High Vacuum Angle Valve

ULTIC ARMOR is a registered trademark of Nippon Valqua Industries, Ltd. 427 B XLF/XLFV Series Specifications Model XLF(V)-16 XLF(V)-25 XLF(V)-40 XLF(V)-50 XLF(V)-63 XLF(V)-80 XLF(V)-100 XLF(V)-160 Valve type Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum XLF 5 to 60 (High temperature type: 5 to 150) Operating temperature (C) XLFV 5 to 50 Operating pressure

CXS

0 0.01 V = up to 100mm/s V = up to 300mm/s 20 40 60 80 100 0.05 Overhang L (mm) Weight m (kg) Graph V = over 400mm/s; up to 10mm 11 2 CXSM CXSL 1 CXSL6 CXSM6 0.5 0 0.01 20 40 60 80 100 32 Weight m (kg) Overhang L (mm) 25 Graph up to 50mm 9 0.1 20 0.05 V = up to 100mm/s V = up to 300mm/s 0.05 0.04 15 0.03 10 Weight m (kg) 0 0.01 20 40 60 80 100 Overhang L (mm) 0.02 Graph V = up to 400mm/s

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Grommet 12 V Diagnostic indication (2-color indication) 5 V, 12 V IC Relay, PLC Yes 24 V 12 V Grommet IC 5 V, 12 V Water resistant (2-color indication) 12 V 3-wire (NPN equivalent) A96 IC 5 V Yes Grommet A93 A90 IC 100 V 100 V or less Relay, PLC 12 V 24 V 2-wire No 1 Water resistant type auto switches can be mounted on the above models, but in such case SMC cannot guarantee water resistance

SMC Basic Pneumatics

But this is theory; no adiustment is made tor practice when w simply use gauge pressur in bar +11 lf volume V, = 1 ff at a standard absolute pressure of 14.7 psi. is compressed at constant temprature lo a volume V, = 0.5 ft" then: o1.lA P,.V, = P"'V" P"=-t .

%silltr

But this is theory; no adiustment is made tor practice when w simply use gauge pressur in bar +11 lf volume V, = 1 ff at a standard absolute pressure of 14.7 psi. is compressed at constant temprature lo a volume V, = 0.5 ft" then: o1.lA P,.V, = P"'V" P"=-t .

Table of Contents

Power supply Single phase 200V AC (A type) or Single phase 100V AC (A1 type) MC NFB Servomotor HC-PQ C P U V W L1 U V Servo amp MR-CA or SM L2 E W MR-CA1 The cable length between the controller and servo amp is 2m or less. 24VDC Z CN1 EMG Note 7) Shuts off with alarm signal when servo ON is turned OFF.

Electric Actuator with Integrated Guide

Power supply Single phase 200V AC (A type) or Single phase 100V AC (A1 type) MC NFB Servomotor HC-PQ C P U V W L1 U V Servo amp MR-CA or SM L2 E W MR-CA1 The cable length between the controller and servo amp is 2m or less. 24VDC Z CN1 EMG Note 7) Shuts off with alarm signal when servo ON is turned OFF.

Electric Actuators

Power supply Single phase 200VAC (A type) or Single phase 100VAC (A1 type) MC NFB Servomotor HC-PQ C P U V W L1 U V Servo amp MR-CA or SM L2 E W MR-CA1 The cable length between the controller and servo amp is 2m or less. 24VDC Z CN1 EMG Note 7) Shuts off with alarm signal when servo ON is turned OFF.

