New 1/8 3.2 H 100 VAC K L P Q R S T U 5/32 3/8 4 J 110 VAC 7/32 5.6 2 Size 2 Single K 200 VAC Unit 3/32 2.4 1/8 N.C.
(1) LECSS2-T P+DP+CG3G4 G3G4 P+D P+D P P+ C C G3 D (3) (1) G4 5m 5 m (12) 1.
E H J L N M W (T) X Min. port size LQ1F41 12 28 30 53 60 21 33.1 34 12 10 9.4 LQ1F42 10 58 7.4 LQ1F51 19 32 36 58 65.2 26 40 41 14 16 15 LQ1F52 12 63.2 9.4 LQ1F61 25 39.5 36 69 81.5 49 51 14 22.5 21.2 LQ1F62 19 15 3 SMC (W) (M) N J SMC 3/4 19 X H (E) (T) Class 4, 5 JIS 10K flange W Note) H Inch sizes Model Applicable tubing O.D.
Model (L) 3 E J M H W ( T ) L N LQ1F41 LQ1F42 LQ1F51 LQ1F52 LQ1F61 LQ1F62 12 10 19 12 25 19 60 53 34 SMC 30 12 33.1 28 21 65.2 58 (M) W N J SMC 58 41 36 14 40 32 26 3/4 19 63.2 (E) (T) H 69 51 81.5 36 14 49 39.5 Class 4, 5 JIS 10K flange Inch sizes H Applicable tubing O.D.
Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-
M 2-J, thread depth K 2-J, thread depth K DIN terminal: D Conduit terminal: T D S F Q Cable 6 to 12 Q 2 F 34 G1/2 D 25 T C C R R Width across flats H Width across flats H E E S 2 2-P Port size A B 2-P Port size A B M M 2-J, thread depth K 2-J, thread depth K G1/2 Specifications with bracket Orifice 2, 3, 4.5, 6 Orifice 8, 10 7.5 2.3 Bracket Y 29 Mounting hole 2-5.3 Bracket 22 5.5 52 28
each Shock resistance Endurance 10 G; X, Y, Z directions, 3 times each CE2 Impact resistance 250 g or less Weight ML2B 3-point Preset Counter/Dimensions C J G5-S CV MVGQ CC RB J D-X 20Data 10-12-31 31 Series CEU Extension Cable How to Order CE1-R Cable length Suffix 05 10 15 20 Extension cable Nil 5 m 10 m Extension cable & connector C 15 m 20 m Extension cable CE1R Stroke reading cylinder
Local Area: (800) 258-9200-www.stevenengineering.com 4-FD RHC MK(2) FT FV M RS Q G FX FL RS H A 4-O (Special cap bolt) A + Stroke FZ FG RZQ Head side flange style: MI W S CE1G Bore size Stroke 4-FD CEP1 CE1 FT FV M CE2 FL FX ML2B A + Stroke 4-O (Special cap bolt) FZ FG C J G5-S Double clevis style: CE1D Bore size Stroke CV MVGQ 4-O CC CX +0.4 +0.2 CZ 0.1 0.3 RB J CD hole H10 Shaft d9 CU T
(M5) @ NVJ100 Dimensions inch (mm) L Type Plug Connec,tor : tWJl14O-OLOO.M3 : tWJ114O-OLOO-M3 M Type Plug Connector: NvJl14O-OMOO-M3 : NVJ114O-O OO-M3 .E 0.10(2.6) Dia 1.03i26.2) [d, [ 8 ; I F l j { i 1L l o t : ffi0r 9 A l ; l { .?
(M5) @ NVJ100 Dimensions inch (mm) L Type Plug Connec,tor : tWJl14O-OLOO.M3 : tWJ114O-OLOO-M3 M Type Plug Connector: NvJl14O-OMOO-M3 : NVJ114O-O OO-M3 .E 0.10(2.6) Dia 1.03i26.2) [d, [ 8 ; I F l j { i 1L l o t : ffi0r 9 A l ; l { .?
