New

t r w r w e e VXF26C<t y t w w r r e q e q VXF26D<t t y r w r w e q e q Component Parts Component Parts No.

SV

(With 2 input blocks) With External Pilot Specifications 46.5 (Pitch) 2-M12 M3 16.5 18.3 13.5 P = 10.5 14.1 8.4 SV 8.6 10 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 17.7 24.6 23 59.5 SZ 3 3 PWR 3 3 42.7 5 3 E 3 5 E 5 3 E 3 5 E T T 43 PWR 56.5 2 2 2 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 1 P 1 P 1 P 1 P One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 8 5/16" 1 1 1 1 BUS 4632

2/3 Port Valve

1 i r t !1 !0 P Port A Port P Port A Port t q q o o w VX y w VN VQ B Port <3 port valve> <2 port valve> Component Parts Operation principles No. Description Material Note Body Undercover Cover Plate Valve element A Valve element B Piston Return spring Valve seat Rod Parallel pin Pilot solenoid valve When the pilot operated solenoid valve !

Fieldbus System

Connector for unit (Plug) 6 y t y t EX600-DXlB EX600-DYlB EX600-DXlCl q w q w e q w er e y t y t y t EX600-DXlD EX600-DXlE EX600-DYlE EX600-DMlE EX600-DXlF EX600-DYlF EX600-DMlF Analog Unit q w e q w e No.

CLA

W .TOea TT XIUS ' Z ZZ l ~/ t ~ ~ 20 27 Y. 42 11 20 45 153 8 15 !

Vacuum System Peripherals:

q m t r e w q U side D side 13-14-26 26 e Valve Model SX340 is for internal pilot.

MNB

GL1 T GE VA Rc(PT)P Rear cylinder port Effective thread length S + Stroke H ?

Plug-in Unit

W) 6 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) When specifying more than one option, enter symbols in alphabetical order. 3 position closed center (A) 4 (B) 2 3 Seal type 5 (R1) 3 (R2) 1 (P) 0 1 Metal seal Rubber seal Kit Designation/Electrical Entry/Cable Length T F M Kit (Terminal block box kit) Kit (D-sub connector kit) Kit (Multiple connector kit) IP40 compliant IP67 compliant FD0 FD1

CRQ2

2 @1 e u o t @3 !8 @0 @0 @2 !4 !7 !1 !9 !2 @1 @4 e u o t @3 !8 @0 @0 @2 q w r @5 y !5 !6 i q w r @5 y !5 !

Plug-in/Plug Lead: Single Unit

A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) q w e q w VQ5201 VQ5200 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e e r q w r q w VQ5301 VQ5401 VQ5300 VQ5400 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5500 (A) 4 (B) 2 VQ5501 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1

-fl Seies

W-rth std. gauge. An individualSUP spacer on manifold block can form individual P oort for the valve. ffi I NWFgTOOO| NWF9+oOOtP-{)0T-1 P-ff]T-2 %% Nore) Fd prssr|e center Vpe valves, use p/n NAFBF3000.

LEC-OM069xx

The PC or PLC...etc may not be able to monitor a brief change in the P-OT or N-OT signal to P-OT=1 or N-OT=1.

Modular/F.R.L. Units Series AC

14 18 G 57 73 H 16 17 J 41 50 T M4 X 0.7 M5 X 0.8 K 40 54 S 44 60 AF30 AF40 4 Series AF20~40 Filter Standard (Manual Drain) S F 4 T BRACKET MOUNTING THREAD W M R C G J Q P K N 2 A Bowl Detail U (AF20) H L E IN OUT D Bracket (Optional) Note: Sight glass not applicable to AF20.

Modular Type Filter Regulator Series AW

w w t t t q q q e IN OUT IN OUT IN OUT y y y e e r r r u u u Drain Drain Drain Parts list Material No.

HEC_001W-E

When the temp. set in this item is reached, the alarm [ERR12] arises. 7-8 Operation L o w T e m p . C u t o f f M O D E < 0 . 0 C 9. Low Temp.

HEC_W-E

Parity Bit P a r i t y B i t M O D E < W i t h o u t Setting range : Without (no parity), Odd, Even Indicated content : Parity bit (Ex. : Without) Function : Sets parity bit for communication. 4. Data Length Setting range : 7Bits, 8Bits Indicated content : Data length(Ex. : 8Bits) Function : Sets data length for communication. D a t a L e n g t h M O D E < 8 B i t s 5.

Mechanical Valves Series NVM, NVFM, NVZNI

) P T 0.079 in (2mm) o.T. 0 059 in (1 smm) T T 0 138 in (3 Smm) .75 PSIG (5 Kgf/cm2) F .

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Wall mounting z y P. 8-13-5 Wb: MGGLB25-200 (4.35 kg) x y x z Wa: Connection plate t =10 (880 g) MY2H40G-500 3. Ceiling mounting P. 8-13-5 4.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(Example) For M3: L2 = 6 mm Applicable shaft types: J, K, T 2. Q1 = M L2 = L2 + (3 x P) 3. L1 + (3 x P) L2 + (3 x P) 4. L2 = Q2 = M L1 = 5. Q2 = M 6.

24

V M9NWV M9NW P P P p p IC circuit 3-wire (PNP) M9PWV M9PW P P P p p 2-wire 12 V M9BWV M9BW P P P p p Diagnostic indication (2-color indicator) Relay, PLC MGT Grommet Yes 24 V 3-wire (NPN) 5 V,12 V M9NAV*1 M9NA*1 p p P p p IC circuit 3-wire (PNP) M9PAV*1 M9PA*1 p p P p p 2-wire 12 V M9BAV*1 M9BA*1 p p P p p Magnetic field resistant (2-color indicator) 2-wire (Non-polar) P3DWA P P P