Series CQ2

There may be large variations depending on the surrounding environment (variations as much as 30%).

Turntable Cylinder Series MGT

75st Load weight m(kg) Load weight m(kg) 40 50 100 Larger than 50st 50st 25st 30 25, 50st 20 50 40 10 30 5 4 3 2 20 1 10 20 30 40 50 100 200 300 1 2 3 4 5 10 20 304050 100 200 300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) Allowable side load F(N) 1N: Approx. 0. 102kgf F Stroke (mm) Bore size (mm) Model 25 50 75 100 125 150 175 200 MGTM 140 151 162 176 193 212 178 204 63

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Note 2) Min. operating frequency is once in 30 days.

Rotary Cylinder Series MRQ

Graph (2) Cylinder Output on the Retracting Side (Double acting) 1500 150 Tube bore size [mm] 1000 100 40 Side load Balance weight 400 500 40 50 32 200 250 300 20 25 30 Operating pressure [MPa] Cylinder output F[N] Load weight [kg] 150 15 Allowable Side Load on the Piston End (Nm) 100 10 Stroke of linear part Size 40 40 50 4 5 100 75 50 40 30 25 20 15 10 5 32 32 40 9 10 11 12 12 13 13 13

Air Cylinder

Standard Strokes Bore size [mm] Standard stroke [mm] Max. manufacturable stroke 32 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 300 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 300 45 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 300 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 400 56 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 400 63 25, 50, 75, 100, 125, 150

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa 0.5 40 8 0.5 Gripping force (N) Gripping force (N) 0.4 30 6 0.4 0.3 0.3 20 4 0.2 0.2 10 2 0.1 0.1 0 20 30 50 60 Gripping point L (mm) 40 0 30 40 60 70 Gripping point L (mm) 50 80 MHY2-16D MHY2-25D F F F F 35 100 Pressure 0.6 MPa Pressure 0.6 MPa 30 0.5 0.5 80 Gripping force (N) Gripping force (N) 25 External grip 0.4 0.4

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa 0.5 40 8 0.5 Gripping force (N) Gripping force (N) 0.4 30 6 0.4 0.3 0.3 20 4 0.2 0.2 10 2 0.1 0.1 0 20 30 50 60 Gripping point L (mm) 40 0 30 40 60 70 Gripping point L (mm) 50 80 MHY2-16D MHY2-25D F F F F 35 100 Pressure 0.6 MPa Pressure 0.6 MPa 30 0.5 0.5 80 Gripping force (N) Gripping force (N) 25 External grip 0.4 0.4

180° Angular Style Air Gripper Series MHY2/MHW2

30 50 60 Gripping point L (mm) 40 70 0 30 40 60 70 Gripping point L (mm) 50 80 90 658 180 Angular Style Air Gripper Series MHY2/MHW2 MHW2-32D MHW2-50D MHW2-20D 300 25 100 Pressure 0.7 MPa Pressure 0.7 MPa Pressure 0.7 MPa 250 20 0.6 80 0.6 Gripping force (N) Gripping force (N) Gripping force (N) 0.6 200 0.5 0.5 0.5 60 15 0.4 0.3 0.4 150 0.4 40 0.3 10 0.3 100 0.2 0.2 0.2 5 20 50 0 0 40 Gripping

VCL

5.5 42 19.3 38.5 66 VV2CS4 26 68 47.5 58.5 70 103 94 57 25.5 28.5 30 5.5 42 20.8 41.5 74 344

Series MXP Precision Air Slide Table

Load (N) 0 50 100 150 Load (N) 0 50 100 150 Load (N) 200 16 16 16 L=120mm L=120mm L=120mm MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.08 0.12 0.06 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.10 Table deflection (mm) Table deflection (mm) Table deflection (mm) 0.06 0.04 0.08 0.04 0.06 0.04 0.02 0.02 0.02 0 0 0 50 200 250 Load (N) 150 100 50 200 250 Load (N) 150 100

Vacuum Module Series ZX

Nil 0.6 m ZF (For 110 VAC) 30 50 3 m 5 m 6 3A 36 VJ10 ZP The asterisk () denotes the symbol for assembly. Lead wire length Note) If ordering switch with 5 m lead wire, specify both switch and lead wire connector part numbers. Nil 0.3 m (Standard) SP 6 10 15 20 25 30 0.6 m 1 m 1.5 m ZCUK Ordering example) ZX100-K150ZECN(-Q) 1 pc. VJ10-20-4A-6 2 pcs.

