SJ3A6

Flat ribbon cable (10 pins) Symbol Stations 02 09 Symbol Stations 02 04 2 stations 9 stations 2 stations 4 stations Non-polar type, with plug (24 VDC) SJ3A6-5CU-DP (4 sets) SUP/EXH block (D side mounting) J: Flat ribbon cable (PC wiring) S6B: EX510 serial transmission Symbol Stations 02 08 Symbol Stations 02 08 2 stations 8 stations 2 stations 8 stations 1 3 2 D side U side Stations G: Flat

Compact and Lightweight

H2 L3 L2 L1 All Ports: Screw-in Model H1 H2 H3 L1 L2 L3 L4 Connection thread 1 Connection thread 2 Connection thread 3 ZH05DA-01-01-01 12 12 12 67 42.5 27 26 Rc1/8 Rc1/8 Rc1/8 ZH07DA-01-01-01 70.2 ZH10DA-01-01-01 76.4 ZH13DA-01-02-02 17 17 90.8 51 29.5 36.3 Rc1/4 Rc1/4 ZH15DA-02-03-03 17 19 19 108.2 63.3 34.3 37.1 Rc1/4 Rc3/8 Rc3/8 ZH18DA-03-03-03 19 131.1 73.6 41.1 39.1 Rc3/8 ZH20DA-03-04

Output block / Power block

The Power supply can be connected only when the SI unit (EX250, EX260, EX500-Q 02 series) and Power block are side by side. Power supply connector (No.0) and power supply connector (No.1) are connected together internally.

Vacuum

:ti Statlons 02-2 stations System type. AEjectors B External Vacuum 'For plug (X) posirioning onty.

Vacuum

(station 4) Noter Order lett to right (station 1-10) facing tension bolt & filter cover 52 IIIZM $eri Manifold Dimensions inch (mm NZZM05-T068 ) t n: station L1 1 .73 @4\ 2.36 (60) 2.99 (76) 3.62 (92) 4.2s (108) 4.88 (124) 5,51 (140) 6.14 (156) 6.77 (172\ L2 2.20 (56) 2.83 (72\ 3.46 (88) 4.09 (104) 4.72 (1201 s.35 (136) 5.98 (1s2) 6.61 (168) 7.24 (18r'.

Speed Controller: Standard Type Large Flow In-line Type AS Series

series 02 03 04 06 10 12 14 20 Caution L (2) Note 1) AS800 is available as special.

VFRA3000

5 Port Air Operated Valve Series VFRA3000 Model Configuration Port size Rc(PT) Effective area (mm2) (Cv) Pilot port size Rc(PT) Weight (kg) Valve model 1 4 3 8 37.8 (2.1) 41.4 (2.3) VFRA3111-03 VFRA3211-02 2 position double 0.71 1 8 VFRA3111-02 2 position single 0.61 1 8 1 4 3 8 37.8 (2.1) 41.4 (2.3) VFRA3211-03 VFRA3311-02 3 position closed center 0.72 1 8 1 4 3 8 34.2 (1.9) 36 (2.0) PA,

Manifold Specifications

Electrical entry SC (T only) Type SU Type SC Type SC Type SU Type SC Type SU AXT622-5A AXT336-4AStations AXT336-5Stations Description AXT336-1A-1 01 02 01 02 01 02 02 03 02 03 02 03 02 03 Manifold block assembly AXT336-1A-2 AXT336-1A-3 AXT336-2A-1AXT336-2A-2AXT336-3A-1AXT336-3A-2q End plate (U side) assembly w End plate (D side) assembly e Terminal assembly Junction cover assembly Tie-rod

Pressure Range: ISE70 (0 to 1 MPa), Piping: 02 (Rc 1/4), Output Specification: AB (Switch Output 1 + Switch Output 2 [NPN or PNP Switching Type])

Pressure Range: ISE70 (0 to 1 MPa), Piping: 02 (Rc 1/4), Output Specification: AB (Switch Output 1 + Switch Output 2 [NPN or PNP Switching Type]), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: S (Lead Wire with M12 Connector; Straight, 5 m)

Pressure Range: ISE70 (0 to 1 MPa), Piping: 02 (Rc 1/4), Output Specification: AB (Switch Output 1 + Switch Output 2 [NPN or PNP Switching Type]), Unit Specification: M (SI Unit Only), Lead Wire: L (Lead Wire with M12 Connector; Right-angled, 5 m), Bracket: B (Bracket B)

Pressure Range: ISE70 (0 to 1 MPa), Piping: 02 (Rc 1/4), Output Specification: AB (Switch Output 1 + Switch Output 2 [NPN or PNP Switching Type]), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: None, Bracket: None, Operation Manual/Calibration Certificate: Y (None)

Pressure Range: ISE70 (0 to 1 MPa), Piping: 02 (Rc 1/4), Output Specification: AB (Switch Output 1 + Switch Output 2 [NPN or PNP Switching Type]), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: S (Lead Wire with M12 Connector; Straight, 5 m), Bracket: B (Bracket B)

Pressure Range: ISE70 (0 to 1 MPa), Piping: 02 (Rc 1/4), Output Specification: AB (Switch Output 1 + Switch Output 2 [NPN or PNP Switching Type]), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: None, Bracket: B (Bracket B)

Pressure Range: ISE70 (0 to 1 MPa), Piping: 02 (Rc 1/4), Output Specification: AB (Switch Output 1 + Switch Output 2 [NPN or PNP Switching Type]), Unit Specification: M (SI Unit Only), Lead Wire: L (Lead Wire with M12 Connector; Right-angled, 5 m)

Pressure Range: ISE71 (0 to 1.6 MPa), Piping: 02 (Rc 1/4), Output Specification: AB (Switch Output 1 + Switch Output 2 [NPN or PNP Switching Type]), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: S (Lead Wire with M12 Connector; Straight, 5 m), Bracket: A (Bracket A, Interchangeable with ISE70)

Pressure Range: ISE70 (0 to 1 MPa), Piping: 02 (Rc 1/4), Output Specification: AB (Switch Output 1 + Switch Output 2 [NPN or PNP Switching Type]), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: L (Lead Wire with M12 Connector; Right-angled, 5 m)

HRX-OM-Z002

HRLE050 200V N L HRLE090 200V L3 L1 L2 Fig. 3-12 Cable wiring (200V) 3.3 Installation Procedure HRLE Series 3-16 HRX-OM-Z002 Chapter 3 Transport and Set Up 400V L1 L2 L3 Fig. 3-13 Cable wiring (400V) HRLE Series 3.3Installation Procedure 3-17 HRX-OM-Z002 Chapter 3 Transport and Set Up 3.3.4 Preparation and wiring of communication cable Be sure to turn OFF the breaker of the facility power

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Note 3) Polyurethane is only applicable for the ZFC050-02. SP ZCUK Made to Order (Refer to page 1115 for details.)

ITV

IITV20 02 5 Example AV Valve stations Electro-pneumatic regulator Blanking plate assembly ITV1030-311S-X26 2 2 stations P398020-13 AU 8 8 stations Electro-pneumatic regulator LOCK UNLOCK RESET SET AF ITV2050-212S-X26 E SMC REGULATOR OUT port size ITV1000/2000 P 02 03 1/4 3/8 LOCK UNLOCK RESET SET MPa AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-