Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Note 3) Polyurethane is only applicable for the ZFC050-02. SP ZCUK Made to Order (Refer to page 1115 for details.)

ITV

IITV20 02 5 Example AV Valve stations Electro-pneumatic regulator Blanking plate assembly ITV1030-311S-X26 2 2 stations P398020-13 AU 8 8 stations Electro-pneumatic regulator LOCK UNLOCK RESET SET AF ITV2050-212S-X26 E SMC REGULATOR OUT port size ITV1000/2000 P 02 03 1/4 3/8 LOCK UNLOCK RESET SET MPa AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-

VVXA21/22

L1 L2 384 372 494 476 348 336 448 430 312 300 402 384 276 264 356 338 240 228 310 292 204 192 264 246 168 156 218 200 132 120 172 154 96 84 126 108 VVXA31 VVXA32 Symbol Model A 40 44 B 20 22 C 9 10 D 22 24 E 59 66 F 33 34 G 24 25 H 30 40 J 36 46 K 6 9 M 45.5 50.5 N 69 76 VVXA31 VVXA32 17-3-108

3 Port Solenoid Valve

Stations L1 L2 11 128 122 12 138.5 132.5 13 149 143 14 159.5 153.5 15 170 164 16 180.5 174.5 17 191 185 18 201.5 195.5 19 212 206 7 86 80 8 96.5 90.5 9 107 101 10 117.5 111.5 3 44 38 4 54.5 48.5 5 65 59 6 75.5 69.5 2 stations 33.5 27.5 20 stations 222.5 216.5 645 Series 10-V100 Specific Product Precautions 1 Be sure to read before handling.

ZB-OM00301

10 ZB1-VPN3A KJ H 04 04 C2 2 H 02 2 C4 4 L 04 4 N1 1/8" 01 1/8" N3 5/32" 03 5/32" L2 2 4 L4 4 LN1 1/8" LN3 5/32" -N KJL04-C1-N 10 Assy ZB1-FE3-A 30m ZA ** 10 1 0-101kPa15V 2%F.S ZA ZB1-SE1-A 3 -100100kPa15V 2%F.S.

Air Cylinder

Knock pin hole Clevis Pin x Material: Cast iron 80, 100 L2 L1 Material: Carbon steel (mm) Part no.

HRX-OM-W002

) [ ] lamp Lights up when AL.01 Tank level drop failure or AL.02 Tank level dropalarm is generated.

HRX-OM-X071

) [ ] lamp Lights up when AL.01 Tank level drop failure or AL.02 Tank level dropalarm is generated.

IS3000

LED/24 VDC Port size Nil 02 N02 With gasket Rc 1/4 NPT 1/4 Note) Micro load type: Not available L2 option. 864

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

How to Order JSXZ 3 1 C N 02 R 5 G D B w y e r t u o !

Speed Controller: Standard Type Elbow Type (Metal Body) AS Series

Note 3) L2: Reference dimensions 49.7 25.8 27.5 28.5 47.4 24 (23.8) 38.5 54.7 1/2 1/2 649

One-touch Fittings

M L1 M L1 L2 D Plug-in Elbow: KQ2L Applicable tubing Effective area [mm2] Min. port size Release button dimensions D2 L1 L2 A M Applicable tubing O.D.

Electric Actuator with Integrated Guide

Model Allowable Moment (Nm) Allowable dynamic moment Model Mounting orientation Load movement direction LTF6 200 Horizontal/Lateral Horizontal/Lateral Lateral Horizontal a Mep L1 (mm) Pitching 100 m a=1000 a=2000 a=3000 L1 30 20 10 0 Transfer load m (kg) L2 200 a=1000 a=2000 a=3000 Mer L2 (mm) Rolling Yawing 100 m L2 Mer 30 20 10 0 m Transfer load m (kg) 200 a=1000 a=2000 a=3000 L3 (mm) 100

Compact Manifold Regulator

L2 L2-10.5 L1=(28 x n)+56 18 20 28 28 5.3 28 5.5 84 SMC SMC SMC SMC 8 52.5 39 3 5 11.5 6 L2 dimension DIN rail part no.

Electric Actuator/Slider Type

Single phase 200 to 230 VAC, 50/60 Hz Connection terminal: L1, L2 Three phase 200 to 230 VAC, 50/60 Hz Connection terminal: L1, L2, L3 L2 L3 L1C Control power supply Connect the control power supply.

3 Port Solenoid Valve

112.2 132.6 122.4 L1 L2 Bracket mounting (For bottom ported) Upward connector Panel fitting dimensions/Mounting hole dimensions M3 x 0.5 recommended 33 30 L1 L2 3 Station n 1 2 3 4 5 6 7 8 9 10 11 12 61.2 36 71.4 46.2 81.6 56.4 91.8 66.6 102 76.8 112.2 87 122.4 97.2 132.6 107.4 142.8 117.6 153 127.8 163.2 138 173.4 148.2 L1 L2 Lateral connector Panel fitting dimensions/Mounting hole dimensions

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Single phase 200 to 230 VAC, 50/60 Hz Connection terminal: L1, L2 Three phase 200 to 230 VAC, 50/60 Hz Connection terminal: L1, L2, L3 L2 L3 L1C Control power supply Connect the control power supply.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(Example) For M3: L1 = 6 mm Applicable shaft types: J, K, T The maximum dimension L2 is, as a rule, twice the thread size. (Example) For M3: L2 = 6 mm Applicable shaft types: J, K, T 2. Q1 = M L2 = L2 + (3 x P) 3. L1 + (3 x P) L2 + (3 x P) 4. L2 = Q2 = M L1 = 5. Q2 = M 6.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(Example) For M3: L1 = 6 mm Applicable shaft types: J, K, T The maximum dimension L2 is, as a rule, twice the thread size. (Example) For M3: L2 = 6 mm Applicable shaft types: J, K, T 2. Q1 = M L2 = L2 + (3 x P) 3. L1 + (3 x P) L2 + (3 x P) 4.

Shock Absorbers and Rate Controls

(onpressed (tbr.) 0tltll.5lllxl 0.75 1.0 l2-140 ?