Output Specification: NPN Open Collector 2 Outputs + Analog Current Output, Unit Specification: SI Unit Only, Piping Specification: R 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: Panel Mount Adapter, Operation Manual: -

Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: SI Unit Only, Piping Specification: R 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: Panel Mount Adapter, Operation Manual: -

Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: SI Unit Only, Piping Specification: R 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: Bracket B, Horizontal Mounting, Operation Manual: -

Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: SI Unit Only, Piping Specification: R 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: Bracket A, Vertical Mounting, Operation Manual: -

Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: SI Unit Only, Piping Specification: R 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: None, Operation Manual: Operation Manual, Calibration Certificate

Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: SI Unit Only, Piping Specification: R 1/8, Lead Wire: w/o Lead Wire, Bracket: Bracket B, Horizontal Mounting, Operation Manual: -

Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: SI Unit Only, Piping Specification: R 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: Panel Mount Adapter + Front Protection Cover, Operation Manual: -

Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: SI Unit Only, Piping Specification: R 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: None, Operation Manual: w/o Operation Manual, w/o Calibration Certificate

Output Specification: PNP Open Collector 2 Outputs + Copy Function, Unit Specification: SI Unit Only, Piping Specification: R 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: None, Operation Manual: w/o Operation Manual, w/o Calibration Certificate

ZSE40/ISE40

Set pressure range 100.0 to 100.0 kPa 10.0 to 101.3 kPa 0.1 to 1.000 MPa Setting range 100.0 to 100.0 kPa 101.3 to 101.3 kPa 1.000 to 1.000 MPa Example of Internal Circuit and Wiring ZSE40(F) ISE40--22(L)-(M) With analog output ZSE40(F) ISE40--62(L)-(M) With analog output DC (+) (Brown) DC (+) (Brown) Analog output (Gray) Analog output (Gray) OUT1 (Black) OUT2 (White) Load Main circuit Main

Digital Flow Switches

How to Order Integrated Display Type M PF2A7 10 01 27 Flow rate range 1 to 10 l/min 5 to 50 l/min 10 to 100 l/min 20 to 200 l/min 50 to 500 l/min 10 50 11 21 51 Thread type Unit specification Nil M With unit switching function Fixed SI unit Note) Nil N F Lead wire (Refer to page 35.)

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

-A18 ZPT40HNJ50-01-A18 ZPT40HNJ75-01-A18 ZPT50HNJ25-01-A18 ZPT50HNJ50-01-A18 ZPT50HNJ75-01-A18 ZPT63HNJ25-01-A18 ZPT63HNJ50-01-A18 ZPT63HNJ75-01-A18 ZPT80HNJ25-01-A18 Model Mass ZPT80HNJ50-01-A18 ZPT80HNJ75-01-A18 ZPT100HNJ25-01-A22 ZPT100HNJ50-01-A22 ZPT100HNJ75-01-A22 ZPT100HNJ100-01-A22 ZPT125HNJ25-01-A22 ZPT125HNJ50-01-A22 ZPT125HNJ75-01-A22 ZPT125HNJ100-01-A22 Pad dia.

7.5

SJ3000-42-1A-l SJ3000-42-2A-l SJ3000-42-3A-l SJ3000-42-4A-l SJ3000-42-6A-l SJ3000-42-5A For D-sub connector For flat ribbon cable 26 pins For flat ribbon cable 20 pins m: 1 (Connector upward) For flat ribbon cable 10 pins D side m: 2 (Connector lateral) For PC wiring 20 pins For EX180 serial wiring Note) For PC wiring 20 pins with power supply terminal SJ3000-76-2A-05 Note) SI unit is not

VXA21/22

(P1+0.1013) l/min(ANR) Calculation by effective area Q=109.6.S.(P1+0.1013) l/min(ANR) Water How to Read the Graph In case of a flow of 2 l/min.

Process Pump

The result is approximately 10 L/min (ANR). Air consumption (L/min [ANR]) SUP = 0.7 MPa 40 35 30 SUP = 0.5 MPa 25 20 SUP = 0.35 MPa Caution 15 SUP = 0.2 MPa 10 1.

PF2A/PF2W

Digital Flow Switch For Air Series PF2A How to Order ZSE ISE Integrated display type PF2A7 10 01 27 PSE Flow rate range Z I SE3 Thread type Unit specifications 1 to 10 l/min 5 to 50 l/min 10 to 100 l/min 20 to 200 l/min 50 to 500 l/min 10 50 11 21 51 Nil N F Rc NPT G Nil M Wiring specifications With unit switching function Fixed SI unit Note) PS 3 m lead wire with connector Without lead wire

Vacuum Module Series ZX

K1 A V ZX1 5 Z B D M L 15 C 0X B ZSP1 D L AMJ Applicable nozzle diameter Piping specifications Unit for replacement Nil L Grommet (0.6 m) Grommet (3 m) C Connector (0.6 m) CL Connector (3 m) CN Without connector For ejector system Manifold All ports are equipped with plugs.

With Factory Installed

When using seal tape, leave one thread exposed when wrapping fitting or pipe. 0.1 i'--... 01 5 O~ o 0.2 0.3 0.4 0.5 0.6 0.7 08 0.9 1 00 1000 2000 Flow ra te / mi n IANR) Inlet pressure MPa AR3001-03 AR3001-03 0.6 ~ 0.5 ---'" " Jp J 0.25 '" I r~r " ::;; l' 0.2 ~ --P l' a. r< & "" & l' ::> 0.4 ~ ~ ~ 0.3 ~ -... a. ID '$'2 1-?/"(9 . "OS .

Free Mount Cylinder Series CU

Lead wire length symbols: 0.5 m Nil(Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Since there are applicable auto switches other than the above, refer to page 538 for details. For detail about auto switches with pre-wired connector, refer to pages 1328 to 1329.

PSxx-OML0002CN

3 ISE30A -0.11 MPa Y ZSE30A 0-101 kPa ZSE30AF -100100 kPa K T 2 01 R1/8(M5) N01 NPT1/8 (M5) A1 A C4H 4mm5/32 inch C6H 6mm A2 B NH7 1/4 inch N7H A3 C C4L 4mm5/32 inch C6L 6mm B N7L 1/4 inch D + N NPN1 P PNP1 A NPN2 B PNP2 C NPN1+ D NPN1+ E PNP1+ F PNP1+ 1 L (2 m) 1 (2 m 1 G 1 M SI2 P (psi)1 1NP3 4 1 2kPaMPa -8No.PS-OML0002CN-G / A ZS-38-A1 (M35 L 2 ) B ZS-38-A2 (M35 L