Possible to transfer a workpiece at low-speed.

Thread type Size 10, 15 Port type Nil Nil TF TN TT Combination 4 Types Combination of Applicable Chart How to order model with auto switches M5 Rc 1/8 G 1/8 NPT 1/8 NPTF 1/8 C 8 -X 6 -X 6 C 7 C10 C11 A 2 A24 C 7 A 1 A 2 A14 Chart 1, 2, 5 Chart 1, 2 Chart 2, 5 Rotating angle Refer to page 308 for How to Orderproducts with auto switch. 20, 30, 40 90 180 80 to 100 170 to 190 Combination is

0.55

pilot port Rc 1/4 is processed for threads in external pilot model only.

CLS

1/4 Lock unit MLU 160 Rc 3/8 180 200 Rc 1/2 ML1C 250 Rc 3/4 D3.

0.4

port size DIN rail mounting (For manifold) D Rc 1/8 Rc 1/4 6 one-touch fitting 8 one-touch fitting 1/4" one-touch fitting 5/16" one-touch fitting 01 02 C6 C8 N7 N9 Rc 1/8 Rc 1/4 6 one-touch fitting 8 one-touch fitting 1/4" one-touch fitting 5/16" one-touch fitting 01 02 C6 C8 N7 N9 F With bracket Name plate N Note) When two or more symbols are specified, indicate them alphabetically.

CJ2X/CUX/CQSX/CQ2X/CM2X

1/8 Rc 1/8 Rc 1/4 Rc 1/4 M5 x 0.8 MVGQ Precautions CC RB Be sure to read before handling.

Digital Flow Switches, Series PF2A, Series PF2W

Terminal block number 5 6 7 8 4 3 2 1 The applicable panel thickness is 1 to 3.2mm.

0.4

(P) 5(R1) 3(R2) 1(P) 5(R1) 3(R2) 1(P) 5(R1) 3(R2) 1(P) 5(R1) None Nil IN side port size OUT side port size DIN rail mounting (For manifold) D 01 02 C6 C8 N7 N9 Rc 1/8 Rc 1/4 6 One-touch fitting 8 One-touch fitting 1/4" One-touch fitting 5/16" One-touch fitting 01 02 C6 C8 N7 N9 Rc 1/8 Rc 1/4 6 One-touch fitting 8 One-touch fitting 1/4" One-touch fitting 5/16" One-touch fitting F With bracket

LUBRICATOR

Port thread Port thread Rc Rc G G NPT C3SL(-Z)-A NPT C3SL-3(Z)-A C3SL-A C3SL-3-A External appearance drawing and part no. B B Semi-standard 6 Semi-standard 36 Part no. Part no. Port thread Port thread Rc Rc G G NPT C3SL-6(Z)-A NPT C3SL-36(Z)-A C3SL-6-A C3SL-36-A Semi-standard Semi-standard 3W Part no.

Electric Actuators

(A contact) 1 2 1 pc. 2 pcs. 6 6 pcs.

AC Servo Motor Driver (CC-Link Type ）

6 6.

HRX-OM-M005

Alarm Display screen (Alarm message) Figure 6-1 Error Occurrence HRZD Series 6.1 Error Message 6-1 HRX-OM-M005 Chapter 6 Error Message and Troubleshooting 6.2 Troubleshooting The procedure for error recovery varies with alarm types.

Table of Contents

(A contact) 1 2 1 pc. 2 pcs. 6 6 pcs.

Magnetically Coupled Rodless Cylinder

40 D-A9 8 6 D-F9, D-F9W 5 4 D-Z7, Z80 9 9 11 A B D-Y59, Y7P D-Y7W 6 6 6 Switches cannot be mounted in some cases.

Air Slide Table Series MXS

6 !2 !3 !

Metal Seal/Rubber Seal Series VQ Body Ported

1/8 Rc 1/4 One-touch fitting for 6 One-touch fitting for 6 Rc 1/8 Rc 1/4 01 02 C6 C8 One-touch fitting for 6 One-touch fitting for 6 01 02 C6 C8 Name plate N Note) When two or more symbols are specified, indicate them alphabetically.

Base Mounted Metal Seal/Rubber Seal Series VQ

One-touch fitting for 8 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 01 02 C6 C8 DIN rail mounting style (For manifold) D One-touch fitting for 6 One-touch fitting for 8 F With bracket N Name plate Manifold Note) Drop prevention Intermediate stops When two or more symbols are specified, indicate them alphabetically.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

(g) Applicable valve model Applicable stations Series Base model Port size Port location 1(P), 3(R) 2(A) C3 (For 3.2) C4 (For 4) C6 (For 6) M5 (M5 thread) 2 stations: 83 Addition per/station: 19 2 to 20 stations VV3QZ12VQZ115 Rc 1/8 VQZ100 Top V100 2 stations: 68 Addition per/station: 20 C4 (For 4) C6 (For 6) M5 (M5 thread) 2 to 20 stations VV3QZ22VQZ200 Rc 1/8 Top VQZ22 SY SYJ C6 (For 6

Guide Cylinder Series MGG

T 2 x P (Rc, NPT, G) Q B S W U K L E R I AA AL AP X A AB J V Y + Stroke Z + Stroke 8 x AF AC AD AE (mm) Bore size (mm) 20 25 32 40 50 Stroke range (mm) A AA AB AC AD AE AF AL AP B C D E F G H I J K L M N 90 11 11 7.5 75 30 6 25 108 15 60 92 5.5 30 55 60 80 25 45 M5 x 0.8 depth 10 M8 x 1.25 depth 14 75, 100, 125, 150, 200 9.5 depth 6 100 14 13 7.5 85 30 6 30 130 17.5 65 113 6.6 35 65 70 100

SMC

6.5 Operating port 2-Rc, G, NPT1/8 13 3 J 12 Maximum 14.5 (With stroke adjuster at retraction end) I 7.5 8 15 15 14 14 12 6.5 6.5 Vacuum suction port Rc, G, NPT1/8 12 25 6.5 K NA-M6 x 1 thread depth 6.5 25 KA Stroke adjuster at extension end Stroke adjuster at retraction end 6 18 46.5 (With stroke adjuster at extension end) N-M5 x 0.8 thread depth 10 (Insert) 6-M5 x 0.8 thread depth 8 6

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

M5 (M5 thread) Side Top 2 to 20 stations Rc 1/8 VV3QZ15VQZ100 VQZ115 V100 C4 (For 4) C6 (For 6) C8 (For 8) Rc 1/8 2 to 20 stations VV3QZ25VQZ200 Rc 1/4 Side VQZ25 SY SYJ 1(P) port Rc 3/8 3(R) port Rc 1/4 C6 (For 6) C8 (For 8) C10 (For 10) Rc 1/4 2 to 20 stations VV3QZ35VQZ35 VQZ300 Side VK VZ Note) Threaded port.