Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Port size Symbol Cylinder side In the side of solenoid valve M5 01 Elbow M5 x 0.8 R 1/8 M5 x 0.8 Rc 1/8 Rc 1/4 Note 1) 02 R 1/4 Rc 3/8 Note 2) 03 04 F01 Rc 3/8 Rc 1/2 G 1/8 G 1/4 Note 1) R 3/8 R 1/2 R 1/8 Caution Control F02 R 1/4 Meter-out Meter-in Be sure to read before handling.

Compact Manifold Regulator

Note 3) This option is available with the digital pressure switch. 732 Compact Manifold Regulator ARM11A/B Series Regulator Block ARM11B 1 A R 06 Z A q w e r u t y N Individual Supply Type ARJ 1.

Power Clamp Cylinder

30 to 90 CKZT80-A015B 30 to 90 80 CKZ80-42 3680N-R A B C 30 to 105 CKZ80-42 3680N-R D E F 30 to 105 For mounting bolt, a hexagon socket head cap screw and a spring washer No. 2 are recommended.

IIIIIII

7\ 1 4 2 (361 1 2 6 (321 1 2 0 ' L V (6) Nvdtls(,.Nol6 A B c D E F o H K M N P R 'l 57 140) 0.71 (18) 0 8 9 22.5\ 1 4 2 (36) r 2 6 ta2\ 1 2 0 130 5' , 2 ' (6) 5.87 149 2 467 ( 1 1 8 7 ) r . 1 8 1 1 . 2 O rml IAn q 0.ot l l 5 l.1i a3t 1.09 127 7l Millimetsrs in Parentheses '75 PSIG (5 Kgt/cm2) Distributed by: SM.9.

Mechanical Valves Series NVM, NVFM, NVZNI

7\ 1 4 2 (361 1 2 6 (321 1 2 0 ' L V (6) Nvdtls(,.Nol6 A B c D E F o H K M N P R 'l 57 140) 0.71 (18) 0 8 9 22.5\ 1 4 2 (36) r 2 6 ta2\ 1 2 0 130 5' , 2 ' (6) 5.87 149 2 467 ( 1 1 8 7 ) r . 1 8 1 1 . 2 O rml IAn q 0.ot l l 5 l.1i a3t 1.09 127 7l Millimetsrs in Parentheses '75 PSIG (5 Kgt/cm2) Distributed by: I I I SM.9.

ARM10/11

Torque recommended: (R 1/8: 7 to 14 Nm).

ARM10/11

Torque recommended: (R 1/8: 7 to 14 Nm).

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

20 11 16 23 40 60 60 AC-A1bore size +0.027 0 80 M12 x 28 31 100 65 28 16 R 22 13 18 26 45 67 75 U D drill through C 0.3 +0.033 0 100 M12 x 32 35 118 80 28 17 R 24 13 20 30 50 74 90 F E +0.033 0 125 M14 x 36 41 140 90 31 20 R 26 15 22 30 55 81 112 0 0.3 G A +0.033 0 160 M16 x 40 54 174 100 34 22 R 30 17 25 40 65 95 140 H B Knuckle pin Material: Carbon steel C (f8) Order no.

AZ1000

Unit psig/bar MPa Code r e No code MPA Sample Order Number Port qIN wOUT eGauge port (Inlet) rGauge port (Outlet) w q AZ1402TS e q FV4 FV4 FV4 FV4 w FV4 FV4 FV4 FV4 r 3) Pressure gauge unit MPa or psig/bar selectable.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

P. 2-3-44 P. 2-3-46 P. 2-3-47 P. 2-3-48 C6 L6 P R D side SMC AN200 U side Individual EXH spacer SSQ1000-R-3Special wiring specifications (-K) Back pressure check valve (-B) SSQ1000-BP Built-in silencer (-S) P. 2-3-49 P. 2-3-45 P. 2-3-46 P. 2-3-47 C6 L6 D-sub connector Terminal no.

VZS

Rc1 8 VVZS2000-R-01-1 VVZS2000-R-01-2 Body type Plug-in type VVZS2000-20A-1 Non plug-in type VVZS2000-20A-2 Part no. Interface regulator (P port regulation) Spacer Interface regulators can be placed on top of the manifold block to reduce the pressure of each of the valves.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

Rotation speed (r/min) 262144(pulse) 60 Model loop gain setting Droop pulse value (pulse) 6 12 7. SPECIAL ADJUSTMENT FUNCTIONS 7.

39

2 @1 @2 w r Description Replaceable kits list Component parts No.

Stainless Steel 316

(In case of R) 8 20.9 21.6 45 25.9 27.4 15 1/4 14 24.9 L1 Applicable tubing 56 27.9 29.1 3/8 M 69 27.7 30.7 1/4 10 23 35.2 18 17 27.8 D 73 29.7 32.4 3/8 A 94 30.7 35.1 3/8 L2 12 24.8 50.2 20.8 31.3 H 121 34.7 37.2 22 1/2 Connection thread (with sealant) Reference dimensions after installation of R thread Note 1) D is maximum diameter.

CNG

Taper ring Steel balls P f R R Enhanced locking efficiency Greater locking efficiency as well as stable locking and unlocking operation has been achieved by arranging a large number of steel ball bearings in circular rows. The floating taper ring provides alignment and stable locking force with respect to piston rod eccentricity.

Cylinder with Lock Series CNG

Taper ring Steel balls P f R R Enhanced locking efficiency Greater locking efficiency as well as stable locking and unlocking operation has been achieved by arranging a large number of steel ball bearings in circular rows. The floating taper ring provides alignment and stable locking force with respect to piston rod eccentricity.

Series AP3100

q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.

Table of Contents - Tubing

Color indication Longer lengths available upon request Color Black White Red Blue Yellow Green Symbol B W R BU Y G The inner tubing are all black.

Programless controller Step motor (servo 24 VDC)

LEMB25 / LEMB32 LEMC25 / LEMC32 LEMH25 / LEMHT32 LEMH25 / LEMHT32 Speed [mm/s] Acceleration Speed Acceleration [mm/s2] [mm/s] [mm/s2] 0 48 250 48 250 1 75 500 75 500 2 100 1000 100 1000 3 150 1500 150 1500 4 200 2000 200 2000 5 250 2500 300 2500 6 300 3000 400 3000 7 350 4000 500 4000 8 400 5000 600 5000 9 450 6000 800 6000 10 500 7500 1000 7500 11 600 10 1200 10 12 700 12500 1400 12500 13

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

Series 0.5 316 SS Knob with a raised section on top (indication window) 250 (1.7) AK3652 0.29 P.3 Compression Rc, R, NPT Female thread type Compression AK4652 Note) Cv calculation based on SEMI Standard Series AZ For details, refer to the product catalog available on SMC website.