3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21 VKF (A) 2 (A) 2 VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts Description Material Note No.
Standard Strokes Symbol Rubber bumper Bore size [mm] Standard stroke [mm] 12, 16 10, 20, 30, 40, 50, 75, 100, 125, 150 20, 25 20, 30, 40, 50, 75, 100, 125, 150, 175, 200 32 to 50 25, 50, 75, 100, 125, 150, 175, 200 Manufacturing of Intermediate Strokes Refer to page 24 for cylinders with auto switches.
Note9) Compact 22 Basic 11 22 Standby power consumption when operating [W] Note10) Compact 16 Max. instantaneous power Basic 22 55 consumption [W] Note11) Compact 45 Model LEPY 6 LEPY 10 Stroke [mm] 25 50 75 25 50 75 Weight [kg] Basic 0.24 0.29 0.34 0.47 0.55 0.65 Compact 0.41 0.49 0.59 Note 1) Pushing force accuracy is LEPY6: 30% (F.S.), LEPY10: 25% (F.S.).
NA Enclosure IP67 Refer to Note 1) of the w SI unit specifications. w q e r y t u i q Series t P, E port location r Valve stations 1 2 3 U D B For 32-output SI unit 10-SV1000 10-SV2000 10-SV3000 U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 20 stations) Symbol 02 Stations Note 2 stations Double wiring Note 1) w SI unit specifications 16 02 16 stations y SUP/EXH block
7 w i t q A A @7 #3 @9 #0 #1#2 !8 !9 #4 @8 @6 !4 !5 Description Material Note Component Parts Description Material Note Component Parts No.
D) In the state of C), adjust shim w so that the arm side block contacts the workpiece.
Not applicable for types: Double rod (W), Trunnion (T), XC8, XC9, XC10, XC11, Over sized rod (XB5) with front mounts.
C 8 8 8.5 8.5 D 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 Mounting bolt M3 X 50l M3 X 60l M3 X 50l M3 X 60l M5 X 75l M5 X 85l M5 X 75l M5 X 85l M5 X 85l M5 X 95l M5 X 75l M5 X 85l M6 X 95l M6 X 130l M8 X 100l M8 X 130l MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20 MKB50-50 MKB63-20 MKB63-50 PTo attach and detach
Note 1) Note 2) Maximum available stroke (mm) Bore size (mm) 20 25 32 40 Standard stroke (mm) Model Long stroke (mm) 1 pc. 201 to 350 301 to 400 301 to 450 301 to 800 25, 50, 75, 100, 125, 150, 200 D-C7, C8 D-B5, B6 D-H7 D-G5N 10mm 15mm 1500 25, 50, 75, 100, 125, 150, 200, 250, 300 15mm 10mm 20mm 20mm D-B59W D-H7LF Note 1) Intermediate strokes other than the above are produced upon receipt
1.0 0 2 6 4 8 1.0 100 0 25 50 75 10 Input signal (%F.S.)
L x 100 L 100 100 (mm) (mm) Cylinder model C D Mounting bolt size Cylinder model C D Mounting bolt size CQUB32-5 CQUB40-5 M5 x 65 L M5 x 65 L 65 65 -10 -10 x 70 L x 70 L 70 70 -15 -15 x 75 L x 75 L 75 75 -20 -20 x 80 L x 80 L 80 80 -25 -25 x 85 L x 85 L 85 85 -30 -30 x 90 L x 90 L 90 90 10.5 10.5 -35 -35 x 95 L x 95 L 95 95 -40 -40 x 100 L x 100 L 100 100 -45 -45 x 105 L x 105 L 105 105
S Bore size/Stroke (mm) n pcs. n (25), 50, 75, 100 10 (25), 50, 75, 100, 125, 150, 175, 200 16 Auto switch (25), 50, 75, 100, 125, 150, 175, 200 20 Nil Without auto switch (25), 50, 75, 100, 125, 150, 175, 200 25 For the applicable auto switch model, refer to the table below. (25), (50), 75, 100, 125, 150, 175, 200 32 Note1) For the strokes indicated in the parentheses of the 10, 16 and 25
S Bore size/Stroke (mm) n pcs. n (25), 50, 75, 100 10 (25), 50, 75, 100, 125, 150, 175, 200 16 Auto switch (25), 50, 75, 100, 125, 150, 175, 200 20 Nil Without auto switch (25), 50, 75, 100, 125, 150, 175, 200 25 For the applicable auto switch model, refer to the table below. (25), (50), 75, 100, 125, 150, 175, 200 32 Note1) For the strokes indicated in the parentheses of the 10, 16 and 25
MGQ 12, 16 M L 10, 20, 30, 40, 50, 75, 100 20, 30, 40, 50, 75, 100 125, 150, 175, 200 M L MGQ 20, 25 MGJ MGQ 32, 40 50, 63 80, 100 25, 50, 75, 100, 125 150, 175, 200 M L MGP MGQ OUT(N) IN(N) Theoretical Output (N) Bore size (mm) MGG Operating pressure (MPa) Rod size (mm) Operating direction Piston area (mm2) 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 MGC Made to Order Specifications (For details
P FR (2) 6 8 12 16 20 25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100, 125, 150 FP Note 2) W/ end lock is not available in Series MXQ6.
Standard Strokes Standard strokes (mm) Bore size (mm) 20 32 40 50 63 80 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 JIS symbol 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Double acting/Double rod 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25,
85.5 16 177.5 190.5 212.5 223 17 188 201 225 235.5 18 198.5 211.5 237.5 248 19 209 222 250 260.5 20 219.5 232.5 262.5 273 7 83 96 125 135.5 8 93.5 106.5 137.5 148 9 104 117 137.5 148 10 114.5 127.5 150 160.5 11 125 138 162.5 173 12 135.5 148.5 175 185.5 13 146 159 187.5 198 14 156.5 169.5 200 210.5 15 167 180 200 210.5 3 41 54 75 85.5 5 62 75 100 110.5 6 72.5 85.5 112.5 123 4 51.5 64.5 87.5
D,E,E1,E2,E3,E4,G,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D Contents Page 1.
40 145 145 115 190 100 230 110 238 133 261 M14 x 1.5 Up to 1400 M30 x 1.5 Lube Non-lube Air-hydro 50 47 36 90 59 43 14 19 20 16 15 31 24 98 35 82 75 40 160 161 128 212 112 255 110 232 133 255 M14 x 1.5 Up to 1400 M30 x 1.5 0.2 x Stroke 56 53 40 90 59 43 14 19 20 17 36 26 39 82 75 40 180 182 144 236 118 275 106 120 252 141 273 M16 x 1.5 Up to 1400 18.5 M36 x 1.5 63 60 45 70 48 17 24 25 20
Bellows seal O-ring seal Standard 468 Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series How to Order XLAQ M9N 16 A q w e r t y w Indicator/Actuator port direction q Flange size Size 16 25 40 50 Symbol Nil A F G J K L M Indicator Without indicator Actuator port direction Rear flange surface Flange side Flange side Left flange surface