0.4

or less 2.0 0.28 0.49 2.2 0.31 0.60 Rubber seal 44 or less VQ2000 VQ2400 58 or less 29 or less 2.0 0.15 0.46 2.6 0.15 0.60 Metal seal 38 or less Exhaust center 105 VQ2401 64 or less 34 or less 2.0 0.28 0.49 3.2 0.30 0.80 Rubber seal 44 or less VQ2500 58 or less 29 or less 2.4 0.17 0.57 2.0 0.18 0.46 Metal seal 38 or less Pressure center VQ2501 64 or less 34 or less 3.2 0.28 0.80 2.2 0.31

Vacuum Pad

40.5 D 11 14.5 11.0 12.2 A 17 20 B 30 37 D 10 14 7.7 8.6 A 17 20 B 34 40.5 D 11 14.5 11.0 12.2 A 17 20 B 30 37 D 10 14 7.7 8.6 ZP3-Y015U:J3-B3 ZP3-Y015U:J6-B3 ZP3-Y015U:K3-B3 ZP3-Y015U:K6-B3 ZP3-Y02U:J3-B3 ZP3-Y02U:J6-B3 ZP3-Y02U:K3-B3 ZP3-Y02U:K6-B3 Note) ;in the table indicates the pad material "N, S, U, F, GN, GS."

REA/REB

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (mm) B D F G H I K L MM x J N NA NB NN Model Port size REA25 REA32 REA40 Rc 1/8 46 27.8 13 8 20.5 34 10 70 M5 x 0.8 x 8 15 30 13 M26 x 1.5 Rc 1/8 60 35 16 9 22 40 15 80 M6 x 1.0 x 8 17 36 15 M26 x 1.5 Rc 1/4 70 43 16 29 50 16 92 11 M6 x 1.0 x 10 21 46

Auto Switch Guide

-X Main circuit of switch Main circuit of switch OUT Black 20Weight Data DC () Blue (g) D-F9NW(V) D-F9PW(V) D-F9BW(V) Auto switch model 0.5 7 7 7 D-F9PW, D-F9PWV Lead wire length (m) 3 34 34 32 DC (+) Brown 5 56 56 52 Dimensions OUT Black D-F9W Mounting screw M2.5 x 4l Slotted set screw DC () Blue Indicator light 2.7 2 D-F9BW, D-F9BWV 22 2.8 2.6 OUT (+) Brown 4 Main circuit of switch Most

CXT

For Safety Instructions and Actuator Precautions, refer to pages 8-34-3 to 8-34-6. If the cylinder is used in an application in which a magnetic material is placed in close contact around the cylinder as shown in the graph on the right (including cases in which even one of the sides is in close contact) the operation of auto switches could become unstable.

MLGP

A CL Extension locking Retraction locking 40 to 100 Bore size (mm) A CL1 Drop prevention for press fitting jig Drop prevention for lifter Flat head screwdriver 20 25 32 40 50 63 80 100 26.5 30.5 31.5 34 35 38 43 51.5 MLGC CNG LOCK MNB Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

PFxx-OMU0002

If the minimum setting unit is 2 L/min, the display will change in 2 L/min steps, e.g. 30..32..34 L/min. Smallest settable increment The flow which is converted to the volume at 20 oC and 101.3 kPa (absolute pressure). indicates that the product is standard condition. Standard condition Output type that has only 2 conditions, ON or OFF.

HRX-OM-W058

PV SV 5.19 Communication function HRS-R Series 5-60 HRX-OM-W058 Chapter 5 Display and setting of various functions 34. Select contact input signal 1 delay timer of reading from the table below with [] key or [] key, and confirm by pressing SEL.

HRX-OM-X027

PV SV 5.19 Communication function HRS-R Series 5-60 HRX-OM-X027 Chapter 5 Display and setting of various functions 34. Select contact input signal 1 delay timer of reading from the table below with [] key or [] key, and confirm by pressing SEL.

HRX-OM-W060

Communication setting screen 35.Contact output 1 to 3 34.Contact input signal 31.Contact input signal operation 33.Analog output 32.Serial communication setting screen detail setting screen setting screen setting screen setting screen 11. Temperature waveform 11.

HRX-OM-X084

RUN Operation at occurrence of low flow rate alarm LOFL ALARM(Alternately displayed) 5.5 Advanced setting mode HRR Series 5-34 HRX-OM-X084 Chapter 5 Display and Setting of Various Functions Set value Contents Initial value OFF Alarm is not generated. WRN Operation of this product will continue when the alarm occurs. FLT Operation of this product will stop when the alarm occurs.

