TABLE OF CONTENTS

HOLES #6-32 UNC THD. X .22 (5.6) MFT 2 PLACESAS SHOWN Mtg. HOLES #6-32 UNC THD.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

plug connector (M) (A) 2 VKF 1 (P) 3 (R) M plug connector (M) VQZ N.O.

Digital Gap Checker

Detection nozzle: 1.5 Piping: F type: 4 x 2.5 tube 1 m, 3 m, 5 m Test conditions G, H type: 6 x 4 tube 1 m, 3 m, 5 m Supply pressure: 200 kPa ISA3-F ISA3-G Piping length: 1m, 3m, 5m Piping length: 1m, 3m, 5m : When the display value becomes 9 or lower, "0" is displayed. "0" and "10" are displayed near "10". This does not affect the performance.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

32 24 15 17 9 1/8 (P, R port) 42 L plug connector (L): SYJ54-L-01 M plug connector (M): SYJ54-M-01 DIN terminal (D): SYJ54-D-01 M8 connector (W0): SYJ54-W0-01 Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 82.4 74.9 MAX. 10 74.6 49.6 [56.6] 63.6 34.2 48.5 54.1 M8 x 1 36.6 Approx. 300 (Lead wire length) 60.7 [67.7] Pg7 6 6 6 6 65.5 [67.7] 55.7 [57.9] 75.5 64.6 57.2 50.7 42 42

HRX-OM-O021

OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-O021 Contents 6.2.1 Option M [DI water (Pure water) piping] . 6-2 6.3 Optional Accessories [Electric resistivity /conductivity sensor set] . 6-2 6.3.1 Optional Accessories [Electric resistivity/conductivity

Digital Flow Switches, Series PF2A, Series PF2W

MULTI COUNTER:CEU5 UP M/C COUNT PRESET FUNC. LEFT RIGHT DOWN SEL.

240

Note 6) The speed and force may change depending on the cable length, load and mounting conditions. Furthermore, if the cable length exceeds 5 m, then it will decrease by up to 10% for each 5 m. (At 15 m: Reduced by up to 20%) Note 7) A reference value for correcting an error in reciprocal operation.

Series PF2W Digital Flow Switch For Water

Mount the switch in a locations where there is no vibration greater than 98 m/s2 or impact greater than 490 m/s2. 3. Do not use in an area where surges are generated.

Modular F.R.L. Unit

N.C. 0.2MPa Note 2) AD38 AD38NNote 6) AD38 AD38NNote 6) AD48 AD48NNote 6) AD48 AD48NNote 6) Note 3) AD37 AD37NNote 6) AD37 AD37NNote 6) AD47 AD47NNote 6) AD47 AD47NNote 6) Float type auto drain Y300 IS1000M-30 Y300 IS1000M-30 Y400 IS1000M-40 Y500 IS1000M-50 Spacer Pressure switch Note 5) Note 4) Note 5) 01 (02) Y310(01) 02 Y510(02) 03 Y310(01) 02 Y410(02) 03 T-interface Y210Note 5) 02 03

Non-contact Gripper

P PL M ML C H D L XT661-4C-X321 M5 x 0.8 5 M4 x 0.7 8 32 6 39 XT661-6C-X321 M5 x 0.8 6 M4 x 0.7 6 47 11 59 XT661-8C-X321 M5 x 0.8 6 M4 x 0.7 6 47 17 79 XT661-10C-X321 Rc 1/8 M4 x 0.7 6 47 23 99 XT661-120E-X322 Rc 1/8 M5 x 0.8 7 72 30.5 120 XT661-150E-X322 Rc 1/8 M5 x 0.8 7 72 37.5 150 744 Non-contact Gripper XT661 Series Dimensions [Bernoulli Type] With guide assembly Size: 120 Size

C76

6 !7 !

C76

6 !7 !

CJ2

Basic Flange CJ2WF6SCJ26, #6 SCJ26, #6, #4 CJ2WF10SCJ210, #6 SCJ210, #6, #4 CJ2WF16SCJ216, #6 SCJ216, #6, #4 The data shows auto switch styles. Please delete the unnecessary parts.

Escapements Series MIW/MIS

25 MB MA HC HE KB KA LA LB LC PA PB PD PC ME MD MIS12-10 MC HD HA, HB JB JA N Model 48 38 28 39 29 19 MIS12-30 MIS12-20 2.5H9 0 +0.025 13 10 7 6 4 3.5 11.6 2.3 M2.6 x 0.45 19 4 M4 x 0.7 6 17.5 11 5 18 6 MIS20-30 MIS20-20 MIS20-10 7 40.5 30.5 20.5 52 42 32 4H9 0 +0.030 8.5 17.5 5 5 2.8 M3 x 0.5 26 6 M6 x 1 9 25 12 8 10 15 14 26 10 Series MIW/MIS Finger options Tapped on upper and lower faces

Compact Cylinder with Solenoid Valve/

) EA M J F1 (KB) KA 2 x 2 x OB counterbore depth RB M Z X B + Stroke L EB A + Stroke EA E Axial piping Bore size (mm) F1 32 40 50 63 30 34.5 43.5 51 Bore size (mm) Stroke range (mm) A B E EA EB F HA HB J KA KB L M N OA 32 40 50 63 5 +0.2 0 5 +0.2 0 6 +0.2 0 6 +0.2 0 28 0.2 33 Note 1) 40 Note 1) 45 43 34.4 6.5 M5 x 0.8 22.5 19.8 7 34 5.4 M6 x 1 5 to 100 33 0.2 39.5 52 50 41.4 6.5 M5 x 0.8

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

plug connector (M) (A) 2 1 (P) 3 (R) M plug connector (M) N.O.

Miniature Fittings M3, R(PT) 1/8, M5 Series M

L4 L1 L2 L3 M d O.D.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

side 55 75 n=2, 4, 6, 8, 75+30(n2) 90+30(n2) n=2, 4, 6, 8, 35+30(n2) n=2, 3, 4, 80+30(n2) Dif. sides Precautions n=2, 4, 6, 8, D-A44 n 90+50(n2) n=2, 4, 6, 8, 55+50(n2) n=2, 3, 4, 80+50(n2) 75+50(n2) Same side n=2, 4, 6, 8, n=2, 4, 6, 8, 80 75 90 10 1 Dif. sides Be sure to read before handling.

7.4

x C2, C4, N1, N3 <1(P), 5(EA), 3(EB) port> C2: 2 One-touch fitting C4: 4 One-touch fitting N1: 1/8" One-touch fitting N3: 5/32" One-touch fitting 16.7 With plug connector/light, built-in silencer S0736S-mM(O)-m External Pilot 2-Position Single Grommet (G): S0716R-mG-m-m 2-Position Double/3-Position Closed Center Grommet (G): S07 6R-mG-m-m 2 3 (Lead wire length) (Lead wire length) 300 300

Direct Solenoid

115/00 120/60 0,01s 0.018 115/60 120/60 0.014 0_014 .011 liho lo Dedr.rgiz: (S@nds) tLts: R.9or'6 liir'.6 et r|easurd with solsoid5 al 70'F (21iC.), 10o% voltags, srtd tr vstu clan ed lobdtod. At tin6s ft mGUd by mizirE ar rhe 160 ooint m f|o sm waw.