CJ5-S

R V Rod side flange style (F): CG5FNS GA GB 2-Rc P FT H1 Width across flats B1 D I MM AL A Width across flats NA K KA 8-J 4-FD C0.1 FX0.15 S + Stroke ZZ + Stroke H M B Stroke range A Bore size (mm) AL B1 B C D FX FD FT GA GB H H1 I J K KA M MM NA P S ZZ 20 Up to 350 18 15.5 13 50 16.5 8 36 5.5 6 18 12 35 5 31 M4 x 0.7 5 6 3 M8 x 1.25 29 1/8 83 121 25 Up to 400 22 19.5 17 50 18.5 10 36 5.5

Aluminum High Vacuum Angle Valve

Heater assembly quantity 200/40 400/70 400/80 600/130 800/180 1200/300 1600/400 100V H5 120C 800/40 1600/80 1600/80 2400/130 3200/180 4800/300 6400/400 200V The inrush current of the heater flows for several ten seconds when using 100V while it flows for several seconds when using 200V. However, this inrush current decreases momentarily.

CJ5-S

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC Standard Stroke MK(2) Standard stroke Long stroke Note) Bore size (mm) RS Q G 20 25, 50, 75, 100, 125, 150, 200 201 to 350 25 301 to 400 RS H A 32 301 to 450 40 301 to 800 Made to Order Specifications (For details, refer to page 10-21-1.) 25, 50,

RSH/RS1H

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1100 1100 0.5 RHC 1000 1000 0.4 900 900 0.3 MK(2) 63 80 Load weight m [kg] Load weight m [kg] Load weight m [kg] Load weight m [kg] 0.2 800 800 50 0.1 700 700 RS Q G 600 600 0 500 100 200 300 400 RS H A 63 Lateral load F [N] 500 500 50 400 400 RZQ RS1H50

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

48 20 41 39 17 24 31 25 Up to 1800 295 Lube Non-lube 277 225 226 182 115 280 150 335 18.5 M20 x 1.5 111 M45 x 1.5 135 90 45 153 3/4 1 63 60 50 74 48 20 46 39 17 31 24 25 Up to 1800 352 336 275 277 225 140 355 180 420 23 M24 x 1.5 141 M56 x 2 160 105 55 176 71 60 86 25 49 67 60 20 56 35 29 30 Up to 2000 0.17 x Stroke Long Stroke With Auto Switch: 125 to 200 Only 384 369 55 330 330 270 140 400

PFxx-OMX0002

(Page 82) WH1 (Window comparator hysteresis) Setting of OUT1 hysteresis (Window comparator) 5 R/W U16 400 Y Settable values 0x0 to 0x1770 (0 to 6000) 6 R/W dt1 (Delay time) U16 0 Y Setting of OUT1 delay time 10 ms increment -78No.PF-OMX0002-B Product individual parameters (continued) Data Data Index Sub Access Initial value type storage 1 Parameter Set value 4 Remarks index 2 3 dec hex 0:

PFxx-OMX0007

(Page 47) WH1 (Window comparator hysteresis) Setting of OUT1 hysteresis (Window comparator) 5 R/W U16 400 Y Settable values 0x0 to 0x1770 (0 to 6000) 6 R/W dt1 (Delay time) U16 0 Y Setting of OUT1 delay time 10 ms increment -43No.PF-OMX0007-A Product individual parameters (continued) Data Data Index Sub Access Initial value type storage 1 Parameter Set value 4 Remarks index 2 3 dec hex 0:

HRX-OM-M090

[] 60Hz 50Hz Fig 9.5-1 Heating capacity(HRS012--10, HRS018--10) 9.5.2 HRS012--20,HRS018--20, HRS024--20 1000 1000 Ambient Ambient temperature temperature 800 800 5 20 25 5 Heating capacity [W] 20 25 32 40 [W] 600 600 32 40 400 400 200 200 0 0 5 15 25 35 45 5 15 25 35 45 Circulating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig 9.5-2 Heating capacity(HRS012--20, HRS018

HRX-OM-R016

Fig. 9-4 Cooling capacity(HRS030--20-(BJMT)) 9.5 Heating capacity 9.5.1 HRS030-A-20-(BJMT) 1000 1000 Ambient Ambient temperatur temperatur 800 e e Heating capacityW 800 Heating capacityW 40 32 25 20 5 40 32 25 20 5 600 600 400 400 200 200 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30 35 40 Circulating fluid temperature Circulating fluid temperature 50Hz 60Hz Fig. 9-5 Heating capacity(HRS030

HRX-OM-Y098

: 400 VAC, (7) Piping length: Minimum 5 With the pressure control mode that controls the pressure automatically with the inverter.If the pressure control mode is not necessary,use the flow control function or the pump output setting function. 6 Required flow rate to maintain the cooling capacity.

