HRX-OM-Y098

Configuration One thermo-chiller for one controller. 2 2 R D R D 3 3 S D S D 5 5 S G S G Controller Master This product Do not connect any wire to other PIN numbers. Fig. 3-13 Connection of RS-232C 3.3.10 Ethernet Modbus/TCP Communication wiring This product can operate the following by Ethernet Modbus/TCP communication.

Nozzle Type Ionizer

Blow Velocity Distribution (Supply Pressure: 0.3 MPa) qEnergy saving static neutralization nozzle IZN10E-01 wHigh flow rate nozzle IZN10E-02 0 0 100 100 Distance [mm] Distance [mm] 200 200 4 m/s 14 m/s 300 300 11 m/s 3 m/s 400 400 8 m/s 2 m/s 500 30 30 20 10 0 10 20 500 30 30 20 10 0 10 20 Distance (Horizontal) [mm] Distance (Horizontal) [mm] 8 IZN10E Series Flow Rate Characteristics qEnergy

SMC Pneumatic Clean Series

, 200, 250, 300 3/8 1/2 Note) Consult SMC for long stroke.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

30 to 800 mm/s 30 to 700 mm/s 30 to 600 mm/s Precautions MX Bumper is standard on both ends Cushion Port size M5 x 0.8 Rc 1/8 Be sure to read before handling.

Servo Motor Controller (24 VDC)

Conversion unit Controller USB cable (A-miniB type connector) 120.3 120.3 mm mm 200 200 mm/s mm/s Communication 100 500 100 500 1 1 200 1000 200 1000 2 2 CN4 50 200 50 200 3 3 cable PC (The PC should be obtained separately.) Controller PLC, etc.

CQS

Nil S n 2 pcs. 1 pc. n pcs.

VZS

Other dimensions are the same as the grommet type. 3-7-12 13 5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS2000 Non Plug-in 2 position double, 3 position closed center/exhaust center/pressure center Grommet 2 position double: VZS2250-G H(S)-01 3 position closed center: VZS2350-G H(S)-01 3 position exhaust center: VZS2450-G H(S)-01 3 position pressure center

CJ5-S

RS Q G RS H A Relation of Liquid Entry and Sliding Distance Amount of liquid entry (g) x 15 RZQ 10 Standard cylinder MI W S Stainless steel cylinder 5 CEP1 0 50 100 150 200 Sliding distance (km) 250 300 CE1 Conditions Working fluid Air Pressure 0.5 MPa Liquid Water-soluble coolant Piston speed 200 mm/sec (60 cpm) CE2 ML2B Special scraper C J G5-S Exterior configuration reduces residual

CJ5-S

RS Q G RS H A Relation of Liquid Entry and Sliding Distance Amount of liquid entry (g) x 15 RZQ 10 Standard cylinder MI W S Stainless steel cylinder 5 CEP1 0 50 100 150 200 Sliding distance (km) 250 300 CE1 Conditions Working fluid Air Pressure 0.5 MPa Liquid Water-soluble coolant Piston speed 200 mm/sec (60 cpm) CE2 ML2B Special scraper C J G5-S Exterior configuration reduces residual

5 Port Solenoid Valve SY Series

rate: 50% Stroke 500 mm Series CM2 Pressure 0.5 MPa Load rate: 50% Stroke 300 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation SY3140-01 Horizontal actuation 800 700 600 500 400 300 200 100 0 SY5140-02 800 700 600 500 400 300 200 100 0 SY7140-03 800 700 600 500 400 300 200 100 0 SY9140-04 Cylinder is in extending.

Electromagnetic Digital Flow Switch

0.5 s/1 s/2 s/5 s Output protection Short-circuit protection Output mode Select from hysteresis mode, window comparator mode, accumulated output mode, or accumulated pulse output mode.

Slider Type/Ball Bushing Bearing

32 1000 Outside of cylinder tube with hard chrome plated 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700, 800 Auto switch rails on both side faces (with 2 pcs.) 1500 Made to Order Specifications Click here for details 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700, 800 900, 1000 40 1500 Symbol Specifications -XB9 -XB13 -XB22 Low speed cylinder (15 to 50 mm/s) Note) Intermediate

High performance type Step Motor Controller (Servo/24 VDC)

Conversion cable 21 No.JXC-OMY0002-A 2 Connection with a PC Controller PC 120.3 120.3 mm mm 200 200 mm/s mm/s Communication cable USB cable (A-miniB type connector) 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 SI When using the LEC-W2, it is necessary to connect a conversion unit (P5062-5) to the communication cable.

Micro Mechanical Valve Series VM1000

VHS 2317 Series VZM400 How to Order 0 VZM45 01 01 S Made to Order (Refer to pages 2342 to 2345 for details.)

Table of Contents

CRB2BWU10-D CRB2BWU15-S CRB2BWU15-D CRB2BWU20-S CRB2BWU20-D CRB2BWU30-S CRB2BWU30-D M5 x 0.8 M5 x 0.8 M3 x 0.5 M3 x 0.5 Refer to the drawing.

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

(Cable length) EX500-AP010-S (1 m) EX500-AP050-S (5 m) EX500-AP010-A (1 m) EX500-AP050-A (5 m) @6 @7 Protocol PROFIBUS DP, DeviceNet Number of functional poles M12: 5 pins Key type A-coded Cable O.D. 6 mm Wiring Conductor nominal cross section 0.3 mm2/AWG22 Wire O.D.

0.01

S S L L L 20.5 81 6 9 6 9 6 9 0.3 0.2 0.1 0.3 0.2 0.1 0.3 0.2 0.1 0 MPa 0.4 0 MPa 0.4 0 MPa 0.4 18 12 Pressure gauge SUP port Rc, NPT, G 1/8 DIN rail mounting bracket 5.3 DIN rail center L3 11.2 L4 24 L5 OUT 3 OUT 2 OUT 4 n Left Right OUT 1 OUT 5 Stations 1 Stations L1 L2 L3 L4 L5 1 106 120 135.5 2 144 38 162.5 173 3 182 38 76 200 210.5 4 220 76 114 237.5 248 5 258 114 152 275 285.5 6

LEH_C

S / P.42 7.3 <> (NPNPNP) LEHS10K3-4 NPN 6 - 4.3 3 8 2 5 1 4 7 6 1 2 3 4 5 6 7 8 ( DC24V) 7 - 5. 5.1 I/O LEC-CN5-* PLC DC24V 2) CN5 1) CN4 LE-CP-*-* () LE-CP-*S-* () CN3 CN2 120.3 120.3 mm mm 200 200 mm/s mm/s 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN1 DC24V 2) USB (A-miniB type ( <> AWG20 (0.5mm 2) (, USB ) LEC-W2 1 2UL ,UL1310 Class2

3

moment of inertia [kgm2] Allowable moment of inertia [kgm2] 102 102 MK 103 103 50, 63 Standard arm single unit 32, 40 Standard arm single unit 104 50 100 200 104 50 100 200 Maximum piston speed [mm/s] Maximum piston speed [mm/s] 386 Model Selection MK Series Note) Maximum piston speed is equivalent to approximately 1.6x the average piston speed.

ZP

Note) ;in the table indicates the pad material "N, S, U, F, GN, GS." Note) ;in the table indicates the pad material "N, S, U, F, GN, GS." Note) ;in the table indicates the pad material "N, S, U, F, GN, GS."