High Vacuum Angle Valve

Chemraz is a registered trademark of Greene, Tweed Technologies, Inc. 4 XLA/XLA V Series Specifications Model XLA(V)-16-2 XLA(V)-25-2 XLA(V)-40-2 XLA(V)-50-2 XLA(V)-63-2 XLA(V)-80-2 Valve type Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum Operating temperature [C] XLA 5 to 60 (High-temperature type: 5 to 150) XLAV 5 to 50 Operating pressure [Pa(abs)] 1 x 106

MY1

IC circuit 3-wire (PNP) 2-wire 12 V Diagnostic indication (2-color indicator) Water resistant (2-color indicator) 100 V 3-wire (NPN) 5 V, 12 V IC circuit Relay, PLC Yes Grommet 24 V 3-wire (PNP) 2-wire 12 V 3-wire (NPN) 5 V, 12 V IC circuit M9PA1 M9PAV1 3-wire (PNP) 2-wire M9BA1 M9BAV1 12 V 5 V 12 V Relay, PLC Z76 Z732 A96 A93 A90 IC circuit 3-wire (NPN equivalent) Yes Grommet 24 V

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

12 V 12 V IC circuit 5 V, 12 V Relay, PLC Diagnostic indication (2-color indicator) Yes Grommet 24 V 12 V IC circuit 5 V, 12 V Water resistant (2-color indicator) M9PAV1 M9PA1 M9BAV1 M9BA1 12 V 3-wire (NPN equivalent) Grommet 24 V A96V A96 IC circuit 5 V Yes A93V2 A93 A90 IC circuit 100 V Relay, PLC 2-wire 12 V A90V No 100 V or less 1 Water resistant type auto switches can be mounted

Dedicated Controller

Power supply Single phase 200V AC (A type) or Single phase 100V AC (A1 type) MC NFB Servomotor HC-PQ C P U V W L1 U V Servo amp MR-CA or SM L2 E W MR-CA1 The cable length between the controller and servo amp is 2m or less. 24VDC Z CN1 EMG Note 7) Shuts off with alarm signal when servo ON is turned OFF.

17

12 V IC circuit 12 V 5 V, 12 V 12 V IC circuit Relay, PLC Diagnostic indication (2-color indicator) 24 V Yes Grommet 5 V, 12 V IC circuit Water resistant (2-color indicator) M9PAV1 M9PA1 M9BAV1 M9BA1 12 V 3-wire (NPN equivalent) Grommet 24 V A96V A96 IC circuit 5 V Yes A93V2 A93 A90 100 V IC circuit Relay, PLC 2-wire 12 V A90V No 100 V or less 1 Water resistant type auto switches

CEx-OMQ0011

ML2B32 15N Va 0.25m/s 0.5MPa L1 0.05m L2 0.05m W W 1 L L1 W W W M We M3 V M1 V <> W max=60N( Va P 19) a1= W = 15 =0.25 W max 60 M 2 max=2Nm( Va P 19) a2= M = 0.75 =0.375 M max 2 <> We=1.410VaW=1.4100.2515=52.2N M max=3.5Nm( V=1.4Va) M 3 WeL 1 =52.50.05 1 =0.88Nm 3 3 a3= M 3 = 0.88 =0.25 M 3max 3.5 M max=12Nm( V=1.4Va) M 1 WeL 1 1 =52.50.05 1 =0.88Nm 3 3 a4= M 1 =

EX245-FPS1_2_3_eng

and Z Impact resistance LED Indicators 2 Retaining Screws 2 0 V (US1) 5 5 1 1 No corrosive gas Operating environment 3 FE Power connection (XD2) Push Pull connetor (24 Volt) ON ON Safe input 4 24 V (US1) 24 V (US2) 5 Description Item 7/8" 5-pins Plug (XD1) 7/8" 5-pins Socket (XD2) Power connection (XD1) Push Pull connetor (24 Volt) 4 two-channel or 8 signle-channel Number of inputs 2 1 4

Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 01 (R 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A2 (Bracket B, Horizontal Mounting)

Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: R 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: Bracket A, Vertical Mounting, Operation Manual: -

Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: R 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: -, Operation Manual: -

Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: R 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: None, Operation Manual: Operation Manual, Calibration Certificate

Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: SI Unit Only, Piping Specification: R 1/8, Lead Wire: -, Bracket: -, Operation Manual: -