(M5) @ NVJ100 Dimensions inch (mm) L Type Plug Connec,tor : tWJl14O-OLOO.M3 : tWJ114O-OLOO-M3 M Type Plug Connector: NvJl14O-OMOO-M3 : NVJ114O-O OO-M3 .E 0.10(2.6) Dia 1.03i26.2) [d, [ 8 ; I F l j { i 1L l o t : ffi0r 9 A l ; l { .?
MM RR TDe9 D E e Width across flats G Air release TT C Air release Air release l 10 f NA T B TX TY 0.3 TY 0.3 NB SS + Q + l + Stroke S + Stroke M H ZZ + Stroke ZZ + Q + l + Stroke TZ (mm) With rod boot Bore size (mm) Stroke range (mm) l J B C F GA GB M NA NB P R S T RR SS TD TT TX TY TZ e f Q 1 1 2 32 M10 x 1.25 58 38 16 32 15 11 37 31 3/8 39 141 11 2 113 20 28 58 20 98 52 21.5 15 25 to 1800
Speed 300 mm/s Dimensions Basic Type REA A K W HT HC X N Direct Mount Type REAR 2-P piping port 4-Counter bore B Counter bore depth C H HA Y T 8-MM thread depth M CB L T 4-J effective thread length E X F GW GP WS Slider Type/Slide Bearing REAS Slider Type/Ball Bushing REAL QW PW D 4-LD HS CR W K REAR10 REAR15 Switch rail HR Q + Stroke G Plug Z + Stroke High Precision Guide Type REAH (mm)
Note 3) Bowl assembly for the AL30 to AL60 models comes with a bowl guard (steel band material). 511 Series AL10 to AL60 Dimensions AL10 AL20 J M U T N S D Bracket (Option) A B C R B C Q IN OUT IN OUT OUT 2 x P (Port size) OUT 2 x P (Port size) Clearance for maintenance G Clearance for maintenance A G AL30, AL40 AL50, AL60 Bracket (Option) T N S T M U M U D J D J N S Bracket (Option) R B
Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: N7H (ΓΈ1/4" One-touch Fitting, Straight Type), Lead Wire: w/o Lead Wire, Bracket: None, Operation Manual: T (w/o Operation Manual, Calibration Certificate)
T) LVA V LVH M N LVD LVQ30, LVQ50 V SMC LVQ SMC B A SMC C LQ B A U D LVN Z (Max. T) TI/ TIL PA M N PAX LVQ40, LVQ60 PB C B A D (Max.
M N C D 4-O T Q 2-P E B S K L U W AA A I AP R X AB Y + Stroke J V Z + Stroke AC AD 8-AF AE For standard stroke (mm) Bore size (mm) Stroke range (mm) AC E D AF G AE AD AB AA N M F L K B J AP C H I A 20 25 32 40 50 75, 100, 125, 150, 200 M5 x 0.8 depth 10 16.5 92 60 9.5 depth 6 30 75 11 12 45 25 5.5 80 60 55 108 M8 x 1.25 depth 14 25 24 30 99 M6 x 1 depth 12 16.5 113 65 11 depth 8 30 85 13
J 0.04 J 0.09 J 0.27J 0.4 J Allowable kinetic energy Air cushion/Double rod CS1 Air cushion 0.17 J 0.19 J 0.4 J 0.66 J 0.97 J C76 Non-rotating accuracy 1 30' 1 30' 1 1 0 42' 0 42' Non-rotating 0/+1.4 0/+1 Stroke tolerance (mm) C85 Maximum ambient temperature of rod boots only.
O DEL (3) 03132ASCII 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 ASCII 0 1 2 3 4 5 6 7 8 9 A B C D E F 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 ASCII G H I J K L M N O P Q R S T U V 0"(1)1630H (4) a b c d e f ASCII a b c d e f * a1661H 14 6 14 14.3.3 1 [A] [a] [B] [b] [C] [c] [D] [d] [E] [e] [F] [f] 14.3.4 ETX(STXSOH)ASCII 162ASCII16 S T X E T X [0] [A] [1] [F] [5] [2]