HRX-OM-Z002

(Note3) (1)Ambient temp. : 32, (2)Circulating fluid : Tap water, (3)Circulating fluid rated flow, (4)Power supply : 400 VAC. (Note4) (1)Ambient temp. : 32, (2)Circulating fluid : Tap water, (3)Circulating fluid temp. : CH1 : 20/CH2 : 25, (4)Circulating fluid rated flow, (5)Power supply : 400 VAC, (6)Piping length : Shortest, (7)Rated cooling load is applied.

HRX-OM-X071

Applicable model HRR050-A/W-40-T1 HRR050-A/W-40-T2 Rated flow50/60Hz common*1 L/min 16 24 Maximum pump head 50/60Hz common*2 m 50 Pump Output W 400 750 Circuit protector A 10 Recommended earth leakage breaker capacity A 10 Due to an increase in heat generation of the pump. The cooling reduces about 400W from the value in the catalog.

HEC-OM-Y008

Dec Z yZ ZZ AZ BZ CZ DZ . 400 400 This manual provides the following symbols in addition to Danger, 300 300 This unit does not use parts that meet the SCCR specifications.

High Vacuum L Type Valve

H5 Initial power / 100 VAC 200/40 400/70 400/80 600/130 800/180 Power 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

HRX-OM-W032

fluid flow rate: Rated flow rate (4) Power supply: 400 VAC(50Hz)/460 VAC(60Hz) 5: (1) Ambient temperature: 32 oC, (2) Circulating fluid: Clean water, (3) Circulating fluid temperature: 20 oC, (4) Load: Refer to the cooling capacity shown in the specification table, (5) Circulating fluid flow rate: Rated flow rate, (6) Power supply: 400 VAC(50Hz)/460 VAC(60Hz) (7) Piping length: Minimum 6

CEU1

No.CE*-OMP0002-A 3 CEU1 SMC FG 0~50 35~85%RH 3 CEU1CE10.1mm 3 CE1-R** CE1** 3 CEU1** FG 3 DIN 3 2m/s 3 (100ms) 2 2 2 2-1 1 1 1 CEU1 4 2 2 2 2-2 2 2 2 3 3 3 3-1 1 1 1 : : 1 1 (mm) (mm) 25 25 25 25 50 50 50 50 75 75 75 75 100 100 100 100 125 125 125 125 150 150 150 150 175 175 175 175 200 200 200 200 250 250 250 250 300 300 300 300 400 400 400 400 500 500 500 500 12 12 12 12

Electric Actuator / Rod Type Dust-tight / Water-jet-proof (IP65 Equivalent / IP67 Equivalent)

9 to 200 5 to 100 24 to 400 12 to 200 6 to 100 24 to 400 12 to 230 6 to 110 Max acceleration/deceleration [mm/s2] 3,000 Pushing speed [mm/s] Note 5) 35 or less 30 or less 30 or less Positioning repeatability [mm] +/0.02 Lost motion [mm] Note 6) 0.1 or less Lead [mm] 12 6 3 16 8 4 16 8 4 Impact resistance/vibration Resistance [m/s2] Note 7) 50/20 Drive method Ball screw (LEY*D) Guide type

A_HEC-OM-I009

degC Fig. 6-1 Cooling capacity 2) Heating capacity Fluid: water Fluid: water 1000 2000 900 Ambient 35C 1800 Ambient 30C 800 1600 Ambient 25C Heating capacity W Heating capacity W 700 1400 600 Ambient 20C 1200 500 Ambient 15C 1000 400 800 300 Ambient 15C 600 200 400 100 0 200 10 15 20 25 30 35 40 45 50 10 15 20 25 30 35 40 45 50 Circulating fluid temperature degC Fluid temperature degC Fig

HRX-OM-R039

Fig. 8.4-2 Cooling capacity(HRSE018-A-10) 8.4.3 HRSE012-A-20/23-(T) 1600 1600 Ambient Ambient Temperature Temperature 1400 1400 25 35 40 25 35 40 1200 1200 Cooling capacity[W] Cooling capacity[W] 1000 1000 800 800 600 600 400 400 200 200 0 0 0 10 20 30 40 0 10 20 30 40 Circurating fluid temperature[] Circurating fluid temperature[] 60Hz 50Hz The cooling capacity will be reduced by 100W when

E-MY2_E_D

Heavy load Standard load Medium load Light load 1 10 50 100 200 1 0.25 0.49 0.98 1.96 2 20 2 0.49 75 200 400 0.74 1.47 2.94 3 30 3 0.74 100 300 600 0.98 1.96 3.92 4 40 125 400 800 4 0.98 1.23 2.45 4.90 5 50 5 1.23 150 500 1000 1.47 2.94 5.88 6 75 200 600 1200 6 1.47 1.96 3.92 7.84 7 100 250 700 1400 7 1.72 2.45 4.90 9.80 8 300 300 800 1600 8 1.96 2.94 5.88 11.76 9 500 500 900 1800 9 2.21