CXS

(10) 10 3 2-5.1 8 6 22.5 22.5 (mm) 4-M5 x 0.8 with depth 4.5 (Piping port) (Opposite side: Same) Model W Z ZZ SS S 10 66 103 40 46 CXSW6-10 (Z) (13) (13) 20 76 123 50 56 CXSW6-20 30 86 143 60 66 CXSW6-30 40 96 163 70 76 CXSW6-40 50 106 183 80 86 CXSW6-50 For CXSW6-10 and CXSW6-20 only, a part of the switch rail (dimensions marked with an "") is notched to facilitate auto switch mounting.

IDU/IDF

Grommet with waist Power cord outlet Grommet with waist 6 to 12 B A B C C A A 240 240 65 65 30 30 30 30 C 70 70 40 40 50 50 50 50 A 240 240 30 30 50 50 50 50 B 38 38 32 32 45 45 45 45 Model IDU6D IDU8D IDU11C IDU15C IDU22C1 IDU37C1 IDU55C IDU75C B 38 38 50 50 45 45 45 45 C 70 70 49 49 50 50 50 50 Model IDF6D IDF8D IDF11C IDF15C IDF22C1 IDF37C1 IDF55C IDF75C Transformer box (1795) Power cord

VZ3000

(W) [Current mA] DC 4.5/50 Hz, 4.2/60 Hz 100 VAC: 45/50 Hz, 42/60 Hz 200 VAC: 22.5/50 Hz, 21/60 Hz Note) Inrush Apparent power (VA) [Current mA] AC 3.5/50 Hz, 3/60 Hz 100 VAC: 35/50 Hz, 30/60 Hz 200 VAC: 17.5/50 Hz, 15/60 Hz Refer to pages 3-3-24 to 3-3-27 for manifold use.

CJ2

Component Parts No. q w e r t y u No. i o !0 !1 !2 !3 !

Compact Cylinder with Lock Series CLQ

Bore size (mm) T1 M F E D B T2 Part no. 42 50 62 76 6 8 10 12 16 20 25 30 6.8 9 11 14 18 20 26 31 6.5 6.5 8.5 10.5 10 12 16 18 YA-03 YA-05 YA-08 YA-10 32, 40 50, 63 80 100 YA 03 Applicable cylinder bore size 32, 40 50, 63 80 100 03 05 08 10 Mounting bracket Bore size (mm) W V U Weight (g) Part no.

MG

0 w !3 -X !1 !9 @3 !0 !2 @2 r o e y !5 2032 to 63 Over 50 to 100 stroke 80, 100 Over 50 stroke to 200 stroke Data Over 50 stroke @0 t 50 stroke or less 32 to 63 Over 100 stroke 80, 100 Over 200 stroke 50 stroke or less 50 or more Component Parts Description Material Note No. q w Description Material Note No. !2 !3 !

7

Different surfaces D-P3DWA D-P4DW D-P79WSE D-P74 24.5 50 50 50 12 D-M9 D-M9W D-M9A Caution D-A9 D-B54 50 50 75 As for the precautions on the auto switches, product specifications, refer to pages 437 to 439. Note 1) When two D-P3DWA are mounted to the cylinder with stroke 50 mm, mount them on different surfaces. Note 2) The standard strokes of CKG1 are 50, 75, 100, 125 and 150 mm.

Clamp Cylinder Series CK1

Applicable cylinder series CKP140-100 63 50 40 CKP140-125 BK1T-040 D-P4DWSC D-P4DWSE D-P4DWL/Z CKP140-150 Series CKG1 CKG140-50 CKG150-50/CKP150-50 CKG163-50/CKP163-50 CKG140-75 CKG150-75/CKP150-75 CKG163-75/CKP163-75 CKG140-100 CKG150-100/CKP150-100 CKG163-100/CKP163-100 CKG40-R050 Series CKP1 BAP1T-040 D-P79WSE D-P74L/Z Series CKG140/50/ 63 CKG40-R075 CKG40-R100 Series CKP150/63 CKG140-

