Body Size: 40, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 06 (3/4), Option: BM (B + M), Semi-Standard 1: Standard, Semi-Standard 2: Standard

Body Size: 40, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 06 (3/4), Option: DH (D + H), Semi-Standard 1: Standard, Semi-Standard 2: Standard

Body Size: 40, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 06 (3/4), Option: CM (C + M), Semi-Standard 1: Standard, Semi-Standard 2: Standard

Body Size: 40, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 06 (3/4), Option: DG (D + G), Semi-Standard 1: Standard, Semi-Standard 2: Standard

Body Size: 40, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 06 (3/4), Option: BG (B + G), Semi-Standard 1: Standard, Semi-Standard 2: Standard

Body Size: 40, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 06 (3/4), Option: CG (C + G), Semi-Standard 1: Standard, Semi-Standard 2: Standard

Body Size: 40, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 06 (3/4), Option: GH (G + H), Semi-Standard 1: Standard, Semi-Standard 2: Standard

Body Size: 40, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: 06 (3/4), Option: BG (B + G), Semi-Standard: Y (Knob, Upward)

Body Size: 40, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: 06 (3/4), Option: BG (B + G), Semi-Standard: 1N (1 + N)

Body Size: 40, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 06 (3/4), Option: Standard, Attachment: Standard, Semi-Standard 1: Standard, Semi-Standard 2: Standard

AS

03, 04 100 200 01, 23 100 0 0 5 10 0 0 5 10 Number of needle rotations Number of needle rotations AS4201F, AS4211F AS4301F, AS4311F AS3201F, AS3211F AS3301F, AS3311F 10, 11, 12 12, 13, 16 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 1500 1000 08, 09 10, 11 Flow rate L/min (ANR) Flow rate L/min (ANR) 06, 07 1000 500 500 0 0 5 10 0 0 5 10 Number of needle rotations Number of needle rotations

ASD

Metric size Inch size With One-touch fitting 04 06 08 10 12 01 03 05 07 09 11 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT AS N ASP Bore size ASN M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 AQ ASV AK ASS Needle Valve/Flow Characteristics (Inlet Pressure: 0.5 MPa) ASR ASD230F ASD330F ASD430F ASF 100 200 400 Flow

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

O P Model ZM ZH05DS-06-06-06 ZH05DL-06-06-06 ZH07DS-06-06-06 ZH07DL-06-06-06 ZH10DS-06-06-08 ZH10DL-06-06-08 ZH13DS-08-10-10 ZH13DL-08-10-10 ZH15DS-10-12-12 ZH15DL-10-12-12 12.8 6 24 21 7.8 6 17 24 12.8 6 24 21 6 17 24 12.8 6 24 22 6 17 24 12.8 6 24 22 6 17 24 13.7 6 26 24.5 8 20 28 13.7 6 26 24.5 8 20 28 15.3 10 28 27 10 22 30 15.3 10 28 27 10 22 30 Applicable tubing diameter J 7.8 7.8 7.8

Body Ported Type Vacuum Ejector ZH Series

(SUP. port) (VAC. port) (EXH. port) ZB D A S 10 ZH 06 06 08 Body Ported ZA Accessories (Standard bracket/Silencer)2 Nozzle size ZX 05 0.5 mm 07 0.7 mm 10 1.0 mm 13 1.3 mm 15 1.5 mm 18 1.8 mm 20 2.0 mm Symbol Standard bracket Silencer Nil N S1 NS1 1 Options S and NS are not available for EXH. port with a screw-in connection. 2 Each accessory is not assembled with the product, but shipped

Pressure Specifications: 2 [-10 to 100kPa (for low pressure)], One-touch Fitting Type: 06 (ø6mm, KJH06-M5), Option, Case Holder: B (With PPA-B), Unit Specification: M (Fixed in SI Unit)

Clean Series: 10 (Clean Room), Stations: 06, Cylinder Port: C4 (w/One-touch Fitting for ø4), Kit: FU1 (w/1.5 m Cable, Top Entry), Option: B (w/Back Pressure Check Valve)

Special Applications: 10-AR (Clean Series), Body Size: 50, Reverse Flow: No, Thread: N (NPT), Port Size: 06 [3/4 (Size 40, 50)], Accessory, Not Attached: None, Option: 1Z (1+Z)

Special Applications: 10-AR (Clean Series), Body Size: 40, Reverse Flow: No, Thread: N (NPT), Port Size: 06 [3/4 (Size 40, 50)], Accessory, Not Attached: None, Option: YZ (Y+Z)

Special Applications: 10-AR (Clean Series), Body Size: 40, Reverse Flow: No, Thread: N (NPT), Port Size: 06 [3/4 (Size 40, 50)], Accessory, Not Attached: None, Option: 1Z (1+Z)

Base Mounted Wiring: 01T (Plug-in w/Terminal Block), Stations: 10 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 06 (3/4), Thread: T (NPTF)