Mounting: Basic Style, Bore Size: 20mm, Port Thread: 20 & 25 Bore: M5 x0.8, 32-50 Bore: Rc Thread, Stroke: 350mm, Option: Rear Plate, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Speed Control Type: -, Applicable Tubing: -, Suffix: -
Mounting: Basic Style, Bore Size: 20mm, Port Thread: 20 & 25 Bore: M5 x0.8, 32-50 Bore: Rc Thread, Stroke: 400mm, Option: Rear Plate, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Speed Control Type: -, Applicable Tubing: -, Suffix: -
Mounting: Basic Style, Bore Size: 20mm, Port Thread: 20 & 25 Bore: M5 x0.8, 32-50 Bore: Rc Thread, Stroke: 75mm, Option: Rear Plate, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Speed Control Type: -, Applicable Tubing: -, Suffix: -
Stainless Steel 316 (In case of R) 8 20.9 21.6 45 25.9 27.4 15 1/4 14 24.9 L1 Applicable tubing 56 27.9 29.1 3/8 M 69 27.7 30.7 1/4 10 23 35.2 18 17 27.8 D 73 29.7 32.4 3/8 A 94 30.7 35.1 3/8 L2 12 24.8 50.2 20.8 31.3 H 121 34.7 37.2 22 1/2 Connection thread (with sealant) Reference dimensions after installation of R thread Note 1) D is maximum diameter.
Taper ring Steel balls P f R R Enhanced locking efficiency Greater locking efficiency as well as stable locking and unlocking operation has been achieved by arranging a large number of steel ball bearings in circular rows. The floating taper ring provides alignment and stable locking force with respect to piston rod eccentricity.
Taper ring Steel balls P f R R Enhanced locking efficiency Greater locking efficiency as well as stable locking and unlocking operation has been achieved by arranging a large number of steel ball bearings in circular rows. The floating taper ring provides alignment and stable locking force with respect to piston rod eccentricity.
q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.
Color indication Longer lengths available upon request Color Black White Red Blue Yellow Green Symbol B W R BU Y G The inner tubing are all black.
LEMB25 / LEMB32 LEMC25 / LEMC32 LEMH25 / LEMHT32 LEMH25 / LEMHT32 Speed [mm/s] Acceleration Speed Acceleration [mm/s2] [mm/s] [mm/s2] 0 48 250 48 250 1 75 500 75 500 2 100 1000 100 1000 3 150 1500 150 1500 4 200 2000 200 2000 5 250 2500 300 2500 6 300 3000 400 3000 7 350 4000 500 4000 8 400 5000 600 5000 9 450 6000 800 6000 10 500 7500 1000 7500 11 600 10 1200 10 12 700 12500 1400 12500 13
Series 0.5 316 SS Knob with a raised section on top (indication window) 250 (1.7) AK3652 0.29 P.3 Compression Rc, R, NPT Female thread type Compression AK4652 Note) Cv calculation based on SEMI Standard Series AZ For details, refer to the product catalog available on SMC website.
r r r q w e OUT side passage IN side passage y u t OUT IN i o Basic type (Knob): IR30l0-A e e r q r w e OUT side passage IN side passage t u OUT IN o i Basic type (Knob): IR30l1 2-A e e r q r w e OUT side passage IN side passage t u OUT IN o i 800 Precision Regulator IR1000-A/2000-A/3000-A Series Dimensions Basic type (Knob): IR10l0-01l-A 10.5 42 ARJ 1.6 Bracket AR425 to 935 Mounting hole
A 40 150 C73 21 C D M 2 R A 40 150 C73 Number of auto switches Mounting style 2 pcs. 1 pc.
Rod type / LEY Series 2.1 Specification LEY63 (Top/Parallel) LEY32 LEY32D Model LEY25 (Top/Parallel) / LEY25D(in-line) (Top/Parallel) (in-line) LEY63D (in-line) 30, 50, 100, 150, 200, 30, 50, 100, 150, 200, 30, 50, 100, 150, 200, 100, 200, 300, 400, 500, 600, 250, 250, 250, Stroke[mm] 700, 800 300, 350, 400, 500 300, 350, 400, 500 300, 350, 400 Horizontal Note 1) 18 50 50 30 60 60 30 60 60
Bar + High-voltage power supply module + Controller IZT 40 X14 34 D 1 6H R F IZT X14 42 34 D 1 6H R F Bar IZTB X14 40 34 D 1 6H R F Standard model no. e pages 17 and 18 Bar length Type 40 411 Standard Symbol 16 22 34 40 46 58 64 82 112 130 160 190 232 250 Length [mm] 160 220 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 42 Non-standard The bar of non-standard length is available.
Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and
Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and
Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa. a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e i t n 1 r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and
d 5 i e n R g All the external parts (made of aluminum alloy) such as the body and slide table are electroless nickel plated.
Note AM IDG30/30H/30L IDG50/50H/50L IDG60/60H/60L/60S IDG75/75H/75L/75S IDG100/100H/100L/100S q w e r t Body Aluminum alloy Platinum silver coated Misc. Case Stainless steel Orifice Stainless steel Holder Aluminum alloy Aluminum Silencer Resin + Copper alloy Replacement Parts Part no. No.
Cylinder stroke (mm) Long stroke (mm) 35, 40, 45, 50, 75, 100 Bore size (mm) Standard stroke (mm) 5, 10, 15, 20, 25, 30 Action D Double acting 12, 16 75, 100, 125, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 20 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 25 Applicable Auto Switches/Refer to p.5.3-2 for further information on auto switch.