7

VXP Note 2) Cv Effective area (mm2) Flow rate characteristics Max. operating pressure differential Min. operating pressure Port size Body material Orifice diameter (mm) Model Max. system Weight (g) pressure (MPa) differential Note 1) (MPa) AC DC C b 2.0 2.4 2.4 1.3 0.9 1.5 5.0 5.5 9.5 VXR 390 390 390 350 350 350 740 740 860 1390 5430 6840 8440 8.5 9.2 9.2 5.6 4.8 7.2 18.0 20.0 38.0 1/4 (8A

Manifold Specifications

VV5Z5-21Station 1 (4(A), 2(B) port) 2n-Rc 1/8 Grommet (G), (H) (Pitch) (Mounting hole) 6-Rc 1/4 (1(P), 3/5(R) port) PE port G: 300 mm H: 600 mm Manual override (Non-locking) (Lead wire length) (mm) Stations 2 3 66 46 85 65 20 408 388 L1 L2 4 104 84 5 123 103 6 142 122 7 161 141 8 180 160 9 199 179 10 218 198 11 237 217 12 256 236 13 275 255 14 294 274 15 313 293 16 332 312 17 351 331 18 370 350

CQ2

843 888 528 317 528 739 40 1182 1377 63 714 753 792 831 870 909 948 987 676 1241 1325 1409 1493 1577 1661 1745 1829 1913 2333 2753 80 495 825 1150 50 2106 2225 2344 2463 2582 2701 2820 2939 3058 3653 4248 100 841 1400 1960 63 1360 2270 3170 80 Unit: g Option Weights 2140 3570 5000 100 100 12 16 Bore size (mm) Both ends tapped 20 25 32 40 50 63 80 2 45 2 6 6 6 6 6 19 45 Male thread 3 350

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

: Seal Kit 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit no. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 45 45 19 6 6 6 6 6 2 2 Male thread 350 240 106 106 54 52 24 12 6 3 Rod end male thread Nut 232 98 64 64 34 34 16 8 4 2 With rubber bumper 57 34 20 12 7 3 2 2 0 0 Built-in One-touch fittings 21 21 12 12 Foot style (Including mounting bolt) 1117 735 349

XLA Series

H 4 S y m b o l Initial power/ Power 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 consumption (W) Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

XLA- ∗ -F7NJ ∗ - ∗ Series

H 4 S y m b o l Initial power/ Power consumption (W) 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

XL-OMV0002

/ AC200V 2400/150 3200/220 4800/350 Ass'y XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 Ass'y 2 3 4 H5 AC100V 800/180 1200/300 1600/400 / AC200V 3200/180 4800/300 6400/400 1)/ 2)16 PTC() 200V 200 PTC 150 100V PTC Ass'y 0 5 10 15 20 25 30 Ass'y ( Ass'y 30 8 XL-OMV0002 4 4-1.162540 Assy SUS304 SUS316L ( SUS304) ( A6063) C D C E E (KF ) Fn J H B A G A mm A B C D E Fn G H J XLC

XL-OMY0002

/ AC200V 2400/150 3200/220 4800/350 XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 2 3 4 H5 AC100V 800/180 1200/300 1600/400 / AC200V 3200/180 4800/300 6400/400 1 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 ( 30 10 XL-OMY0002 . 1 S 12 ( SUS304 M 3 M SUSU316L 8 11 SUS304 2 7 A6063 6 9 6 9 10 9 5 SUS304 4 5 10 4 10 S O S O XLD-25 XLD-40,XLD-50,XLD-160 XLD-63

IP8001 Series

.: Alarm output 1> Power supply voltage 24V DC and load resistance 1k (+ internal resistance 350), Load current = 24V DC / (1k + 350) = Approx. 18mA DC 4: Determination of load resistance of alarm output for intrinsic safety type of explosion protected construction specification.

IP8101 Series

.: Alarm output 1> Power supply voltage 24V DC and load resistance 1k (+ internal resistance 350), Load current = 24V DC / (1k + 350) = Approx. 18mA DC C 4: Determination of load resistance of alarm output for intrinsic safety type of explosion protected construction specification.

JXCx-OMT0002

Product Specifications 4.1 Basic Specifications Item Specifications Number of axes per controller Max. 4-axis Controlled motor Step motor (servo 24 VDC ) Encoder Incremental phase A / B (Encoder resolution 800 pulse / rotation) Main control power supply Power supply voltage: 24VDC+/-10% Max. current consumption: 350 mA Power supply specification Note1) Motor drive and motor control power

CEx-OMB0060

Counting after reset shall be done after 350 ms or more has passed since the reset input. Input of reset signal from PLC/ PC shall be between 10 ms and 100 ms. For longer input time, processing takes approximately 150 ms from startup of reset signal and it increases total reset processing time.

XLF Series

H 4 S y m b o l Initial power/ Power consumption (W) 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

High Vacuum L Type Valve

H 4 S y m b o l Initial power/ Power 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 consumption (W) Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

XLG Series

H 4 S y m b o l Initial power/ Power consumption (W) 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

MHZ

0.5 MPa Gripping force (N) Gripping force (N) 15 0.5 MPa 0.5 MPa 0.6 MPa 0.5 MPa MHW 150 0.4 MPa 0.4 MPa 10 0.4 MPa 0.3 MPa 0.2 MPa 0.4 MPa 0.3 MPa 0.3 MPa 0.3 MPa MRHQ 100 L 0.2 MPa 0.2 MPa 0.2 MPa 5 Misc. 50 D0 10 20 30 40 50 0 50 100 150 Gripping point L (mm) Gripping point L (mm) 20MHZ2-16D/MHZL2-16D MHZ2-40D 400 Pressure 0.7 MPa Pressure 0.7 MPa Pressure 0.7 MPa Pressure 0.7 MPa 50 350

3

Additional Weight Ensuring Safety Unit: g Caution 12 13 16 32 20 100 25 100 32 200 40 200 50 350 63 350 Bore size (mm) With arm Rod flange (including mounting bolt) If one side of the piston is pressurized by supplying air with the clamp arm attached, the piston will move vertically while the clamp arm rotates.

3-Position Rotary Table

Arm Load A CRB2 Displacement CRB1 MSU MSZ10A MSZ20A CRJ CRA1 300 CRQ2 MSQ MSZB10A (Basic type) 400 MSZ MSZ MSZA20A (Basic type) Displacement m Displacement m 250 CRQ2X MSQX MRQ 350 200 40 190 40 30 30 MSZA10A (High precision type) MSZA20A (High precision type) 20 20 10 10 50 40 30 20 10 0 30 25 20 15 10 5 0 Load N Load N MSZ50A MSZ30A 350 300 300 250 250 MSZB30A (Basic type) MSZB50A (Basic

CXT

CXTM (Slide bearing) CXTL (Ball bushing bearing) Max. movable weigh (kg) MXF Allowable static weight (kg) Allowable static weight (kg) Table displacement (mm) Table displacement (mm) Series MXW CXTl12 CXTl16 CXTl20 CXTl25 CXTl32 CXTl40 3 7 12 20 30 50 0.002 0.004 0.007 0.030 0.032 0.025 350 500 900 900 1100 1900 0.015 0.019 0.044 0.180 0.123 0.109 60 70 125 125 140 170 For moving and transporting