Cylinder with Lock Series CLS

D C NT-12 NT-16 125, 140 160 M30 x 1.5 18 46 53.1 44 M36 x 1.5 21 55 63.5 53 H B 12 Series CLS Accessory Dimensions Single/Double Knuckle Joint Mounting H A (mm) 3.5 Applicable knuckle joint part nos.

C76

Piston rod (Rubber cushion only) Bore Stroke C With rod boot Wh NCA K KK DC e -X KA 20AM 9 9 Rod cross section f I Data h (mm) BE AM 20 24 C 12 14 D 37.5 46.5 FA 30 35 FB 14 16 K 10 12 KA KK KV 38 50 KW 7 8 TDH9 TW 34.5 42.5 WH 38 45 Eh8 EE G 9 12 H 58 69 HR N 17(19) 22(25) NB 34.5 42.5 S 68 89 XB 47 57 XC ZZ 140 174 SW 17 19 TC M8 x 1 Bore 30 0 0.033 +0.036 0 10 32 40 97 122 M30 x 1.5 G

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

C76

Rail mounting type (A) Band mounting type (B) or non-magnet CP95 ZZ + Stroke NCM C76KE Non-rotating, Piston rod (Rubber cushion only) Bore Stroke C With rod boot Wh NCA K KK DC e -X KA 20AM 9 9 Rod cross section f I Data h (mm) AM 20 24 BE C 12 14 FA 30 35 K 10 12 KK KV 38 50 TDH9 TW 34.5 42.5 D 37.5 46.5 FB 14 16 KA KW 7 8 WH 38 45 EE G 9 12 N 17(19) 22(25) XB 47 57 H 58 69 NB 34.5 42.5

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

-H -R -W N L Bore size Stroke Axial foot: CBM2L CL MLGC -H -R -W N L -H -R -W Front flange: CBM2F Bore size Stroke Rear flange: CBM2G Bore size Stroke N L CNA CB CV/MVG CXW -H -R -W N L Bore size Stroke CXS Single clevis: CBM2C CXT MX MXU MXS -H -R -W N L Bore size Stroke Double clevis: CBM2D MXQ MXF MXW MXP MG Rear trunnion: CBM2T Bore size Stroke -H -R -W N L Bore size Stroke -H -R -W Front

CM2

Boss-cut front trunnion UZ Cushion Style A Rubber bumper Air cushion H Air cylinder Air-hydro cylinder * Air-hydro cylinder: rubber bumper only.

MXW

Body tapped H l Positioning hole D x H (mm) Max. screw-in depth l (mm) Max. tightening torque (Nm) Model Bolt D 5H9 + 0.030 depth 4.5 2.1 6 MXW8 M4 x 0.7 0 5H9 + 0.030 depth 4.5 6 2.1 MXW12 M4 x 0.7 0 Positioning hole D x H (mm) Max. screw-in depth l (mm) Max. tightening torque (Nm) Bolt Model 6H9 + 0.030 depth 5.5 9 4.4 MXW16 M5 x 0.8 0 6H9 + 0.030 depth 5.5 5H9 + 0.030 depth 4.5 13 4.4

Air Slide Table Series MXW

MXS MXQ 8 x M5 x 0.8 thread depth 13 Note) MXF 6H9 + 0.030 0 depth 5.5 (Insert) 6H9 + 0.030 0 depth 5.5 7 MXW MXJ 72 98 48 MXP MXY Y Y 25 160 40 L 40 40 MTS 11 24 24 K A 60 50 32.5 Z A Bottom through-hole 5.1 N x M6 x 1 thread depth 12 (N-1) x H G H 7 GG HH 6H9 + 0.030 0 depth 5.5 NN x M6 x 1 thread depth 12 Bottom through-hole 5.1 F E 6H9 + 0.030 0 depth 5.5 (mm) DHH H J K L E N F NN G Z

Series VQ Metal Seal/Rubber Seal Body Ported

The direction of the L and M connectors of a pilot valve is opposite to that of the single and double style. (1) (1) L M G L M G VQ111P (H) (Y) VQ111P (H) (Y) X18 {A side( Bottom side)} {B side(Top side)} X18 {A side( Bottom side)} {B side(Top side)} 3 position (VQ1000 only) 3 position (VQ1000 only) Voltage 1 to 6 Voltage 1 to 6 Note 1) (H): 1.5W, (Y): 0.5W, G type: DC only Note 1) (H

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

N L A -H -R -W N L Front flange: CBM2F Bore size Stroke A Double clevis: CBM2D CBM2D Bore size Stroke -H -R -W N L -H -R -W N L Single clevis: CBM2C Bore size Stroke A A Rear trunnion: CBM2T Bore size Stroke Front trunnion: CBM2U Bore size Stroke A -H -R -W -H -R -W N L N L A (mm) Axial foot Rear flange Bore size (mm) LS ZZ Double lock 152 156 156 184 Z Rear lock 141 145 145 176 Front lock