HRX-OM-W002

RUN Operation at occurrence of low flow rate alarm LOFL ALARM(Alternately displayed) 5.5 Advanced setting mode HRR Series 5-34 HRX-OM-W002 Chapter 5 Display and Setting of Various Functions Set value Contents Initial value OFF Alarm is not generated. WRN Operation of this product will continue when the alarm occurs. FLT Operation of this product will stop when the alarm occurs.

HRX-OM-W032

5.15.1 Data reset function . 5-34 5.15.2 How to operate reset function . 5-34 5.16 Accumulated Operating Time Reset Function . 5-35 5.16.1 Accumulated operating time reset function . 5-35 5.16.2 How to operate accumulated operating time reset function . 5-35 5.17 Warming Up Function . 5-39 5.17.1 Warming up function. 5-39 5.17.2 Setting/checking of warming up function . 5-40 5.18 Anti-Snow

Cylinder with lock

Checks P.34 4-3-1. Inspection points P.34 4-3-2. Inspection interval P.34 4-4. Replacement of seals P.34 4-4-1. Disassembly / Reassembly P.35 4-4-2. Removal of seals P.36 4-4-3. Grease P.37 4-4-4. Mounting of seals P.38 5. Troubleshooting P.39 6. Construction P.41 -1- Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Compact Guide Cylinder

Theoretical Output OUT IN [N] Bore size [mm] Rod size [mm] Operating direction Piston area [mm2] Operating pressure [MPa] 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 12 6 OUT 113 23 34 45 57 68 79 90 102 113 IN 85 17 25 34 42 51 59 68 76 85 16 8 OUT 201 40 60 80 101 121 141 161 181 201 IN 151 30 45 60 75 90 106 121 136 151 20 10 OUT 314 63 94 126 157 188 220 251 283 314 IN 236 47 71 94 118 141 165

,

(4 port) 8.5 (2 port) 14 4 2 12 14 4 2 12 12 12 25 34 34 18 18 25 14 14 Indicator light Indicator light 5 1 3 5 1 3 32.5 29.5 32.5 29.5 37 34 2-4.6 mounting holes Manual override 2-4.6 mounting holes Manual override 37 34 M8 connector M8 connector 74.5 74.5 66.5 23 23 66.5 PE port PE port PE port PE port 13.5 13.5 8.5 8.5 SMC SMC 16 16 1/8-2 ports 3, 5 port 1/8 1 port 16 16 1/8-2 ports 3

2–4

Auto switch internal circuits D-F9NW, F9NWV DC (+) Brown [Red] Auto Switch Weight Unit: g Switch main circuit Switch main circuit Switch main circuit OUT Black [White] D-F9NW(V) D-F9PW(V) D-F9BW(V) Model DC (-) Blue [Black] 0.5 7 7 7 Lead wire length (m) 3 34 34 32 5 56 56 52 D-F9PW, F9PWV DC (+) Brown [Red] Auto Switch Dimensions Unit: mm OUT Black [White] D-F9W Mounting screw M2.5 x 4 Slotted

MHZ2/MHZJ2

D-F9NW(V) Auto Switch Weight Table Unit: g DC (+) Brown [Red] Model D-F9BWV D-F9BW D-F9PWV D-F9PW D-F9NWV D-F9NW Main switch circuit OUT Black [White] Lead wire length 0.5m 7 7 7 7 7 7 Lead wire length 3m 32 32 34 34 34 34 DC () Blue [Black] Auto Switch Dimensions D-F9NW, D-F9PW, D-F9BW D-F9PW(V) DC (+) Brown [Red] Main switch circuit OUT Black [White] DC () Blue [Black] D-F9BW(V) OUT (+)

SYJ300/500/700

wire length) Pg7 65.5 [67.7] 75.5 55.7 [57.9] 64.6 57.2 50.7 34.7 8 9 8 9 8 9 8 9 14.5 3 14.5 3 14.5 3 14.5 3 20 20 20 20 23 23 23 23 27 Refer page 4-4-61 for dimensions with connector cable. 4-4-22 23 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ500 Base Mounted (With sub-plate) [ ] for AC Grommet (G), (H): SYJ54G H -01 1/8 (A port) 18 8.5 V100 SY 2-4.5 (For mounting) 4 34

VZ100/300/500

DXT170-34-1B Note With screw (For VZ32) Refer to pages 4-6-18 to 4-6-28 for manifold use.