MHZ2/MHZJ2

50 Pressure 0.2MPa Pressure 0.2MPa 40 H Overhang H mm Overhang H mm 40 30 0.6MPa, 0.7MPa 30 0.3MPa Gripping point 0.3MPa 0.4MPa L 20 0.4MPa 0.5MPa 0.5MPa 20 0.6MPa, 0.7MPa 10 10 MHZJ2/With dust cover 0 10 20 30 40 50 0 10 20 30 40 50 Gripping point L mm Gripping point L mm H MHZ 2-16 MHZ 2-16 60 60 Pressure 0.2MPa 50 50 Gripping point Pressure 0.2MPa L Overhang H mm Overhang H mm 40 40 0.3MPa

Compact Cylinder with Air Cushion Series RQ

YA-03 32, 40 Applicable air cylinder bore 18 6.8 16 6 42 6.5 10 YA-05 50, 63 20 9 20 8 50 6.5 12 YA-08 80 26 11 25 10 62 8.5 16 03 05 08 10 For 32, 40 For 50, 63 80 100 Mounting bracket YA-10 100 31 14 30 12 76 10.5 18 Type A mounting bracket YA YB YU Bore size (mm) Type B mounting bracket Joint W V U Mass (g) Part no. 32, 40 YA-03 56 55 18 6 50, 63 YA-05 67 100 22 8 CUJ 80 YA-08 83 195

HRX-OM-R039

50/60Hz.

CKZ2N

2 y i w r !1 Replaceable Kits List !2 !1 !0 o i u y t r e w Switch actuator q Contents Kit no.

5 Port Solenoid Valve SY Series

wire Without connector 50 60 2 200 VAC Hz M M plug connector 50 60 110 VAC Hz [115 VAC Hz] MN MO M8 connector Without connector cable W0 3 50 60 50 60 50 60 4 220 VAC Hz [230 VAC Hz] Note) For connector cable of M8 connector, refer to page 225.

2/3 Port Valve

Rated voltage 2 200V AC 50/60Hz 1 100V AC 50/60Hz S Z L 3 110V AC 50/60Hz 4 220V AC 50/60Hz 5 24V DC 6 12V DC 7 240V AC 50/60Hz Other 9 Option Option Part No.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Guide for Using MY3B Side Support Guide for Using MY3A Side Support 100 100 90 90 (1800) (1900) 80 80 m 70 70 MY3A63 Weight w (kg) 60 60 MY3B63 Weight w (kg) l 50 50 (1300) (1400) 40 40 MY3B40 MY3A40 30 30 m 20 20 (1000) (1100) l MY3B25 MY3A25 10 m 10 (900) (1000) MY3A16 MY3B16 0 0 4000 3000 2000 1000 0 4000 3000 2000 1000 0 Support spacing l1 (mm) Support spacing l1 (mm) Note) A side support

MQQ

W Mounting orientation: Horizontal Operating pressure: 0.5MPa Allowable Lateral Load at Rod End Standard type: MQQTB Lateral load resisting type: MQQLB/Built-in ball bushing 60 5 50 Maximum allowable lateral load W(N) Maximum allowable lateral load W(N) 4 28 40 3 28 25 30 25 2 20 20 20 16 16 1 10 10 10 30 60 75 100 30 60 75 100 Stroke (mm) Stroke (mm) Note 1) The indicated allowable lateral

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

MXY Fig. (1) Overhang: Ln (mm), Correction Value of Moment Center Position Distance: An (mm) Fig. (2) Allowable Static Load: F(N) Pitch moment Yaw moment Roll moment F F L1 A1 Mp A2 L2 W L3 A3 Graph (1) Load Weight: W Mr Static moment Dynamic moment MXY6 W My W L3 A3 0.6 A2 L2 Rubber stopper screw MX Load weight W kg Mr 0.5 L1 A1 Metal stopper screw Mp 0.4 W MTS My W 0.3 W MY 0.2 Mey Mep

High Purity Chemical Valve

S) PB W PA A B SMC A B Dimensions (Max.

3 Port Solenoid Valve Series VQ100 1

rated voltage Standard type (1 W) High pressure type (1.5W) Low wattage type (0.5 W) Large flow type Nil H Y U 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other 1 2 3 4 5 6 9 Note) Option Note) Except large flow type.

3 Port Solenoid Valve Series VQ100

rated voltage Standard type (1 W) High pressure type (1.5W) Low wattage type (0.5 W) Large flow type Nil H Y U 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other 1 2 3 4 5 6 9 Note) Option Note) Except large flow type.