MHY2/MHW2

0.1 0.1 5 L L 0 20 30 50 60 Holding point L (mm) 40 70 0 30 40 60 70 Holding point L (mm) 50 80 90 2.8-4 180 Angular Gripper Series MHY2/MHW2 MHW2-32D MHW2-50D MHW2-20D 300 25 100 Pressure 0.7MPa Pressure 0.7MPa Pressure 0.7MPa 250 20 0.6 80 0.6 0.6 Holding force (N) Holding force (N) Holding force (N) 200 0.5 0.5 0.5 60 15 0.4 0.3 150 0.4 0.4 40 10 0.3 0.3 100 0.2 0.2 0.2 5 20 50 0 0 40

MRQ

20 25 30 Operating pressure [MPa] Cylinder output F[N] Load weight [kg] 150 15 Allowable side load on the piston end Unit: N 100 10 Stroke of linear part Size 40 40 50 4 5 5 10 15 20 25 30 40 50 75 100 32 40 32 14 14 13 13 13 12 12 11 10 9 20 25 30 2 2.5 3 23 23 22 21 21 20 19 18 16 15 2) Using the cylinder body installed vertically: To operate the rotary cylinder with the cylinder body

NCA1

CD CL NCA1-150 1/2 1 7/8 NCA1-325 3/4 2 5/8 NI-150 3/4 1 1/2 3/4 1/2 5/8 7/16 20 NCDP-150 .500 0 -.002 .106 2.28 1.94 NI-325 1 1/8 2 1/16 1 1/4 3/4 7/8 3/4 -16 NCDP-325 .750 0 -.002 .140 3.10 2.72 Note) Cotter pins are included. 2 x CD CD dia.

NCA1

CD CL NCA1-150 1/2 1 7/8 NCA1-325 3/4 2 5/8 NI-150 3/4 1 1/2 3/4 1/2 5/8 7/16 20 NCDP-150 .500 0 -.002 .106 2.28 1.94 NI-325 1 1/8 2 1/16 1 1/4 3/4 7/8 3/4 -16 NCDP-325 .750 0 -.002 .140 3.10 2.72 Note) Cotter pins are included. 2 x CD CD dia.

VQ7-6/7-8

) 38(53) 32(42) 1 23(30) 2-3/8, 1/2, 3/4 30(42) 30(42) X(PE) port 1/8 2-3/8, 1/2, 3/4 3/8, 1/2, 3/4 R1, R2 port X(PE) port 1/8 30(42) 30(42) 3/8, 1/2, 3/4 R1, R2 port P port P port ( ): 3/4 Dimensions inside are for rubber seals. ( ): 3/4 3-10-25 26 Series VQ7-8 Construction DIN Terminal Type Metal seal Rubber seal type VQ7-8-FG-SVQ7-8-FG-S-R !

ZX

Ordering example) Lead wire length 5A 10 ZS ZCU Lead wire length (For DC) Nil 6 10 15 20 25 30 0.3 m (Standard) 4A 20 VJ10 6 AMJ 0.6 m 1 m 1.5 m 2 m 2.5 m 3 m Note) If ordering a vacuum switch with 3 m lead wire, specify both the vacuum unit switch and the 3 m lead wire connector part numbers. Nil 30 50 0.6 m 3 m 5 m (For 100 VAC) 1A 36 VJ10 6 Misc. ZX1051-K15LOZ-EC 1 pc.

MK

0.062 0 0.1 0.2 MKB40 1 8 65 29.5 35 9 depth 7 M10 x 1.5 94.5 52 5.5 12 8 69 14 16 40 5 Rc / 61 3 6.5 14 24 7 30 0.062 0.1 0.2 0 MKB50 1 4 0.15 0.15 11 depth 8 76.5 34 41 M12 x 1.75 112 64 6.6 15 10.5 86 19 20 50 7 Rc / 73 3.5 7.5 0.15 30 0.15 8 37 17 0.062 0 0.1 0.2 MKB63 1 4 Note 1) Above figure is for D-A73/A80.

VQ7-6/7-8

) 38(53) 32(42) 1 23(30) 2-3/8, 1/2, 3/4 30(42) 30(42) X(PE) port 1/8 2-3/8, 1/2, 3/4 3/8, 1/2, 3/4 R1, R2 port X(PE) port 1/8 30(42) 30(42) 3/8, 1/2, 3/4 R1, R2 port P port P port ( ): 3/4 Dimensions inside are for rubber seals. ( ): 3/4 3-10-25 Series VQ7-8 Construction DIN Terminal Type Metal seal Rubber seal type VQ7-8-FG-SVQ7-8-FG-S-R !

AC Servo Motor Driver (Pulse input type/Positioning type)

time constants (msec) PE07 100 600 300 150 600 300 150 1000 500 250 800 400 200 Home position return position data (m) PE08 0 -2000 (<1000 stroke)/-200 (>1000 stroke) Stopper type home position return PE10 100 200 stopper time (msec) Stopper type home position return torque limit value (%) PE11 15 30 Regenerative option PA02 000 000 (Non)/002 (LEC-MR-RB-032) 1 1 0 0 Rotation direction selection