Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

[I/O cable] LEC CK4 Cable length (L) [m] 1 1.5 3 3 5 5 Controller side PLC side (16) (7.9) (10) (11) (30) (60) (L) Conductor size: AWG26 Weight Terminal no.

LEF-OM006xx

() 452000Hz 1 () 4 5 6 7 8 <-> LEFS 16 LEFS 25 LEFS 32 50 8 20 8 6 12 6 W(kg) W(kg) W(kg) W(kg) 40 5 5 W(kg) 10 W(kg) 15 30 8 16 10 16 10 10 20 6 12 5 12 10 4 2 0 0 0 100 200 300 400 500 600 V(mm/s) 0 100 200 300 400 500 600 V(mm/s) 0 0 100 200 300 400 500 600 V (mm/s) LEFS 16 LEFS 25 LEFS 32 50 12 20 W(kg) W(kg) 10 W(kg) W(kg) W(kg) W(kg) 6 40 6 15 8 30 8 6 8 10 5

MHY2/MHW2

5 !

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

4.5 Note) 30 4 x M4 x 0.7 thread depth 5 (Opposite side: Same) (Opposite side: Same) 4 x M5 x 0.8 thread depth 4.5 (Piping port) (Opposite side: Same) 5 10 10 8 46 2 x M4 x 0.7 thread depth 6 (30) (Z) 2 x M5 x 0.8 thread depth 8 5 450.2 8 Note) 11-, 22-: Vacuum suction port Vacuum air from 2 ports on both sides. 10-/12-, 21-: Relief port Exhaust air from a port on one side.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 0.05 0.05 0.06 0.04 Table displacement mm Table displacement mm Table displacement mm 0.04 0.03 0.04 0.03 0.02 0.03 0.02 0.02 0.01 0.01 0.01 0 10 20 30 40 Load N 0 10 20 30 50 Load N 0 10 20 30 40 Load N 40 10 10 10 L = 100mm L = 100mm L = 100mm MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.04 0.03 0.08 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10

CE

ms or less Output delay time NPN open collector Max. 30 VDC, 50 mA PNP open collector Max. 30 VDC, 50 mA NPN open collector Max. 30 VDC, 50 mA PNP open collector Max. 30 VDC, 50 mA RS Q G Output transistor mode 80 to 120 VAC 50/60 Hz 21.6 to 26.4 VDC Power supply voltage RS H A 10 VA or less 5 W or less Power consumption RZQ Between case and AC line: 1500 VAC for 1 min.

Prevents Micro-Bubbles

T) W Model LVC20 LVC30 LVC40 LVC50 LVC60 (mm) Dimensions 64 S T Model LVC3 LVC4 LVC5 90 24 49.5 110.5 29 54.5 147 34.5 60.5 156 Suck back (Single type) Suck back (Unit type) 50 3.5 4.5 37 30 44 37 30 44 4-3.5 20 (Max. 11.5) 51 51 (Max. 11.5) M5 x 0.8 M5 x 0.8 M5 x 0.8 45 12.5 45 30 SMC SMC SMC A B A B 12.5 61 4 4 30 (110) (78) 17-5-12 10 Series LVC Manifolds Manifold Specifications LLC5A

Rotary Cylinder Series MRQ Size: 32, 40 1

(mm) (mm) Stroke 5 10 15 20 25 30 40 50 75 100 Y 12.5 15 15 20 20 15 17.5 17.5 25 30 Q 20 20 20 20 30 E 68 68 70.5 68 70.5 68 70.5 75.5 80.5 83 11-10-15 16 Refer to page 11-11-1 concerning further information on specifications of the auto switch single body.

VDW

11 56 VXA 1 6 VN 1 8 5 M5 M5 LVC 2 (OUT) port M5, 1/8 1 (IN) port M5, 1/8 1 (IN) port 2 (OUT) port LVA 15 LVH 2-M2.5 x 0.45 2-M3 x 0.5 thread depth 5 LVD Thread depth 3.5 VDW31 LVQ 36 (27.6) LQ 300 Lead wire LVN 40 30 SMC SMC 1 1 TI/ TIL AC type Rectifying device PA 4-5 25 PAX 34 28 PB Bracket assembly part no.

Compact Manifold Regulator

/4 3/8 5/32 1/4 5/32 1/4 07 08 09 10 11 12 19 20 21 22 23 24 26 27 28 29 30 31 33 34 35 36 37 38 57 58 59 60 61 62 69 70 71 72 73 74 76 77 78 79 80 81 83 84 85 86 87 88 Note) When the knob and the OUT piping are located on the same side, the elbow fitting is directed to the rear side (DIN rail side).

