Resin materials eliminated Laser marking is employed for the model designation. o u d t g e 2 a c s u s d i Reduction of outgassing due to surface treatment e n o u d t g R e g a 1 c s u s d i e n R g All the external parts (made of aluminum alloy) such as the body and slide table are electroless nickel plated.

MU

switch model D-A7H D-A80H D-F7 D-F7V D-J79 D-F7W D-F7WV D-J79W D-F7BAL D-F7BAVL D-F79F D-A7H D-80H D-F7 D-J79 F-F7W D-79W D-F7NTL D-F79F D-F7BAL D-A73C D-A80C D-J79C D-A79W D-P5DWL Equivalent bore size (mm) D-F7NTL D-A7 D-A80 D-A73C D-A80C D-F7V D-F7WV D-F7BAVL D-J79C D-A79W D-A7 D-A80 D-P5DWL CUJ A 4.5 (7) 4.5 (7) 5 (10) 6.5 (11.5) 7 (12) A 10 (12.5) 10 (12.5) 10.5 (15.5) 12 (17) 12.5 (

MU

Its Mounting Height Proper Auto Switch Mounting Position Auto Switch Mounting Height Auto switch model D-A7H D-A80H D-F7 D-F7V D-J79 D-F7W D-F7WV D-J79W D-F7BAL D-F7BAVL D-F79F D-A7H D-80H D-F7 D-J79 F-F7W D-79W D-F7NTL D-F79F D-F7BAL D-A73C D-A80C D-J79C D-A79W D-P5DWL Equivalent bore size (mm) D-F7NTL D-A7 D-A80 D-A73C D-A80C D-F7V D-F7WV D-F7BAVL D-J79C D-A79W D-A7 D-A80 D-P5DWL CUJ A

VM

Connection thread R Applicable tubing Bracket mounting dimensions B S (Width across flats) Weight (g) O. D.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

P R R P R A B A B A B A B A B 67.1 [69.3] 49 4-4.5 (For mounting) 1/8 (P, R port) Manual override M5 x 0.8 (A, B port) L1 L2 9 Built-in one-touch fitting (Station n) (Station 1) (Light/surge voltage suppressor) 48.6 [55.6] + + + + + 20 (3.2) 52.8 L plug connector (L) M plug connector (M) M8 connector (W0) DIN terminal (D) Approx. 300 (Lead wire length) 0.6 141.2 Max. 10 125.2 86.1 Pg7 Applicable

CLA

ack) 0-A54, D-B54, D-A44(C), D-A34(C) 0-A67 Zener <;Siode Reed SWitch , Blue b_ ~ue a, (black) <'ad) H Surge ab$Ol'bef D-A56 D-A33(C) :R~ ~tC h ---R;~~~r-: I-) ~: ( ';' ) L 0 ' , ' : Zener diode : ,--_.

“

r r r q w e OUT side passage IN side passage y u t OUT IN i o Basic type (Knob): IR32l0-A e e r q r w e OUT side passage IN side passage t u OUT IN o i Basic type (Knob): IR32l1 2-A e e r q r w e OUT side passage IN side passage t u OUT IN o i 782 Regulator IR1200-A/2200-A/3200-A Series Dimensions Basic type (Knob): IR12l0-01l-A 10.5 42 ARJ 1.6 Bracket AR425 to 935 Mounting hole for hexagon

Modular Type Lubricators Series AL

D E R L U B R I C AT O R S E R I E S NAL NAL800-N12 (1 14 NPT) NAL800-N14 (1 12 NPT) NAL900-N20 (2 NPT) T E C H N I C A L SPECIFICATIONS D I M E N S I O N S L U B R I C AT O R NAL800 NAL900 Max Supply pressure 1.5MPa / 220PSI Max Operating Pressure 1MPa / 145PSI Operating Temp Range 5~60C /40~140F Recommended lubricant Turbine oil #1 (ISO VG32) Bowl Polycarbonate Pipe Size 114, 112 2 Min

VZ1000

Note EVS Manifold block assembly VZ1000-1A-1 q D side For D side, with D-sub connector and P/R port with One-touch fitting for 6 SUP/EXH block assembly SUP/EXH block assembly VZ1000-2A-1D w VFN For U side, with D-sub connector and P/R port with One-touch fitting for 6 DIN rail VZ1000-2A-1U e End block assembly End block assembly For D side For U side Without D-sub connector For indicated

XL

Example) D-F9NL Main switch circuit Main switch circuit Output Black [White] () Blue [Black] D-F9P (+) Brown [Red] Auto Switch Dimensions (mm) 1in=25.4mm Output Black [White] D-F9N, D-F9P, D-F9B () Blue [Black] D-F9B (+) Brown [Red] L dimension (mm) Part No.