VZ3000

: MAX. 7 C6: MAX. 7.5 Applicable cable O.D. 3.5 to 7 2-One-touch fitting (A, B port) Applicable tubing model C4: T0425 C6: T0604 3-3-21 Series VZ3000 2 Position Double VZ3220 Grommet (G), (H) VZ3220-M5 G H Manual override (Non-locking) (Lead wire length) Mounting hole for manifold G: 300 mm H: 600 mm (Mounting hole) (PE port) (Piping port) L plug connector (L) VZ3220-L-M5 M plug connector

KP/KPQ/KPG

Clean One-touch fittings (for blowing) 04 06 08 10 12 4 6 8 10 12 01 02 03 04 00 04 06 08 10 12 R 1/8 R 1/4 R 3/8 R 1/2 Thread connection Tubing (rod) connection K Model H L T Y U R Male connector, Straight union Union elbow, Male elbow Male branch tee, Union tee Male run tee Male branch, Union "Y" Plug-in reducer M Plug Same dia. tubing H 4 6 8 10 12 Different dia. tubing (plug-in reducer

Modular Type Regulators Series AR

H H Center of piping Center of piping Center of piping Dimensions Model Standard specifications Optional specifications Square type pressure gauge Digital pressure switch Round type pressure gauge Round type pressure gauge (with color zone) P1 P2 A B Note 1) C D K F J H J H J H J H J AR10 AR20(K) AR25(K) AR30(K) AR40(K) AR40(K)-06 AR50(K) AR60(K) 12.5 11 M5 x 0.8 58 M18 x 1 13 0 26 26 25

Speed Controller with Indicator

flats) Metric Size [mm] Model d T H D1 D2 D3 L1 L2 L3 L4 L5 A M W1 Y Weight [g] Unlocked Locked Unlocked Locked AS131FS1-M5E-23 3.2 11.6 19.4 17.5 33.8 39 36.5 35 33.5 13.3 13.6 9.6 7 AS131FS1-U10-32/23 AS131FS1-M5E-04 4 8.2 11.5 19.8 AS131FS1-U10/32-04 AS131FS1-M5E-06 6 10.4 20.9 20.4 36.6 8 AS131FS1-U10/32-06 7.2 M5 x 0.8 10/32UNF 8 9.6 9.4 Inch Size [mm] Model d T H D1 D2 D3 L1 L2 L3

ISO Standard Hydraulic Cylinder

Bore size (mm) NTH-040 NTH-050 NTH-060S NTH-080S NTH-100S B C d D H CH2 21 26 39 48 62 10 12 16 20 25 25.4 31.2 47.3 57.7 75 M16 x 1.6 M20 x 1.5 M27 x 2 M33 x 2 M42 x 2 40 50 63 80 100 22 27 41 50 65 CHA Related Products D339 CHSD Series Auto Switch Mounting Refer to pages 431 to 490 for detailed specifications.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

H 10.5 5.5 10.5 5.5 A B 3H9( ) depth 2.5 +0.025 0 3.2 3.2 6.3 7 7 12 1 A B NN x M4 x 0.7 thread depth 8 4 3H9 ( ) depth 2.5 +0.025 0 HA GA A-A B-B (mm) Model F 22 25 21 26 27 N 4 4 6 6 6 G 6 13 11 21 H 23 26 28 28 NN 2 2 3 3 3 GA 13 13 29 39 49 HA 16 26 20 28 28 I 9 9 9 16 9 J 17 27 37 48 65 K 21.5 31.5 41.5 51.5 61.5 M 42 52 62 80 90 Z 41.5 51.5 61.5 79.5 89.5 ZZ 64 74 84 102 112 13-/22

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

G H 5.5 11 11 5.5 B A 3.2 6.5 7 7 12 1 4 NN x M4 x 0.7 thread depth 8 B A 3H9 ( ) depth 2.5 +0.025 0 3H9 ( ) depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 ZZ 64 74 84 106 122 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 HA 20 20 20 30 48 N 4 4 6 6 6 GA 11 21

CLS

Extend the dimensions of A and H when using a single/double knuckle joint together with a rod end nut.

HEC-OM-S008

sum CR (H) (L) Thermo-con STX COM Data ETX Check sum CR 101 100 10-1 10-2 (H) (L) Host ACK CR (Possible to omit) Host SOH UT ENQ COM Check sum CR (H) (L) Thermo-con SOH UT STX COM Data ETX Check sum CR 101 100 10-1 10-2 (H) (L) Host ACK CR (Possible to omit) COM indicates communication command.

IDU/IDF

Note 4) Combinations of M and H, H and M, R and S, S and T, L and M are not available.