PF-OMM0004_C

msec. 1 [ooo] 1 [ooo] [F20] [iNP] [iNP][-] [-] [F20] -47No.PF-OMM0004-D [F22] 5 V20 mA [F22] [AnA] [AnA][-] [F22] -48No.PF-OMM0004-D OFF ON 5 V 20 mA 10% [F22] -49No.PF-OMM0004-D [F30] OFF 2 5 100 24 5 5 100 500 9.5 2 2 100 200 3.8 [F30] [SAVE] [F30] 2 5 OFF OFF 2 5 B -50No.PF-OMM0004-D [F80] 12% 30 ON [F80] [dSP] [F80] ON 30 OFF -51No.PF-OMM0004-D [F81] 58 [F81] [PiN

CJ2X/CUX/CQSX/CQ2X/CM2X

10, 15, 20, 25, 30 20, 25, 32 5, 10, 15, 20, 25, 30, 40, 50 RZQ Precautions MI W S CEP1 Be sure to read before handling.

CJ2X/CUX/CQSX/CQ2X/CM2X

10, 15, 20, 25, 30 20, 25, 32 5, 10, 15, 20, 25, 30, 40, 50 RZQ Precautions MI W S CEP1 Be sure to read before handling.

Sine Cylinder Series REC

33.5 5 10.5 6 30 25 M10 x 1.25 26 22 19.5 13 10 17 10 9 19 10 45 6 37.5 5.5 10.5 8 30 D32 M10 x 1.25 26 22 19.5 13 12 17 10 9 19 11 45 6 46.5 5.5 10.5 10 30 40 M14 x 1.5 32 24 21 16 14 22 15 10 30 12.5 50 8 56.2 7 13.5 12 39 -X NA NN P RR N S U Z ZZ Bore (mm) 20 M20 x 1.5 1/8 9 146 14 217 226 20 30 Individual -X 25 M26 x 1.5 1/8 9 146 14 221 230 20 34.5 32 M26 x 1.5 1/8 9 159 14 234 243 22

Sine Cylinder Series REC

33.5 5 10.5 6 30 25 M10 x 1.25 26 22 19.5 13 10 17 10 9 19 10 45 6 37.5 5.5 10.5 8 30 D32 M10 x 1.25 26 22 19.5 13 12 17 10 9 19 11 45 6 46.5 5.5 10.5 10 30 40 M14 x 1.5 32 24 21 16 14 22 15 10 30 12.5 50 8 56.2 7 13.5 12 39 -X NA NN P RR N S U Z ZZ Bore (mm) 20 M20 x 1.5 1/8 9 146 14 217 226 20 30 Individual -X 25 M26 x 1.5 1/8 9 146 14 221 230 20 34.5 32 M26 x 1.5 1/8 9 159 14 234 243 22

HRX-OM-T004

31 30 33 46 42 0D 0A Read Address Quantity to Read Hi Lo Hi Lo 30 30 30 30 30 30 30 31 Response message (Slave to Master) Start Slave Address Function Data LRC End 3A 30 31 30 33 30 43 0D 0A Byte Count Read Data1 Hi Lo 30 32 30 30 45 45 HRS090 Series 4.5 Message configuration 4-9 HRX-OM-T004 Chapter 4 MODBUS communication function 4.6 Function codes Table 4.6-1 shows function codes to read

rep-modular-e

8 #8 #6 #5 #2 w !0 e i !3 @8 !9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Modular Pressure Control Equipment F.R.L. Replacement Procedure

8 #8 #6 #5 #2 w !0 e i !3 @8 !9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

HRX-OM-R028

31 30 33 46 42 0D 0A Read Address Quantity to Read Hi Lo Hi Lo 30 30 30 30 30 30 30 31 Response message (Slave to Master) Start Slave Address Function Data LRC End 3A 30 31 30 33 30 43 0D 0A Read Data1 Byte Count Hi Lo 30 32 30 30 45 45 HRSH Series 4.5 Message configuration 4-9 HRX-OM-R028 Chapter 4 MODBUS communication function 4.6 Function codes Table 4.6-1 shows function codes to read

SX

SX 000-50-2ANote : SX3000 (Metric size) C4: With One-touch fitting for 4 C6: With One-touch fitting for 6 X5000 (Metric size) C4: With One-touch fitting for 4 C6: With One-touch fitting for 6 C8: With One-touch fitting for 8 (Gasket u supplied as an accessory.) 3 5 3 5 3 5 3 5 3 5 3 5 For 45(N)F (D-sub connector) (Inch size) N3: With One-touch fitting for 5/32" N7: With One-touch fitting