High Vacuum Angle Valve, XL Series

Example) D-F9NL Main switch circuit Main switch circuit Output Black [White] () Blue [Black] D-F9P (+) Brown [Red] Auto Switch Dimensions (mm) 1in=25.4mm Output Black [White] D-F9N, D-F9P, D-F9B () Blue [Black] D-F9B (+) Brown [Red] L dimension (mm) Part No.

HRX-OM-X037

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-14 Connection of RS-232C 3.3.10 Ethernet Modbus/TCP Communication wiring This product can operate the following by Ethernet Modbus/TCP communication.

D. P. Lube ALD600/900 Series

Lube Unit/ALDU600-06 to 10, ALDU900-12 to 20 Float switch mounting position Mounting thread M12 R 3.2 S 40 Q IN P M N M L A B C E E F G K J (Bracket mounting dimensions) H D S Bracket (Option) Panel (Option) 6 x 17 A B C D E F G H J K L M N P Q R S Model Port size ALDU600-06 ALDU600-10 ALDU900-12 ALDU900-14 ALDU900-20 289 291.2 453 453 476 24.5 13.6 51 45.5 14.5 69.5 78.2 89 94.5 102.5 4

Manifold Specifications

Note EVS Manifold block assembly VZ1000-1A-1 q D side For D side, with D-sub connector and P/R port with One-touch fitting for 6 SUP/EXH block assembly SUP/EXH block assembly VZ1000-2A-1D w VFN For U side, with D-sub connector and P/R port with One-touch fitting for 6 DIN rail VZ1000-2A-1U e End block assembly End block assembly For D side For U side Without D-sub connector For indicated

CHKD/CHKG

Auto Switches: Proper Mounting Positions and Mounting Heights for Stroke End Detection 32 to 100 20, 25 B B D-M9 D-M9W D-M9A D-A9 D-M9 D-M9W D-M9A D-A9 D-Y5 D-Y7 D-Y7W D-Y7BA D-Z7 D-Z80 A B MA B MA A D-M9V D-M9WV D-M9AV D-Y6 D-Y7V D-Y7WV D-A9V D-M9V D-M9WV D-M9AV D-A9V A A Auto Switch Proper Mounting Positions (mm) Solid state auto switch Reed auto switch D-Y59/Y69 D-Y7/Y7V D-Y7W/Y7WV D-Y7BA

7.4

VQ1000-FPG-C4M5-D: 6 sets Double check block 757 S0700 Series Construction Body Ported Construction 2(B) (A)4 S0716 2-Position Single r u e w q 3(R2) (R1)5 1 (P) t y i 2-Position Double S0726 2(B) (A)4 r u e w q 3(R2) (R1)5 1 (P) t y i 3-Position Closed Center S0736 r u e w q 2(B) (A)4 (R1)5 1 (P) 3(R2) t y i 4-Position Dual 3-Port Valve S07A6 r u e w q 2(B) 4(A) 5(R1) 3(R2) 1(P) N.C. + N.C

Modular Type Filter Regulator Series AW

R Z W N AWD30 to 40 Accessory/Optional specifications B C D E G H 1 2 6 8 C J N R W Z With bracket (with set nut) Accessories Float type auto drain (N.C.)

PFxx-OMY0005

Digital flow switch Air combination Spacer Spacer with bracket Pipe adapter PF3A801H AC30#-D Y300-D Y300T-D E300-#03-D PF3A802H AC40#-D Y400-D Y400T-D E400-#04-D : For more information about the options, refer to our website (URL https://www.smcworld.com). -20No.PF-OMY0005-A Do not apply torsion or bending moment other than the weight of the product itself.